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Journal Articles

Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica

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Zhichao Hu, Dongfang Zhu, Zixuan Guo, Xudi Wang, Hailin Bi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 010601 (2025)
https://doi.org/10.1116/6.0004122
Published: January 2025
View article titled, Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica
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Journal Articles

Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

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Kaustubh Vyas, Kashif M. Awan, Ksenia Dolgaleva
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012804 (2023)
https://doi.org/10.1116/6.0002167
Published: January 2023
View article titled, Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices
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Journal Articles

Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment

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Taiyu Okatani, Yuichi Sato, Kaoru Imai, Kazuhiro Hane, Yoshiaki Kanamori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 030602 (2021)
https://doi.org/10.1116/6.0000971
Published: April 2021
View article titled, Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment
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Journal Articles

Insulating regions in a TiO2 thin film defined by laser irradiation

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Syeed E. Ahmed, Jesse Huso, Jacob R. Ritter, John Igo, Yi Gu, Matthew D. McCluskey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032203 (2020)
https://doi.org/10.1116/1.5142402
Published: March 2020
View article titled, Insulating regions in a TiO2 thin film defined by laser irradiation
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Includes: Supplementary data
Journal Articles

Precise setting of micro-cavity resonance wavelength by dry etching

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Mehdi Jahed, Johan S. Gustavsson, Anders Larsson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031217 (2019)
https://doi.org/10.1116/1.5092192
Published: May 2019
View article titled, Precise setting of micro-cavity resonance wavelength by dry etching
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Journal Articles

Mid-IR resonant cavity detectors

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Trevor A. O'Loughlin, Gregory R. Savich, Daniel E. Sidor, Brendan T. Marozas, Terry D. Golding, Keith D. Jamison, Leif Fredin, Burt Fowler, Weerasinghe Priyantha, Gary W. Wicks
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 02B111 (2017)
https://doi.org/10.1116/1.4977780
Published: March 2017
View article titled, Mid-IR resonant cavity detectors
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Journal Articles

Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity

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Yung-Jr Hung, Ping-Chien Chang, Yu-Nung Lin, Jia-Jin Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040609 (2016)
https://doi.org/10.1116/1.4955172
Published: June 2016
View article titled, Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity
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Journal Articles

Nearly lattice-matched Zn1-zCdzSe/Zn1-xCdxSe/Zn1-yMgySe (z > x) quantum wells for yellow emission

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Gerardo Villa-Martínez, Juan Carlos Banthí-Barcenas, Daniel Bahena, Frantisek Sutara, Isaac Hernández-Calderón
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041225 (2016)
https://doi.org/10.1116/1.4954267
Published: June 2016
View article titled, Nearly lattice-matched Zn1-zCdzSe/Zn1-xCdxSe/Zn1-yMgySe (z > x) quantum wells for yellow emission
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Journal Articles

Fabrication of pyramidal probes with various periodic patterns and a single nanopore

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Seong Soo Choi, Myoung Jin Park, Chul Hee Han, Sae Joong Oh, Sang Hun Han, Nam Kyou Park, Yong-Sang Kim, Hyuck Choo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06F203 (2015)
https://doi.org/10.1116/1.4935560
Published: November 2015
View article titled, Fabrication of pyramidal probes with various periodic patterns and a single nanopore
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Includes: Supplementary data
Journal Articles

Electron beam lithography using a PMMA/P(MMA 8.5 MAA) bilayer for negative tone lift-off process

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Andre-Pierre Blanchard-Dionne, Michel Meunier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 061602 (2015)
https://doi.org/10.1116/1.4935129
Published: November 2015
View article titled, Electron beam lithography using a PMMA/P(MMA 8.5 MAA) bilayer for negative tone lift-off process
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Journal Articles

Fabrication of metal strip waveguides for optical and microwave data transmission

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Behnam Banan, R. Niall Tait, Odile Liboiron-Ladouceur, Pierre Berini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 061208 (2015)
https://doi.org/10.1116/1.4935106
Published: November 2015
View article titled, Fabrication of metal strip waveguides for optical and microwave data transmission
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Journal Articles

Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses

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Takashi Ogawa, Boklae Cho, Sang Jung Ahn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FJ01 (2015)
https://doi.org/10.1116/1.4931933
Published: October 2015
View article titled, Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses
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Journal Articles

Effects of 340 keV proton irradiation on InGaN/GaN blue light-emitting diodes

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Byung-Jae Kim, Ya-Hsi Hwang, Shihyun Ahn, Fan Ren, Stephen J. Pearton, Jihyun Kim, Tae Sung Jang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051215 (2015)
https://doi.org/10.1116/1.4930297
Published: September 2015
View article titled, Effects of 340 keV proton irradiation on InGaN/GaN blue light-emitting diodes
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Journal Articles

TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime

Open Access
Ehsan Hashemi, Jörgen Bengtsson, Johan S. Gustavsson, Stefan Carlsson, Georg Rossbach, Åsa Haglund
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 050603 (2015)
https://doi.org/10.1116/1.4929416
Published: August 2015
View article titled, TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime
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Journal Articles

Design, fabrication, and optical characteristics of freestanding GaN waveguides on silicon substrate

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Takuji Sekiya, Takashi Sasaki, Kazuhiro Hane
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031207 (2015)
https://doi.org/10.1116/1.4917487
Published: April 2015
View article titled, Design, fabrication, and optical characteristics of freestanding GaN waveguides on silicon substrate
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Journal Articles

Numerical study of the laser-tip coupling in surface plasmon assisted stacked-double-gate field emitter arrays

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Youngjin Oh, Anna Mustonen, Thomas Feurer, Soichiro Tsujino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 03C112 (2015)
https://doi.org/10.1116/1.4915252
Published: March 2015
View article titled, Numerical study of the laser-tip coupling in surface plasmon assisted stacked-double-gate field emitter arrays
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Journal Articles

Fiber tip-based electron source

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Albert Casandruc, Günther Kassier, Haider Zia, Robert Bücker, R. J. Dwayne Miller
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 03C101 (2015)
https://doi.org/10.1116/1.4902016
Published: November 2014
View article titled, Fiber tip-based electron source
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Journal Articles

Experimental measurements of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

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Sudharshanan Raghunathan, Obert R. Wood, II, Pawitter Mangat, Erik Verduijn, Vicky Philipsen, Eric Hendrickx, Rik Jonckheere, Kenneth A. Goldberg, Markus P. Benk, Patrick Kearney, Zachary Levinson, Bruce W. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06F801 (2014)
https://doi.org/10.1116/1.4901876
Published: November 2014
View article titled, Experimental measurements of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images
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Journal Articles

High-voltage energy dispersive x-ray spectrometry using a low-energy primary beam

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Ying Wu, Dimitri Klyachko, Scott Davilla, James Spallas, Scott Indermuehle, Lawrence P. Muray
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FC05 (2014)
https://doi.org/10.1116/1.4901883
Published: November 2014
View article titled, High-voltage energy dispersive x-ray spectrometry using a low-energy primary beam
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Journal Articles

High-throughput fabrication of compact and flexible bilayer nanowire grid polarizers for deep-ultraviolet to infrared range

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Li Wang, Helmut Schift, Jens Gobrecht, Yasin Ekinci, Per Magnus Kristiansen, Harun H. Solak, Konstantins Jefimovs
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031206 (2014)
https://doi.org/10.1116/1.4874318
Published: April 2014
View article titled, High-throughput fabrication of compact and flexible bilayer nanowire grid polarizers for deep-ultraviolet to infrared range
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