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Journal Articles

Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy

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Jitae Park, Sejin Oh, Sung-Ho Jang, Dougyong Sung, Jin-Young Bang, Sung-Il Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 044202 (2025)
https://doi.org/10.1116/6.0004477
Published: June 2025
View article titled, Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy
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Journal Articles

Thermally stable radio frequency power and noise behaviors of AlGaN/GaN high electron mobility transistor without voltage-blocking buffer layer design

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Chong-Rong Huang, Hsien-Chin Chiu, Hsuan-Ling Kao, Hsiang-Chun Wang, Shinn-Yn Lin, Chih-Tien Chen, Kuo-Jen Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043201 (2024)
https://doi.org/10.1116/6.0003551
Published: May 2024
View article titled, Thermally stable radio frequency power and noise behaviors of AlGaN/GaN high electron mobility transistor without voltage-blocking buffer layer design
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Journal Articles

Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects

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Milad Rastkar Mirzaei, Zhisheng Shi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012204 (2024)
https://doi.org/10.1116/6.0003193
Published: January 2024
View article titled, Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects
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Journal Articles

New method of fabrication of suspended metallic single electron transistor (SET)

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Mohammad Istiaque Rahaman, G. P. Szakmany, A. O. Orlov, G. L. Snider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013201 (2024)
https://doi.org/10.1116/6.0003025
Published: January 2024
View article titled, New method of fabrication of suspended metallic single electron transistor (SET)
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Journal Articles

Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy

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A. R. Chourasia, D. R. Chopra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062806 (2023)
https://doi.org/10.1116/6.0002922
Published: November 2023
View article titled, Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy
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Journal Articles

Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths

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Se-Jin Oh, Chang-Gil Son, Min-kyu Sohn, Doug-Yong Sung, Min-Sung Kim, Ji-Soo Im, Sang Ki Nam
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052204 (2023)
https://doi.org/10.1116/6.0002890
Published: September 2023
View article titled, Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths
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Journal Articles

Improving detection of plasma etching end point using light compensation on optical emission spectra

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Se-Jin Oh, Doug-Yong Sung, Jung-Min Ko, Sang Ki Nam
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052206 (2022)
https://doi.org/10.1116/6.0002009
Published: September 2022
View article titled, Improving detection of plasma etching end point using light compensation on optical emission spectra
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Journal Articles

Analysis of diffraction-based wafer alignment rejection for thick aluminum process

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Liang Li, Chao Chen, Hui Zeng, Shiyi Hu, Libin Zhang, Yajuan Su, Yayi Wei, Tianchun Ye, Yun Wang, Jing Xue
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022603 (2022)
https://doi.org/10.1116/6.0001666
Published: March 2022
View article titled, Analysis of diffraction-based wafer alignment rejection for thick aluminum process
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Journal Articles

Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors

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Manh-Cuong Nguyen, An Hoang-Thuy Nguyen, Jiyong Yim, Anh-Duy Nguyen, Mingyu Kim, Jeonghan Kim, Jongyeon Beak, Rino Choi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032203 (2021)
https://doi.org/10.1116/6.0000906
Published: April 2021
View article titled, Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors
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Journal Articles

High signal-to-noise ratio differential conductance spectroscopy

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Hamed Alemansour, S. O. Reza Moheimani, James H. G. Owen, John N. Randall, Ehud Fuchs
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 010601 (2021)
https://doi.org/10.1116/6.0000823
Published: January 2021
View article titled, High signal-to-noise ratio differential conductance spectroscopy
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Journal Articles

Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

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Isak Silander, Thomas Hausmaninger, Clayton Forssén, Martin Zelan, Ove Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 042901 (2019)
https://doi.org/10.1116/1.5090860
Published: May 2019
View article titled, Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
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Includes: Supplementary data
Journal Articles

Designing an anisotropic noise filter for measuring critical dimension and line edge roughness from scanning electron microscope images

