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Journal Articles

Study on geometry-dependent n+-InGaN regrowth via MOCVD for AlN/GaN ohmic contact application

Editor’s Pick
Yu-Xi Zhou, Jie-Jie Zhu, Jing-Shu Guo, Ling-Jie Qin, Bo-Wen Zhang, Meng-Di Li, Ming-Chen Zhang, Xiao-Hua Ma
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052201 (2024)
https://doi.org/10.1116/6.0003690
Published: August 2024
View article titled, Study on geometry-dependent n<sup>+</sup>-InGaN regrowth via MOCVD for AlN/GaN ohmic contact application
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Journal Articles

Thermally stable radio frequency power and noise behaviors of AlGaN/GaN high electron mobility transistor without voltage-blocking buffer layer design

Chong-Rong Huang, Hsien-Chin Chiu, Hsuan-Ling Kao, Hsiang-Chun Wang, Shinn-Yn Lin, Chih-Tien Chen, Kuo-Jen Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043201 (2024)
https://doi.org/10.1116/6.0003551
Published: May 2024
View article titled, Thermally stable radio frequency power and noise behaviors of AlGaN/GaN high electron mobility transistor without voltage-blocking buffer layer design
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Journal Articles

Development of the electron cyclotron resonance heating system for Divertor Tokamak Test

Saul Garavaglia, Luca Balbinot, Alessandro Bruschi, Daniele Busi, Andrea Bussolan, Francesco Fanale, Gustavo Granucci, Alessandro Moro, Paola Platania, Natale Rispoli, Afra Romano, Emanuele Sartori, Stefan Schmuck, Alessandro Simonetto, Espedito Vassallo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044201 (2023)
https://doi.org/10.1116/6.0002396
Published: May 2023
View article titled, Development of the electron cyclotron resonance heating system for Divertor Tokamak Test
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Journal Articles

Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

Editor’s Pick
Kaustubh Vyas, Kashif M. Awan, Ksenia Dolgaleva
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012804 (2023)
https://doi.org/10.1116/6.0002167
Published: January 2023
View article titled, Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices
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Journal Articles

Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

Henock Demessie Yallew, Jana Jágerská, Martin M. Greve
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012601 (2023)
https://doi.org/10.1116/6.0002187
Published: December 2022
View article titled, Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography
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Journal Articles

Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices

Andrey V. Starodubov, Alexey A. Serdobintsev, Viktor V. Galushka, Ilya O. Kozhevnikov, Anton M. Pavlov, Giacomo Ulisse, Viktor Krozer, Nikita M. Ryskin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014201 (2022)
https://doi.org/10.1116/6.0001552
Published: December 2021
View article titled, Magnetron co-sputtered <em>μ</em>m-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices
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Journal Articles

Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment

Taiyu Okatani, Yuichi Sato, Kaoru Imai, Kazuhiro Hane, Yoshiaki Kanamori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 030602 (2021)
https://doi.org/10.1116/6.0000971
Published: April 2021
View article titled, Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment
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Journal Articles

Development of microfabricated planar slow-wave structures on dielectric substrates for miniaturized millimeter-band traveling-wave tubes

Nikita M. Ryskin, Roman A. Torgashov, Andrey V. Starodubov, Andrey G. Rozhnev, Alexey A. Serdobintsev, Anton M. Pavlov, Viktor V. Galushka, Dmitry A. Bessonov, Giacomo Ulisse, Viktor Krozer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 013204 (2021)
https://doi.org/10.1116/6.0000716
Published: January 2021
View article titled, Development of microfabricated planar slow-wave structures on dielectric substrates for miniaturized millimeter-band traveling-wave tubes
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Journal Articles

Atomic force microscopy for nanoscale mechanical property characterization

Gheorghe Stan, Sean W. King
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 060801 (2020)
https://doi.org/10.1116/6.0000544
Published: November 2020
View article titled, Atomic force microscopy for nanoscale mechanical property characterization
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Journal Articles

Electron dynamics during the reignition of pulsed capacitively-coupled radio-frequency discharges

Keith Hernandez, Lawrence J. Overzet, Matthew J. Goeckner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 034005 (2020)
https://doi.org/10.1116/1.5133790
Published: April 2020
View article titled, Electron dynamics during the reignition of pulsed capacitively-coupled radio-frequency discharges
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Journal Articles

