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Journal Articles

Study of defects population and contaminations in silica/tantala coated mirrors

D. D’Ubaldo, M. Sbroscia, V. C. A. Ficca, E. Stellino, A. Pasqualetti, D. Sentenac, J. Gargiulo, L. Francescon, L. Pinard, E. Placidi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034003 (2024)
https://doi.org/10.1116/6.0003510
Published: April 2024
View article titled, Study of defects population and contaminations in silica/tantala coated mirrors
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Journal Articles

Influence of electron beam irradiation on nanoscale adhesion during colloidal probe experiments inside the scanning electron microscope

Waldemar Klauser, Turgut Nasrullayev, Sergej Fatikow
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052802 (2023)
https://doi.org/10.1116/6.0002764
Published: July 2023
View article titled, Influence of electron beam irradiation on nanoscale adhesion during colloidal probe experiments inside the scanning electron microscope
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Includes: Supplementary data
Journal Articles

Ultra high vacuum beam pipe of the Einstein Telescope project: Challenges and perspectives

Aniello Grado, Emanuele Tofani, Marco Angelucci, Roberto Cimino, Julien Gargiulo, Fedor Getman, Andrea Liedl, Luca Limatola, Vito Mennella, Antonio Pasqualetti, Fulvio Ricci, Daniel Sentenac, Luisa Spallino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 024201 (2023)
https://doi.org/10.1116/6.0002323
Published: February 2023
View article titled, Ultra high vacuum beam pipe of the Einstein Telescope project: Challenges and perspectives
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Journal Articles

Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research

Mario Baum, Christoph Meinecke, Thomas Blaudeck, Christian Helke, Danny Reuter, Karla Hiller, Sascha Hermann, Stefan E. Schulz, Harald Kuhn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062805 (2021)
https://doi.org/10.1116/6.0001299
Published: November 2021
View article titled, Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research
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Journal Articles

Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication

Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G302 (2017)
https://doi.org/10.1116/1.4991807
Published: September 2017
View article titled, Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication
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Journal Articles

Cross-sectional atomic force microscope in scanning electron microscope

Byong Chon Park, Woon Song, Dal Hyun Kim, Ju-Yeop Lee, Jaewan Hong, Jin Seung Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FC04 (2014)
https://doi.org/10.1116/1.4901565
Published: November 2014
View article titled, Cross-sectional atomic force microscope in scanning electron microscope
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Includes: Supplementary data
Journal Articles

Determination of thin film coefficient of thermal expansion and residual strain from freestanding fixed–fixed beams

Ryan M. Pocratsky, Maarten P. de Boer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 062001 (2014)
https://doi.org/10.1116/1.4896761
Published: October 2014
View article titled, Determination of thin film coefficient of thermal expansion and residual strain from freestanding fixed–fixed beams
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Journal Articles

Potassium hydroxide polishing of nanoscale deep reactive-ion etched ultrahigh aspect ratio gratings

Alexander Bruccoleri, Dong Guan, Pran Mukherjee, Ralf K. Heilmann, Mark L. Schattenburg, Stephen Vargo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06FF02 (2013)
https://doi.org/10.1116/1.4820901
Published: September 2013
View article titled, Potassium hydroxide polishing of nanoscale deep reactive-ion etched ultrahigh aspect ratio gratings
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Journal Articles

X-ray enhanced sputter rates in argon cluster ion sputter-depth profiling of polymers

Peter J. Cumpson, Jose F. Portoles, Naoko Sano, Anders J. Barlow
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021208 (2013)
https://doi.org/10.1116/1.4793284
Published: February 2013
View article titled, X-ray enhanced sputter rates in argon cluster ion sputter-depth profiling of polymers
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Journal Articles

Lithographically fabricated gratings for the interferometric measurement of material shear moduli under extreme conditions

Arianna E. Gleason, Richard C. Tiberio, Wendy L. Mao, Suzanne Ali, Cynthia A. Bolme, Amy Lazicki, Garry Bordonaro, John Treichler, Vincent Genova, Jon H. Eggert
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F306 (2012)
https://doi.org/10.1116/1.4767323
Published: November 2012
View article titled, Lithographically fabricated gratings for the interferometric measurement of material shear moduli under extreme conditions
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Journal Articles

