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Journal Articles

Protection of extreme ultraviolet lithography masks. I. Thermophoretic protection factors at low pressure for diffusing nanoscale particles

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Leonard E. Klebanoff, Anthony S. Geller, John R. Torczynski, Michael A. Gallis, Daniel J. Rader, Frank C. Chilese, Rudy F. Garcia, Gil Delgado
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031601 (2015)
https://doi.org/10.1116/1.4916210
Published: March 2015
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Journal Articles

Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique

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Eih-Zhe Liang, Shih-Che Hung, Ya-Ping Hsieh, Ching-Fuh Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 110–116 (2008)
https://doi.org/10.1116/1.2825163
Published: January 2008
View articletitled, Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique
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Journal Articles

Simple theoretic approach to estimate the effect of gravity and thermophoresis on the diffusional nanoparticle contamination under low pressure conditions

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Christof Asbach, Heinz Fissan, Jung Hyeun Kim, Se-Jin Yook, David Y. H. Pui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 47–53 (2007)
https://doi.org/10.1116/1.2404685
Published: December 2006
View articletitled, Simple theoretic approach to estimate the effect of gravity and thermophoresis on the diffusional nanoparticle contamination under low pressure conditions
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Journal Articles

Lithographically induced self-assembly of periodic polymer micropillar arrays

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Stephen Y. Chou, Lei Zhuang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 17, 3197–3202 (1999)
https://doi.org/10.1116/1.590979
Published: November 1999
View articletitled, Lithographically induced self-assembly of periodic polymer micropillar arrays
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