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Journal Articles

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

Featured
Akihiro Shimizu, Kazuhiro Fukada, Shinichi Endo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023203 (2025)
https://doi.org/10.1116/6.0004239
Published: February 2025
View article titled, Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
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Journal Articles

Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica

Zhichao Hu, Dongfang Zhu, Zixuan Guo, Xudi Wang, Hailin Bi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 010601 (2025)
https://doi.org/10.1116/6.0004122
Published: January 2025
View article titled, Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF<sub>2</sub> to fused silica
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Journal Articles

Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness

Naoki Takano, Hiromasa Niinomi, Tomoya Oshikiri, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042603 (2024)
https://doi.org/10.1116/6.0003779
Published: July 2024
View article titled, Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness
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Journal Articles

Carbon nanotube collimator as an vacuum ultraviolet window

S. C. Olsen, D. D. Allred, R. R. Vanfleet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043001 (2024)
https://doi.org/10.1116/6.0003675
Published: June 2024
View article titled, Carbon nanotube collimator as an vacuum ultraviolet window
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Journal Articles

Science challenges and research opportunities for plasma applications in microelectronics

FeaturedScilight
David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042202 (2024)
https://doi.org/10.1116/6.0003531
Published: June 2024
View article titled, Science challenges and research opportunities for plasma applications in microelectronics
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Journal Articles

Plasma confinement by an optoelectronic system

Editor’s Pick
Ryuta Tsukazaki (塚嵜 琉太), Haruhiro Naito (内藤 陽大), Hisashi Koga (古賀 永), Akito Fukuda (福田 旺土), Naoki Kato (加藤 直樹), Takayuki Watanabe (渡辺 貴之), Susumu Takabayashi (鷹林 将)
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034201 (2024)
https://doi.org/10.1116/6.0003520
Published: April 2024
View article titled, Plasma confinement by an optoelectronic system
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Includes: Supplementary data
Journal Articles

Effect of water vapor desorption on the performance of gallium nitride field emitter array

Ranajoy Bhattacharya, Pao-Chuan Shih, Tomás Palacios, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013202 (2024)
https://doi.org/10.1116/6.0003187
Published: January 2024
View article titled, Effect of water vapor desorption on the performance of gallium nitride field emitter array
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Journal Articles

Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices

Ranajoy Bhattacharya, Marco Turchetti, Matthew Yeung, P. Donald Keathley, Karl K. Berggren, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063202 (2023)
https://doi.org/10.1116/6.0003142
Published: December 2023
View article titled, Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices
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Journal Articles

Plasma processing and annealing for defect management at SiO2/Si interface

Shota Nunomura, Takayoshi Tsutsumi, Isao Sakata, Masaru Hori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052202 (2023)
https://doi.org/10.1116/6.0002822
Published: August 2023
View article titled, Plasma processing and annealing for defect management at SiO<sub>2</sub>/Si interface
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Journal Articles

Effects of gases on the field emission performance of silicon gated field emitter array

Ranajoy Bhattacharya, Mason Cannon, Girish Rughoobur, Nedeljko Karaulac, Winston Chern, Reza Farsad Asadi, Zheng Tao, Bruce E. Gnade, Akintunde Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 053201 (2023)
https://doi.org/10.1116/6.0002789
Published: July 2023
View article titled, Effects of gases on the field emission performance of silicon gated field emitter array
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Journal Articles

Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication

Editor’s Pick
Chen Zhu, Edward C. Kinzel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033601 (2023)
https://doi.org/10.1116/6.0002557
Published: May 2023
View article titled, Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication
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Journal Articles

Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy

Mohammad Fazel Vafadar, Rezoana Bente Arif, Qihua Zhang, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030601 (2023)
https://doi.org/10.1116/6.0002494
Published: April 2023
View article titled, Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy
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Journal Articles

Yellow luminescence band defect related photocurrent instability of GaN p-i-n ultraviolet photodetectors

Liyong Pu, Zhiyuan Wang, Dong Zhou, Weizong Xu, Fangfang Ren, Dunjun Chen, Rong Zhang, Youdou Zheng, Hai Lu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052201 (2022)
https://doi.org/10.1116/6.0001916
Published: August 2022
View article titled, Yellow luminescence band defect related photocurrent instability of GaN p-i-n ultraviolet photodetectors
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Journal Articles

Theoretical research on suppression ratio of dynamic gas lock for extreme ultraviolet lithography contamination control

Jiazheng Sun, Kuibo Wang, Xiaobin Wu, Yan Luo, Jinbin Ding
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042603 (2022)
https://doi.org/10.1116/6.0001852
Published: June 2022
View article titled, Theoretical research on suppression ratio of dynamic gas lock for extreme ultraviolet lithography contamination control
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Journal Articles

Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film

Linfeng Du, Paul Ruchhoeft, Demetre J. Economou, Vincent M. Donnelly
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022206 (2022)
https://doi.org/10.1116/6.0001709
Published: February 2022
View article titled, Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film
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Journal Articles

In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source

Editor’s Pick
Linfeng Du, Demetre J. Economou, Vincent M. Donnelly
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022207 (2022)
https://doi.org/10.1116/6.0001710
Published: February 2022
View article titled, In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source
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Journal Articles

Effect of room air exposure on the field emission performance of UV light irradiated Si-gated field emitter arrays

Ranajoy Bhattacharya, Mason Cannon, Rushmita Bhattacharjee, Girish Rughoobur, Nedeljko Karaulac, Winston Chern, Akintunde Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 010601 (2022)
https://doi.org/10.1116/6.0001593
Published: December 2021
View article titled, Effect of room air exposure on the field emission performance of UV light irradiated Si-gated field emitter arrays
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Journal Articles

Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint

Editor’s Pick
Sijia Xie, Jan Erjawetz, Christine Schuster, Helmut Schift
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052603 (2021)
https://doi.org/10.1116/6.0001206
Published: September 2021
View article titled, Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint
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Journal Articles

Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array

Scilight
Ranajoy Bhattacharya, Nedeljko Karaulac, Girish Rughoobur, Winston Chern, Akintunade Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 033201 (2021)
https://doi.org/10.1116/6.0001036
Published: May 2021
View article titled, Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array
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Journal Articles

Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents

Jiaying Lu, Yun Zhong, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 022803 (2021)
https://doi.org/10.1116/6.0000763
Published: February 2021
View article titled, Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents
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