Assessing the mask clamping ability of a low thermal expansion material chuck

J. R. Zeuske, P. Vukkadala, R. L. Engelstad, A. R. Mikkelson, G. Kalkowski, S. Risse, S. Mueller
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6E17–C6E22 (2010)
https://doi.org/10.1116/1.3502449
Published: November 2010
View article titled, Assessing the mask clamping ability of a low thermal expansion material chuck
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Journal Articles

Diagnostics and modeling of CH 4 – CO 2 plasmas for nanosmooth diamond deposition: Comparison to experimental data

T. Gries, L. Vandenbulcke, S. de Persis, O. Aubry, J. L. Delfau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2309–2320 (2009)
https://doi.org/10.1116/1.3231447
Published: October 2009
View article titled, Diagnostics and modeling of CH 4 – CO 2 plasmas for nanosmooth diamond deposition: Comparison to experimental data
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Journal Articles

Three-dimensional molecular dynamics modeling of nanocutting

Z. G. Zhang, F. Z. Fang, X. T. Hu, C. K. Sun
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1340–1344 (2009)
https://doi.org/10.1116/1.3079760
Published: May 2009
View article titled, Three-dimensional molecular dynamics modeling of nanocutting
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Journal Articles

Spatial-frequency multiplication with multilevel interference lithography

Chih-Hao Chang, Y. Zhao, R. K. Heilmann, M. L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2135–2138 (2008)
https://doi.org/10.1116/1.2976604
Published: December 2008
View article titled, Spatial-frequency multiplication with multilevel interference lithography
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Journal Articles

Ion beam machining of Si layer deposited on Zerodur® substrate

Yuichi Kurashima, Tomonori Tajima, Iwao Miyamoto, Manabu Ando, Atsushi Numata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 934–938 (2008)
https://doi.org/10.1116/1.2907779
Published: April 2008
View article titled, Ion beam machining of Si layer deposited on Zerodur® substrate
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Journal Articles

Evaluation of surface roughness of Zerodur® substrates machined by Ar + ion beam with energy of 3 – 10 keV

Yuichi Kurashima, Ryou Uozumi, Iwao Miyamoto, Manabu Ando, Atsushi Numata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2104–2109 (2007)
https://doi.org/10.1116/1.2800333
Published: December 2007
View article titled, Evaluation of surface roughness of Zerodur® substrates machined by Ar + ion beam with energy of 3 – 10 keV
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Journal Articles

Analysis of Coulomb and Johnsen-Rahbek electrostatic chuck performance for extreme ultraviolet lithography

M. R. Sogard, A. R. Mikkelson, M. Nataraju, K. T. Turner, R. L. Engelstad
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2155–2161 (2007)
https://doi.org/10.1116/1.2798724
Published: December 2007
View article titled, Analysis of Coulomb and Johnsen-Rahbek electrostatic chuck performance for extreme ultraviolet lithography
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Journal Articles

Electrostatic chucking for extreme ultraviolet lithography: Simulations and experiments

M. Nataraju, J. Sohn, S. Veeraraghavan, A. R. Mikkelson, K. T. Turner, R. L. Engelstad, C. K. Van Peski, K. J. Orvek
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 2834–2839 (2006)
https://doi.org/10.1116/1.2388967
Published: November 2006
View article titled, Electrostatic chucking for extreme ultraviolet lithography: Simulations and experiments
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Journal Articles

Direct patterning of spin-on glass with 157 nm lithography: Application to nanoscale crystal growth

T. M. Bloomstein, P. W. Juodawlkis, R. B. Swint, S. G. Cann, S. J. Deneault, N. N. Efremow, Jr., D. E. Hardy, M. F. Marchant, A. Napoleone, D. C. Oakley, M. Rothschild
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2617–2623 (2005)
https://doi.org/10.1116/1.2101692
Published: December 2005
View article titled, Direct patterning of spin-on glass with 157 nm lithography: Application to nanoscale crystal growth
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Journal Articles

Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride

Jiwang Yan, Katsuo Syoji, Jun’ichi Tamaki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 46–51 (2004)
https://doi.org/10.1116/1.1633770
Published: December 2003
View article titled, Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride
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