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Journal Articles

Direction-identical scratching method for fabricating nanostructures using a modified AFM nanoscratching system

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Yanquan Geng, Bowen Yu, Yongda Yan, Zhenjiang Hu, Xuesen Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 021802 (2015)
https://doi.org/10.1116/1.4906790
Published: January 2015
View articletitled, Direction-identical scratching method for fabricating nanostructures using a modified AFM nanoscratching system
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Journal Articles

The influence of external load and air pressure on air slide table performance of ultraprecision machines in nanomachining

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Mehrdad Vahdati, Nader Vahdati
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1989–1992 (2009)
https://doi.org/10.1116/1.3148828
Published: July 2009
View articletitled, The influence of external load and air pressure on air slide table performance of ultraprecision machines in nanomachining
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Journal Articles

Development of the control system for three-axis ultraprecision compact micromilling machine

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Bo Wang, Peng Zhang, Yingchun Liang, Shen Dong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1285–1287 (2009)
https://doi.org/10.1116/1.3110007
Published: May 2009
View articletitled, Development of the control system for three-axis ultraprecision compact micromilling machine
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Journal Articles

Strain imaging of a magnetic layer formed on an air bearing surface of a hard disk drive head for perpendicular recording

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Keiji Takata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 997–1000 (2009)
https://doi.org/10.1116/1.3043457
Published: April 2009
View articletitled, Strain imaging of a magnetic layer formed on an air bearing surface of a hard disk drive head for perpendicular recording
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Journal Articles

Three-dimensional patterning using fine step motion in synchrotron radiation lithography

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M. Fukuda, K. Deguchi, M. Suzuki, Y. Utsumi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 2840–2843 (2006)
https://doi.org/10.1116/1.2366620
Published: November 2006
View articletitled, Three-dimensional patterning using fine step motion in synchrotron radiation lithography
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Journal Articles

Doppler writing and linewidth control for scanning beam interference lithography

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Juan C. Montoya, Chih-Hao Chang, Ralf K. Heilmann, Mark L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2640–2645 (2005)
https://doi.org/10.1116/1.2127938
Published: December 2005
View articletitled, Doppler writing and linewidth control for scanning beam interference lithography
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Journal Articles

Electron projection lithography tool development status

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Takaharu Miura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 20, 2622–2626 (2002)
https://doi.org/10.1116/1.1520576
Published: December 2002
View articletitled, Electron projection lithography tool development status
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Journal Articles

A vertical stepper for synchrotron x‐ray lithography

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S. Ishihara, M. Kanai, A. Une, M. Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 7, 1652–1656 (1989)
https://doi.org/10.1116/1.584508
Published: November 1989
View articletitled, A vertical stepper for synchrotron x‐ray lithography
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Journal Articles

Very large scale integrated pattern registration improvement by photoablation of resist‐covered alignment targets

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Kenneth J. Polasko, David J. Elliott, Bernhard P. Piwczyk
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 6, 389–393 (1988)
https://doi.org/10.1116/1.583960
Published: January 1988
View articletitled, Very large scale integrated pattern registration improvement by photoablation of resist‐covered alignment targets
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