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Journal Articles
J. Vac. Sci. Technol. B 42, 063211 (2024)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. B 41, 064205 (2023)
Published: December 2023
Journal Articles
J. Vac. Sci. Technol. B 41, 042801 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. B 40, 062805 (2022)
Published: November 2022
Journal Articles
J. Vac. Sci. Technol. B 39, 062207 (2021)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. B 39, 022201 (2021)
Published: February 2021
Journal Articles
J. Vac. Sci. Technol. B 38, 063201 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 043201 (2020)
Published: May 2020
Journal Articles
Pavel Serbun, Benjamin Bornmann, Aliaksandr Navitski, Günter Müller, Christian Prommesberger, Christoph Langer, Florian Dams, Rupert Schreiner
J. Vac. Sci. Technol. B 31, 02B101 (2013)
Published: November 2012
Journal Articles
Atsuo Jyouzuka, Tomonori Nakamura, Yoshihiro Onizuka, Hidenori Mimura, Takahiro Matsumoto, Hiroshi Kume
J. Vac. Sci. Technol. B 28, C2C31–C2C36 (2010)
Published: March 2010
Journal Articles
J. Vac. Sci. Technol. B 25, 636–639 (2007)
Published: March 2007
Journal Articles
J. Vac. Sci. Technol. B 25, 631–635 (2007)
Published: March 2007
Journal Articles
J. Vac. Sci. Technol. B 23, 3148–3152 (2005)
Published: December 2005
Journal Articles
J. Vac. Sci. Technol. B 23, 849–852 (2005)
Published: April 2005