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Journal Articles

Modification of discharge sequences to control the random dispersion of flake particles during wafer etching

Ching Ming Ku, Wen Yea Jang, Stone Cheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064203 (2023)
https://doi.org/10.1116/6.0002974
Published: November 2023
View article titled, Modification of discharge sequences to control the random dispersion of flake particles during wafer etching
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Journal Articles

Bilayer metal etch mask strategy for deep diamond etching

Yixiong Zheng, Matthias Muehle, Junyu Lai, John D. Albrecht, Jung-Hun Seo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022210 (2022)
https://doi.org/10.1116/6.0001424
Published: March 2022
View article titled, Bilayer metal etch mask strategy for deep diamond etching
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Journal Articles

Effect of the multiarray chip structure on the optical performance of GaN-based light emitting diodes

Gyu-Jae Jeong, Ho-Dol Yoo, Kyoung-Kook Kim, Sung-Nam Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051205 (2015)
https://doi.org/10.1116/1.4927370
Published: July 2015
View article titled, Effect of the multiarray chip structure on the optical performance of GaN-based light emitting diodes
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Journal Articles

Protection of extreme ultraviolet lithography masks. II. Showerhead flow mitigation of nanoscale particulate contamination

Leonard E. Klebanoff, John R. Torczynski, Anthony S. Geller, Michael A. Gallis, Daniel J. Rader, Frank C. Chilese, Rudy F. Garcia, Gil Delgado
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031602 (2015)
https://doi.org/10.1116/1.4916212
Published: March 2015
View article titled, Protection of extreme ultraviolet lithography masks. II. Showerhead flow mitigation of nanoscale particulate contamination
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Journal Articles

Protection of extreme ultraviolet lithography masks. I. Thermophoretic protection factors at low pressure for diffusing nanoscale particles

Leonard E. Klebanoff, Anthony S. Geller, John R. Torczynski, Michael A. Gallis, Daniel J. Rader, Frank C. Chilese, Rudy F. Garcia, Gil Delgado
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031601 (2015)
https://doi.org/10.1116/1.4916210
Published: March 2015
View article titled, Protection of extreme ultraviolet lithography masks. I. Thermophoretic protection factors at low pressure for diffusing nanoscale particles
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Journal Articles

Novel approach to improve heat dissipation of AlGaN/GaN high electron mobility transistors with a Cu filled via under device active area

Ya-Hsi Hwang, Tsung-Sheng Kang, Fan Ren, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 061202 (2014)
https://doi.org/10.1116/1.4896593
Published: October 2014
View article titled, Novel approach to improve heat dissipation of AlGaN/GaN high electron mobility transistors with a Cu filled via under device active area
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Journal Articles

Flexible transparent conductive heater using multiwalled carbon nanotube sheet

Daewoong Jung, Maeum Han, Gil S. Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 04E105 (2014)
https://doi.org/10.1116/1.4876127
Published: May 2014
View article titled, Flexible transparent conductive heater using multiwalled carbon nanotube sheet
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Includes: Supplementary data
Journal Articles

Electronic transport properties of top-gated epitaxial-graphene nanoribbon field-effect transistors on SiC wafers

Wan Sik Hwang, Kristof Tahy, Pei Zhao, Luke O. Nyakiti, Virginia D. Wheeler, Rachael L. Myers-Ward, Charles R. Eddy, Jr, D. Kurt Gaskill, Huili (Grace) Xing, Alan Seabaugh, Debdeep Jena
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 012202 (2014)
https://doi.org/10.1116/1.4861379
Published: January 2014
View article titled, Electronic transport properties of top-gated epitaxial-graphene nanoribbon field-effect transistors on SiC wafers
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Journal Articles

Demonstration of electrical connectivity between self-assembled structures

Madhav Rao, John C. Lusth, Susan L. Burkett
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 032002 (2013)
https://doi.org/10.1116/1.4802914
Published: May 2013
View article titled, Demonstration of electrical connectivity between self-assembled structures
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Journal Articles

