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Journal Articles

Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon

Editor’s Pick
Taeseung Jung, Seungyeob Kim, Sangho Lee, Jinho Ahn, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063202 (2024)
https://doi.org/10.1116/6.0003901
Published: October 2024
View articletitled, Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon
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Journal Articles

Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response

Kyeong Joon Jo, Soon-Won Jung, Ji Eun Jung, Ga-Eun Lee, Seong-Cheol Kim, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 055001 (2024)
https://doi.org/10.1116/6.0003829
Published: August 2024
View articletitled, Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response
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Journal Articles

Carbonized polyvinylidene difluoride films irradiated by variable-energy Ar+: Tunable morphology and resistive sensing

Islam F. Nuriahmetov, Ilya A. Zavidovskiy, Abdusame A. Khaidarov, Natalya F. Savchenko, Andrey A. Tatarintsev, Viacheslav V. Dremov, Oleg A. Streletskiy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043401 (2024)
https://doi.org/10.1116/6.0003657
Published: June 2024
View articletitled, Carbonized polyvinylidene difluoride films irradiated by variable-energy Ar+: Tunable morphology and resistive sensing
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Journal Articles

Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents

Ryo Miyazawa, Haruto Suzuki, Hibiki Takeda, Masanori Miura, Bashir Ahmmad, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022213 (2024)
https://doi.org/10.1116/6.0003217
Published: March 2024
View articletitled, Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents
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Journal Articles

Improved optical and electrical response by glancing angle synthesized Al2O3 nanorod array device

Abhijit Das, Naorem Khelchand Singh, Laishram Robindro Singh, Mitra Barun Sarkar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022211 (2024)
https://doi.org/10.1116/6.0003416
Published: March 2024
View articletitled, Improved optical and electrical response by glancing angle synthesized Al2O3 nanorod array device
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Journal Articles

Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments

Soon-Won Jung, Min Hyuk Chang, Kyeong-Joon Jo, Mi-Hee Jung, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052201 (2023)
https://doi.org/10.1116/6.0002631
Published: July 2023
View articletitled, Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments
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Journal Articles

Self-alignment of whole wafers using patterning for capillary forces

Ernest M. Walker, III, Ako Emanuel, Hans D. Hallen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032203 (2023)
https://doi.org/10.1116/6.0002518
Published: April 2023
View articletitled, Self-alignment of whole wafers using patterning for capillary forces
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Includes: Supplementary data
Journal Articles

Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform

Scilight
Chao-Ching Chiang, Chan-Wen Chiu, Fan Ren, Cheng-Tse Tsai, Yu-Te Liao, Josephine F. Esquivel-Upshaw, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012204 (2023)
https://doi.org/10.1116/6.0002293
Published: December 2022
View articletitled, Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform
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Journal Articles

Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

Henock Demessie Yallew, Jana Jágerská, Martin M. Greve
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012601 (2023)
https://doi.org/10.1116/6.0002187
Published: December 2022
View articletitled, Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography
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Journal Articles

Physics based model of an AlGaN/GaN vacuum field effect transistor

Editor’s Pick
N. Hernandez, M. Cahay, J. Ludwick, T. Back, H. Hall, J. O’Mara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 053201 (2022)
https://doi.org/10.1116/6.0001959
Published: September 2022
View articletitled, Physics based model of an AlGaN/GaN vacuum field effect transistor
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Includes: Supplementary data
Journal Articles

Sensitivity of thermal conductivity vacuum gauges for constant current and constant temperature operation

Christoph Langer, Dominik Berndt, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054203 (2022)
https://doi.org/10.1116/6.0001964
Published: August 2022
View articletitled, Sensitivity of thermal conductivity vacuum gauges for constant current and constant temperature operation
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Journal Articles

Spectroscopic, structural, and strain-dependent analysis of suspended bulk WSe2 sheets

Avra S. Bandyopadhyay, Anupama B. Kaul
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022202 (2022)
https://doi.org/10.1116/6.0001371
Published: February 2022
View articletitled, Spectroscopic, structural, and strain-dependent analysis of suspended bulk WSe2 sheets
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Includes: Supplementary data
Journal Articles

Leakage rate detection of ConFlat seals in aluminum and stainless steel flanges under mechanical loads for quantum optical experiments in space

Michael Elsen, Thi Thu Hien Dao, Claus Braxmaier, Jens Grosse
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064204 (2021)
https://doi.org/10.1116/6.0001525
Published: November 2021
View articletitled, Leakage rate detection of ConFlat seals in aluminum and stainless steel flanges under mechanical loads for quantum optical experiments in space
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Journal Articles

Miniature touch mode capacitance vacuum gauge with circular diaphragm

Xiaodong Han, Gang Li, Mahui Xu, Huangping Yan, Yongjian Feng, Detian Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064203 (2021)
https://doi.org/10.1116/6.0001332
Published: November 2021
View articletitled, Miniature touch mode capacitance vacuum gauge with circular diaphragm
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Journal Articles

Synthesis of NiS2 nanomaterial as wide range pressure sensor

Zehui Peng, Jing Zhang, Zhong Ma, Shuai Lou, Yumeng Xue, Shancheng Yan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062807 (2021)
https://doi.org/10.1116/6.0001344
Published: November 2021
View articletitled, Synthesis of NiS2 nanomaterial as wide range pressure sensor
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Journal Articles

Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles

Jiaxi Xiang, Anuj Singhal, Ralu Divan, Liliana Stan, Yuzi Liu, Igor Paprotny
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 042803 (2021)
https://doi.org/10.1116/6.0000992
Published: July 2021
View articletitled, Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles
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Includes: Supplementary data
Journal Articles

Superhydrophobic SnO2 nanowire/graphene heterostructure-based ultraviolet detectors

Youngsoo Kang, Sanghyun Ju
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062210 (2020)
https://doi.org/10.1116/6.0000565
Published: November 2020
View articletitled, Superhydrophobic SnO2 nanowire/graphene heterostructure-based ultraviolet detectors
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Journal Articles

Effect of oxygen plasma cleaning on nonswitching pseudo-Bosch etching of high aspect ratio silicon pillars

Ferhat Aydinoglu, Aixi Pan, Chenxu Zhu, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012804 (2020)
https://doi.org/10.1116/1.5122822
Published: January 2020
View articletitled, Effect of oxygen plasma cleaning on nonswitching pseudo-Bosch etching of high aspect ratio silicon pillars
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Journal Articles

Detection of ammonia at low concentrations (0.1–2 ppm) with ZnO nanorod-functionalized AlGaN/GaN high electron mobility transistors

Sunwoo Jung, Kwang Hyeon Baik, Fan Ren, Stephen J. Pearton, Soohwan Jang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 042201 (2017)
https://doi.org/10.1116/1.4989370
Published: June 2017
View articletitled, Detection of ammonia at low concentrations (0.1–2 ppm) with ZnO nanorod-functionalized AlGaN/GaN high electron mobility transistors
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Journal Articles

Fabrication of conductance-controllable standard leak elements on anodic aluminum oxide using a selective coating method

Benmeng Wei, Yongheng Zhao, Xudi Wang, Yu Wang, Wei Wei, Keqiang Qiu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 040601 (2017)
https://doi.org/10.1116/1.4985621
Published: June 2017
View articletitled, Fabrication of conductance-controllable standard leak elements on anodic aluminum oxide using a selective coating method
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