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Journal Articles

Determination and analysis of minimum dose for achieving vertical sidewall in electron-beam lithography

Xinyu Zhao, Qing Dai, Soo-Young Lee, Jin Choi, Sang-Hee Lee, In-Kyun Shin, Chan-Uk Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06F508 (2014)
https://doi.org/10.1116/1.4901013
Published: November 2014
View articletitled, Determination and analysis of minimum dose for achieving vertical sidewall in electron-beam lithography
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Journal Articles

Fast simulation of stochastic exposure distribution in electron-beam lithography

Xinyu Zhao, Soo-Young Lee, Sang-Hee Lee, Byung-Gook Kim, Han-Ku Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F308 (2012)
https://doi.org/10.1116/1.4767447
Published: November 2012
View articletitled, Fast simulation of stochastic exposure distribution in electron-beam lithography
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Journal Articles

Fast aerial image simulations using one basis mask pattern for optical proximity correction

Shiyuan Liu, Xiaofei Wu, Wei Liu, Chuanwei Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FH03 (2011)
https://doi.org/10.1116/1.3659718
Published: November 2011
View articletitled, Fast aerial image simulations using one basis mask pattern for optical proximity correction
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Journal Articles

Experimental demonstration of hybrid CMOS-single electron transistor circuits

Aaron A. Prager, Hubert C. George, Alexei O. Orlov, Gregory L. Snider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 041004 (2011)
https://doi.org/10.1116/1.3597833
Published: August 2011
View articletitled, Experimental demonstration of hybrid CMOS-single electron transistor circuits
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Journal Articles

Evaluation of a simplified simulation approach for thin film type gated field emitters

Jie Luo, Jun Chen, S. Z. Deng, N. S. Xu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 02B102 (2011)
https://doi.org/10.1116/1.3523102
Published: January 2011
View articletitled, Evaluation of a simplified simulation approach for thin film type gated field emitters
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Journal Articles

Application of neural network to controlling three-dimensional electron-beam exposure distribution in resist

C. Guo, S.-Y. Lee, S. H. Lee, B.-G. Kim, H.-K. Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2572–2579 (2009)
https://doi.org/10.1116/1.3259959
Published: December 2009
View articletitled, Application of neural network to controlling three-dimensional electron-beam exposure distribution in resist
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Journal Articles

Representation of product model in collaborative design based on semantic web technology

Xiangzhong Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1543–1547 (2009)
https://doi.org/10.1116/1.3054296
Published: May 2009
View articletitled, Representation of product model in collaborative design based on semantic web technology
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Journal Articles

Silicon single-electron transistor with oxide tunnel barriers fabricated using chemical mechanical polishing

Vishwanath Joshi, Alexei O. Orlov, Gregory L. Snider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2587–2591 (2008)
https://doi.org/10.1116/1.2978877
Published: December 2008
View articletitled, Silicon single-electron transistor with oxide tunnel barriers fabricated using chemical mechanical polishing
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Journal Articles

Thin-capping-and-regrowth molecular beam epitaxial technique for quantum dots and quantum-dot molecules

S. Suraprapapich, S. Thainoi, S. Kanjanachuchai, S. Panyakeow
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1665–1667 (2006)
https://doi.org/10.1116/1.2190666
Published: May 2006
View articletitled, Thin-capping-and-regrowth molecular beam epitaxial technique for quantum dots and quantum-dot molecules
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Journal Articles

Self inspection of integrated circuits pattern defects using support vector machines

Hanying Feng, Jun Ye, R. Fabian Pease
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 3085–3089 (2005)
https://doi.org/10.1116/1.2062434
Published: December 2005
View articletitled, Self inspection of integrated circuits pattern defects using support vector machines
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Journal Articles

Reconstruction of pattern images from scanning electron microscope images

Hanying Feng, Jun Ye, R. Fabian W. Pease
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 3080–3084 (2005)
https://doi.org/10.1116/1.2127944
Published: December 2005
View articletitled, Reconstruction of pattern images from scanning electron microscope images
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Journal Articles

Clocking of molecular quantum-dot cellular automata

Kevin Hennessy, Craig S. Lent
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 19, 1752–1755 (2001)
https://doi.org/10.1116/1.1394729
Published: September 2001
View articletitled, Clocking of molecular quantum-dot cellular automata
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Journal Articles

Demonstration of a functional quantum-dot cellular automata cell

Islamshah Amlani, Alexei O. Orlov, Gregory L. Snider, Craig S. Lent, Gary H. Bernstein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 16, 3795–3799 (1998)
https://doi.org/10.1116/1.590410
Published: November 1998
View articletitled, Demonstration of a functional quantum-dot cellular automata cell
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Journal Articles

Kinetic roughening of Si surfaces and surfactant effect in low temperature molecular beam epitaxy growth

B. Gallas, I. Berbezier, J. Derrien, D. Gandolfo, J. Ruiz, V. A. Zagrebnov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 16, 1564–1567 (1998)
https://doi.org/10.1116/1.589940
Published: May 1998
View articletitled, Kinetic roughening of Si surfaces and surfactant effect in low temperature molecular beam epitaxy growth
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Journal Articles

Differential charge detection for quantum-dot cellular automata

Islamshah Amlani, Alexei O. Orlov, Gregory L. Snider, Gary H. Bernstein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 15, 2832–2835 (1997)
https://doi.org/10.1116/1.589738
Published: November 1997
View articletitled, Differential charge detection for quantum-dot cellular automata
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Journal Articles

Developer temperature effect on negative deep ultraviolet resists: Characterization, modeling, and simulation

Paul Isaac Hagouel, Ioannis Karafyllidis, Andrew R. Neureuther
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 15, 2616–2620 (1997)
https://doi.org/10.1116/1.589695
Published: November 1997
View articletitled, Developer temperature effect on negative deep ultraviolet resists: Characterization, modeling, and simulation
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Journal Articles

Negative resist corner rounding. Envelope volume modeling

Paul Isaac L. Hagouel, Andrew R. Neureuther, Andrew M. Zenk
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 14, 4257–4261 (1996)
https://doi.org/10.1116/1.588586
Published: November 1996
View articletitled, Negative resist corner rounding. Envelope volume modeling
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Journal Articles

Charge detector realization for AlGaAs/GaAs quantum‐dot cellular automata

G. Bazán, A. O. Orlov, G. L. Snider, G. H. Bernstein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 14, 4046–4050 (1996)
https://doi.org/10.1116/1.588641
Published: November 1996
View articletitled, Charge detector realization for AlGaAs/GaAs quantum‐dot cellular automata
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Journal Articles

Novel postexposure bake simulator: First results

Luigi Capodieci, Azalia Krasnoperova, Franco Cerrina, Chris Lyons, Chris Spence, Kathy Early
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 13, 2963–2967 (1995)
https://doi.org/10.1116/1.588288
Published: November 1995
View articletitled, Novel postexposure bake simulator: First results
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Journal Articles

Adaptive neural network algorithms for computing proximity effect corrections

Robert C. Frye
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 9, 3054–3058 (1991)
https://doi.org/10.1116/1.585368
Published: November 1991
View articletitled, Adaptive neural network algorithms for computing proximity effect corrections
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