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Journal Articles

Plasma processing and annealing for defect management at SiO2/Si interface

Shota Nunomura, Takayoshi Tsutsumi, Isao Sakata, Masaru Hori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052202 (2023)
https://doi.org/10.1116/6.0002822
Published: August 2023
View article titled, Plasma processing and annealing for defect management at SiO<sub>2</sub>/Si interface
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Journal Articles

Effects of gases on the field emission performance of silicon gated field emitter array

Ranajoy Bhattacharya, Mason Cannon, Girish Rughoobur, Nedeljko Karaulac, Winston Chern, Reza Farsad Asadi, Zheng Tao, Bruce E. Gnade, Akintunde Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 053201 (2023)
https://doi.org/10.1116/6.0002789
Published: July 2023
View article titled, Effects of gases on the field emission performance of silicon gated field emitter array
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Journal Articles

Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication

Chen Zhu, Edward C. Kinzel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033601 (2023)
https://doi.org/10.1116/6.0002557
Published: May 2023
View article titled, Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication
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Journal Articles

Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy

Mohammad Fazel Vafadar, Rezoana Bente Arif, Qihua Zhang, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030601 (2023)
https://doi.org/10.1116/6.0002494
Published: April 2023
View article titled, Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy
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Journal Articles

Yellow luminescence band defect related photocurrent instability of GaN p-i-n ultraviolet photodetectors

Liyong Pu, Zhiyuan Wang, Dong Zhou, Weizong Xu, Fangfang Ren, Dunjun Chen, Rong Zhang, Youdou Zheng, Hai Lu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052201 (2022)
https://doi.org/10.1116/6.0001916
Published: August 2022
View article titled, Yellow luminescence band defect related photocurrent instability of GaN p-i-n ultraviolet photodetectors
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Journal Articles

Theoretical research on suppression ratio of dynamic gas lock for extreme ultraviolet lithography contamination control

Jiazheng Sun, Kuibo Wang, Xiaobin Wu, Yan Luo, Jinbin Ding
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042603 (2022)
https://doi.org/10.1116/6.0001852
Published: June 2022
View article titled, Theoretical research on suppression ratio of dynamic gas lock for extreme ultraviolet lithography contamination control
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Journal Articles

Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film

Linfeng Du, Paul Ruchhoeft, Demetre J. Economou, Vincent M. Donnelly
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022206 (2022)
https://doi.org/10.1116/6.0001709
Published: February 2022
View article titled, Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film
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Journal Articles

In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source

Linfeng Du, Demetre J. Economou, Vincent M. Donnelly
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022207 (2022)
https://doi.org/10.1116/6.0001710
Published: February 2022
View article titled, In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source
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Journal Articles

Effect of room air exposure on the field emission performance of UV light irradiated Si-gated field emitter arrays

Ranajoy Bhattacharya, Mason Cannon, Rushmita Bhattacharjee, Girish Rughoobur, Nedeljko Karaulac, Winston Chern, Akintunde Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 010601 (2022)
https://doi.org/10.1116/6.0001593
Published: December 2021
View article titled, Effect of room air exposure on the field emission performance of UV light irradiated Si-gated field emitter arrays
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Journal Articles

Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint

Sijia Xie, Jan Erjawetz, Christine Schuster, Helmut Schift
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052603 (2021)
https://doi.org/10.1116/6.0001206
Published: September 2021
View article titled, Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint
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Journal Articles

Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array

Ranajoy Bhattacharya, Nedeljko Karaulac, Girish Rughoobur, Winston Chern, Akintunade Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 033201 (2021)
https://doi.org/10.1116/6.0001036
Published: May 2021
View article titled, Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array
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Journal Articles

Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents

Jiaying Lu, Yun Zhong, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 022803 (2021)
https://doi.org/10.1116/6.0000763
Published: February 2021
View article titled, Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents
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Journal Articles

Superhydrophobic SnO2 nanowire/graphene heterostructure-based ultraviolet detectors

Youngsoo Kang, Sanghyun Ju
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062210 (2020)
https://doi.org/10.1116/6.0000565
Published: November 2020
View article titled, Superhydrophobic SnO<sub>2</sub> nanowire/graphene heterostructure-based ultraviolet detectors
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Journal Articles

Comparative study on the molecular beam epitaxial growth and characterization of AlGaN nanowire structures on AlN buffer layer and on Si

Jiaying Lu, Yun Zhong, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062804 (2020)
https://doi.org/10.1116/6.0000646
Published: November 2020
View article titled, Comparative study on the molecular beam epitaxial growth and characterization of AlGaN nanowire structures on AlN buffer layer and on Si
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Journal Articles

Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection

Norbert Böwering, Christian Meier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062602 (2020)
https://doi.org/10.1116/6.0000501
Published: October 2020
View article titled, Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection
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Journal Articles

Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN

Luisa Krückeberg, Steffen Wirth, Victor V. Solovyev, Andreas Großer, Igor V. Kukushkin, Thomas Mikolajick, Stefan Schmult
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042203 (2020)
https://doi.org/10.1116/1.5145198
Published: June 2020
View article titled, Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN
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Journal Articles

Optical properties of the crystalline silicon wafers described using the universal dispersion model

Daniel Franta, Jiří Vohánka, Martin Bránecký, Pavel Franta, Martin Čermák, Ivan Ohlídal, Vladimír Čech
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062907 (2019)
https://doi.org/10.1116/1.5122284
Published: October 2019
View article titled, Optical properties of the crystalline silicon wafers described using the universal dispersion model
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Journal Articles

Chemical reaction and diffusion kinetics during laser-induced submillisecond heating for lithographic applications

Jing Jiang, Byungki Jung, Michael O. Thompson, Christopher K. Ober
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 041601 (2019)
https://doi.org/10.1116/1.5086871
Published: June 2019
View article titled, Chemical reaction and diffusion kinetics during laser-induced submillisecond heating for lithographic applications
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Includes: Supplementary data
Journal Articles

Magneto-optical confirmation of Landau level splitting in a GaN/AlGaN 2DEG grown on bulk GaN

Stefan Schmult, Victor V. Solovyev, Steffen Wirth, Andreas Großer, Thomas Mikolajick, Igor V. Kukushkin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021210 (2019)
https://doi.org/10.1116/1.5088927
Published: March 2019
View article titled, Magneto-optical confirmation of Landau level splitting in a GaN/AlGaN 2DEG grown on bulk GaN
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Journal Articles

Over 1 GW/cm2 for high-power GaN p-i-n diodes with edge termination structure and laser annealing

Chia-Jui Yu, Jyun-You Lu, Li-Wei Shan, Chien-Ju Chen, Jyun-Hao Liao, Meng-Chyi Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 011208 (2019)
https://doi.org/10.1116/1.5066633
Published: January 2019
View article titled, Over 1 GW/cm<sup>2</sup> for high-power GaN <em>p-i-n</em> diodes with edge termination structure and laser annealing
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