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Journal Articles
Mattias Hausladen, Andreas Schels, Philipp Buchner, Mathias Bartl, Ali Asgharzade, Simon Edler, Dominik Wohlfartsstätter, Michael Bachmann, Rupert Schreiner
J. Vac. Sci. Technol. B 42, 062209 (2024)
Published: November 2024
Journal Articles
J. Vac. Sci. Technol. B 36, 02C101 (2018)
Published: December 2017
Journal Articles
Point spread function and total process function measured for a variable-shaped electron beam system
J. Vac. Sci. Technol. B 34, 041601 (2016)
Published: March 2016
Journal Articles
J. Vac. Sci. Technol. B 32, 02B108 (2014)
Published: February 2014
Journal Articles
J. Vac. Sci. Technol. B 31, 02B110 (2013)
Published: February 2013
Journal Articles
J. Vac. Sci. Technol. B 23, 814–818 (2005)
Published: April 2005