Deep anisotropic LiNbO3 etching with SF6/Ar inductively coupled plasmas

Deng Jun, Jia Wei, Ching Eng Png, Si Guangyuan, Jaesung Son, Hyunsoo Yang, Aaron J. Danner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 011208 (2012)
https://doi.org/10.1116/1.3674282
Published: January 2012
View article titled, Deep anisotropic LiNbO<sub>3</sub> etching with SF<sub>6</sub>/Ar inductively coupled plasmas
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Journal Articles

Thermal simulation of laser lift-off AlGaN/GaN high electron mobility transistors mounted on AlN substrates

T. S. Kang, C. F. Lo, L. Liu, R. Finch, F. Ren, X. T. Wang, E. Douglas, S. J. Pearton, S. T. Hung, C.-J. Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 041202 (2011)
https://doi.org/10.1116/1.3605298
Published: June 2011
View article titled, Thermal simulation of laser lift-off AlGaN/GaN high electron mobility transistors mounted on AlN substrates
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Journal Articles

Finite-element simulations of the effect of device design on channel temperature for AlGaN/GaN high electron mobility transistors

E. A. Douglas, F. Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 020603 (2011)
https://doi.org/10.1116/1.3567183
Published: March 2011
View article titled, Finite-element simulations of the effect of device design on channel temperature for AlGaN/GaN high electron mobility transistors
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Journal Articles

Model for trap-assisted electron tunneling in thin insulators

V. Filip, J. Liu, C. K. Wong, H. Wong, D. Nicolaescu, V. Barna, E. S. Barna
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C2A58–C2A63 (2010)
https://doi.org/10.1116/1.3358301
Published: April 2010
View article titled, Model for trap-assisted electron tunneling in thin insulators
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Journal Articles

Design and optimization of wafer bonding packaged microelectromechanical systems thermoelectric power generators with heat dissipation path

Chengkuo Lee, Jin Xie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1267–1271 (2009)
https://doi.org/10.1116/1.3046155
Published: May 2009
View article titled, Design and optimization of wafer bonding packaged microelectromechanical systems thermoelectric power generators with heat dissipation path
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Journal Articles

Micro-electron-beam welding with a modified scanning electron microscopy: Findings and prospects

U. Reisgen, T. Dorfmüller
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1310–1314 (2009)
https://doi.org/10.1116/1.3137026
Published: May 2009
View article titled, Micro-electron-beam welding with a modified scanning electron microscopy: Findings and prospects
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Journal Articles

Theory of space charge limited regime of thermionic energy converter with negative electron affinity emitter

Joshua Ryan Smith, Griff L. Bilbro, Robert J. Nemanich
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1132–1141 (2009)
https://doi.org/10.1116/1.3125282
Published: May 2009
View article titled, Theory of space charge limited regime of thermionic energy converter with negative electron affinity emitter
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Journal Articles

Hot embossing by Joule heating

J. C. Lee, I. C. Leu, K. L. Lai, M. H. Hon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 260–263 (2008)
https://doi.org/10.1116/1.2834561
Published: January 2008
View article titled, Hot embossing by Joule heating
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Journal Articles

Recent advance in protection technology for extreme ultraviolet lithography masks under low-pressure condition

Jung Hyeun Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, L1–L6 (2008)
https://doi.org/10.1116/1.2821735
Published: January 2008
View article titled, Recent advance in protection technology for extreme ultraviolet lithography masks under low-pressure condition
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Journal Articles

Extreme ultraviolet lithography: A review

Banqiu Wu, Ajay Kumar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 1743–1761 (2007)
https://doi.org/10.1116/1.2794048
Published: October 2007
View article titled, Extreme ultraviolet lithography: A review
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Journal Articles

High quality of 830 nm material grown by solid source molecular beam epitaxy for laser device printing applications

I. C. Hernandez, M. McElhinney, L. Zeng, V. A. Mishournyi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 926–930 (2007)
https://doi.org/10.1116/1.2718963
Published: May 2007
View article titled, High quality of 830 nm material grown by solid source molecular beam epitaxy for laser device printing applications
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