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Hyesung Ji, Soo-Young Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 06JA06 (2018)
https://doi.org/10.1116/1.5048077
Published: December 2018
View article titled, Designing an anisotropic noise filter for measuring critical dimension and line edge roughness from scanning electron microscope images
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Journal Articles

Dual-band ultraviolet photodetectors comprising nanostructured MgZnO on ZnO films

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Ching-Ting Lee, Tzu-Shun Lin, Hsin-Ying Lee, Day-Shan Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 061203 (2018)
https://doi.org/10.1116/1.5048677
Published: October 2018
View article titled, Dual-band ultraviolet photodetectors comprising nanostructured MgZnO on ZnO films
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Journal Articles

Fabrication and comparative study of DC and low frequency noise characterization of GaN/AlGaN based MOS-HEMT and HEMT

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Md Rezaul Hasan, Abhishek Motayed, Md Shamiul Fahad, Mulpuri V. Rao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 052202 (2017)
https://doi.org/10.1116/1.4998937
Published: August 2017
View article titled, Fabrication and comparative study of DC and low frequency noise characterization of GaN/AlGaN based MOS-HEMT and HEMT
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Journal Articles

Effects of various bias and temperature stresses on low-frequency noise properties of amorphous InGaZnO thin-film transistors

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Hee-Joong Kim, Chan-Yong Jeong, Sang-Dae Bae, Hyuck-In Kwon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 010601 (2017)
https://doi.org/10.1116/1.4972524
Published: December 2016
View article titled, Effects of various bias and temperature stresses on low-frequency noise properties of amorphous InGaZnO thin-film transistors
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Journal Articles

Analysis and in situ observation of humidity dependent atomic layer deposited-Al2O3 degradation

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Andreas Rückerl, Sophia Huppmann, Martin Mandl, Simeon Katz, Roland Zeisel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 01A104 (2017)
https://doi.org/10.1116/1.4971199
Published: December 2016
View article titled, Analysis and in situ observation of humidity dependent atomic layer deposited-Al2O3 degradation
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Journal Articles

Scatterometry for nanoimprint lithography

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Ruichao Zhu, Steven R. J. Brueck, Noel Dawson, Tito Busani, Praveen Joseph, Shrawan Singhal, S. V. Sreenivasan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K503 (2016)
https://doi.org/10.1116/1.4967933
Published: November 2016
View article titled, Scatterometry for nanoimprint lithography
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Journal Articles

Electrical characterization of a gate-recessed AlGaN/GaN high-electron-mobility transistor with a p-GaN passivation layer

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Kuang-Po Hsueh, Feng-Tso Chien, Li-Yi Peng, Chih-Wei Yang, Hou-Yu Wang, Kai-Di Mai, Hsien-Chin Chiu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 061204 (2016)
https://doi.org/10.1116/1.4963897
Published: September 2016
View article titled, Electrical characterization of a gate-recessed AlGaN/GaN high-electron-mobility transistor with a p-GaN passivation layer
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Journal Articles

Performance enhancement of MgZnO ultraviolet photodetectors using ultrathin Al2O3 inserted layer

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Hsin-Ying Lee, Wu-Han Tsai, Yu-Chang Lin, Ching-Ting Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 051207 (2016)
https://doi.org/10.1116/1.4962745
Published: September 2016
View article titled, Performance enhancement of MgZnO ultraviolet photodetectors using ultrathin Al2O3 inserted layer
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Journal Articles

Design, fabrication, and characterization of polymer-based cantilever probes for atomic force microscopes

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Fangzhou Yu, Jiangbo Liu, Xiao Zhang, Ai-Lian Lin, Nabeela Khan, Yanbiao Pan, Nan Gao, Qingze Zou, Jaeseok Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KI01 (2016)
https://doi.org/10.1116/1.4960726
Published: August 2016
View article titled, Design, fabrication, and characterization of polymer-based cantilever probes for atomic force microscopes
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