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Journal Articles

Periodically pulsed laser-assisted tunneling may generate terahertz radiation

Mark J. Hagmann, Dmtrij G. Coombs, Dmitry A. Yarotski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 03D109 (2017)
https://doi.org/10.1116/1.4979549
Published: April 2017
View article titled, Periodically pulsed laser-assisted tunneling may generate terahertz radiation
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Journal Articles

Investigation of resist filling profile evolution in microimprint lithography

Du Jun, Wei Zhengying, Chu Huali, Zhang Yubin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 011601 (2015)
https://doi.org/10.1116/1.4906100
Published: January 2015
View article titled, Investigation of resist filling profile evolution in microimprint lithography
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Journal Articles

Investigation of resist filling behavior in microimprint lithography by computational fluid dynamics simulation and defocusing digital particle image velocimetry

Jun Du, Zhengying Wei, Shize Li, Yiping Tang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021601 (2013)
https://doi.org/10.1116/1.4788802
Published: January 2013
View article titled, Investigation of resist filling behavior in microimprint lithography by computational fluid dynamics simulation and defocusing digital particle image velocimetry
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Journal Articles

Electron emission from LiNbO 3 crystal excited by ultraviolet laser

T. Kisa, K. Murakami, S. Abo, F. Wakaya, M. Takai, T. Ishida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C2B27–C2B29 (2010)
https://doi.org/10.1116/1.3333438
Published: March 2010
View article titled, Electron emission from LiNbO 3 crystal excited by ultraviolet laser
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Journal Articles

Realization of nanosecond pulse laser micromachining system

Chunyang Liu, Xing Fu, Yong Wu, Yi Li, Fengming Sun, Xiaotang Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1319–1322 (2009)
https://doi.org/10.1116/1.3119676
Published: May 2009
View article titled, Realization of nanosecond pulse laser micromachining system
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Journal Articles

Prospects of free electron analog to digital technology

Rafael Aldana, R. Fabian Pease
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2592–2595 (2008)
https://doi.org/10.1116/1.2991988
Published: December 2008
View article titled, Prospects of free electron analog to digital technology
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Journal Articles

Current spreading of III-nitride light-emitting diodes using plasma treatment

Hsin-Ying Lee, Ke-Hao Pan, Chih-Chien Lin, Yun-Chorng Chang, Fu-Jen Kao, Ching-Ting Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 1280–1283 (2007)
https://doi.org/10.1116/1.2753853
Published: July 2007
View article titled, Current spreading of III-nitride light-emitting diodes using plasma treatment
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Journal Articles

Analysis of the driving characteristic of carbon nanotube triode with high frequency

Weiqiang Chai, Chaogang Lou, Qilong Wang, Wei Lei, Xiaobing Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 829–832 (2007)
https://doi.org/10.1116/1.2735967
Published: May 2007
View article titled, Analysis of the driving characteristic of carbon nanotube triode with high frequency
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Journal Articles

Millimeter wave generator based on field emission cathode

Ming-Chieh Lin, Pu-Shih Lu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 636–639 (2007)
https://doi.org/10.1116/1.2539638
Published: March 2007
View article titled, Millimeter wave generator based on field emission cathode
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Journal Articles

Aligned carbon nanotubes/fibers for applications in vacuum microwave amplifiers

W. I. Milne, K. B. K. Teo, E. Minoux, O. Groening, L. Gangloff, L. Hudanski, J.-P. Schnell, D. Dieumegard, F. Peauger, I. Y. Y. Bu, M. S. Bell, P. Legagneux, G. Hasko, G. A. J. Amaratunga
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 345–348 (2006)
https://doi.org/10.1116/1.2161223
Published: January 2006
View article titled, Aligned carbon nanotubes/fibers for applications in vacuum microwave amplifiers
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Journal Articles

Shape engineering: A novel optical proximity correction technique for attenuated phase-shift mask

S. Pau, K. Bolan, M. Blakey, O. Nalamasu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 18, 2896–2899 (2000)
https://doi.org/10.1116/1.1313570
Published: November 2000
View article titled, Shape engineering: A novel optical proximity correction technique for attenuated phase-shift mask
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Journal Articles

Multiparameter grating metrology using optical scatterometry

Christopher J. Raymond, Michael R. Murnane, Steven L. Prins, S. Sohail, H. Naqvi, John R. McNeil, Jimmy W. Hosch
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 15, 361–368 (1997)
https://doi.org/10.1116/1.589320
Published: March 1997
View article titled, Multiparameter grating metrology using optical scatterometry
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Journal Articles

Metrology of subwavelength photoresist gratings using optical scatterometry

Christopher J. Raymond, Michael R. Murnane, S. Sohail, H. Naqvi, John R. McNeil
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 13, 1484–1495 (1995)
https://doi.org/10.1116/1.588176
Published: July 1995
View article titled, Metrology of subwavelength photoresist gratings using optical scatterometry
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Journal Articles

Simulations of trench‐filling profiles under ionized magnetron sputter metal deposition

S. Hamaguchi, S. M. Rossnagel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 13, 183–191 (1995)
https://doi.org/10.1116/1.587995
Published: March 1995
View article titled, Simulations of trench‐filling profiles under ionized magnetron sputter metal deposition
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Journal Articles

Investigation of the operating modes of gated vacuum field emitter arrays to reduce failure rates

S. Meassick, Z. Xia, C. Chan, J. Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 12, 710–712 (1994)
https://doi.org/10.1116/1.587377
Published: March 1994
View article titled, Investigation of the operating modes of gated vacuum field emitter arrays to reduce failure rates
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Journal Articles

High power modulator for plasma ion implantation

Dan M. Goebel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 12, 838–842 (1994)
https://doi.org/10.1116/1.587356
Published: March 1994
View article titled, High power modulator for plasma ion implantation
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