Insulating regions in a TiO2 thin film defined by laser irradiation

Syeed E. Ahmed, Jesse Huso, Jacob R. Ritter, John Igo, Yi Gu, Matthew D. McCluskey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032203 (2020)
https://doi.org/10.1116/1.5142402
Published: March 2020
View article titled, Insulating regions in a TiO<sub>2</sub> thin film defined by laser irradiation
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Includes: Supplementary data
Journal Articles

Dynamic Stokes polarimetric imaging system with dual-wavelength operation

Chien-Yuan Han, Meng-Ting Chen, Hong-Bin Lai, Shih-Hsiang Lai, Shih-Chin Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014010 (2020)
https://doi.org/10.1116/1.5129301
Published: December 2019
View article titled, Dynamic Stokes polarimetric imaging system with dual-wavelength operation
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Journal Articles

High-yield fabrication method for high-frequency graphene devices using titanium sacrificial layers

Panagiotis C. Theofanopoulos, Scott Ageno, Yuqi Guo, Suneet Kale, Qing Hua Wang, Georgios C. Trichopoulos
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 041801 (2019)
https://doi.org/10.1116/1.5098324
Published: June 2019
View article titled, High-yield fabrication method for high-frequency graphene devices using titanium sacrificial layers
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Journal Articles

Precise setting of micro-cavity resonance wavelength by dry etching

Editor’s Pick
Mehdi Jahed, Johan S. Gustavsson, Anders Larsson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031217 (2019)
https://doi.org/10.1116/1.5092192
Published: May 2019
View article titled, Precise setting of micro-cavity resonance wavelength by dry etching
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Journal Articles

Particle-based chemical oscillation as a function of depth in latex films using gas cluster ion beam secondary ion mass spectrometry profiling

Michaeleen L. Pacholski, Zhaohui Qu, Wuye Ouyang, Zhibo Zheng, Rong Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03E105 (2018)
https://doi.org/10.1116/1.5024044
Published: May 2018
View article titled, Particle-based chemical oscillation as a function of depth in latex films using gas cluster ion beam secondary ion mass spectrometry profiling
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Journal Articles

Improvement of Ohmic contacts on Ga2O3 through use of ITO-interlayers

Patrick H. Carey, IV, Jiancheng Yang, Fan Ren, David C. Hays, Stephen J. Pearton, Akito Kuramata, Ivan I. Kravchenko
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 061201 (2017)
https://doi.org/10.1116/1.4995816
Published: October 2017
View article titled, Improvement of Ohmic contacts on Ga<sub>2</sub>O<sub>3</sub> through use of ITO-interlayers
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Journal Articles

Mid-IR resonant cavity detectors

Trevor A. O'Loughlin, Gregory R. Savich, Daniel E. Sidor, Brendan T. Marozas, Terry D. Golding, Keith D. Jamison, Leif Fredin, Burt Fowler, Weerasinghe Priyantha, Gary W. Wicks
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 02B111 (2017)
https://doi.org/10.1116/1.4977780
Published: March 2017
View article titled, Mid-IR resonant cavity detectors
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Journal Articles

Effect of droplet size, droplet placement, and gas dissolution on throughput and defect rate in UV nanoimprint lithography

Akhilesh Jain, Andrew Spann, Roger T. Bonnecaze
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 011602 (2017)
https://doi.org/10.1116/1.4971771
Published: December 2016
View article titled, Effect of droplet size, droplet placement, and gas dissolution on throughput and defect rate in UV nanoimprint lithography
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Journal Articles

Experimental constructions of binary matrices with good peak-sidelobe distances

Jerod Michel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 061604 (2016)
https://doi.org/10.1116/1.4967995
Published: November 2016
View article titled, Experimental constructions of binary matrices with good peak-sidelobe distances
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Journal Articles

Mask registration and lithography platform portability for nitride fin-based field effect transistors prototyping

Jae Woo Suh, Michael E. Babb, Edward L. Principe, Harlan Rusty Harris
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K602 (2016)
https://doi.org/10.1116/1.4967182
Published: November 2016
View article titled, Mask registration and lithography platform portability for nitride fin-based field effect transistors prototyping
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