Page 1 | Search Results | Journal of Vacuum Science & Technology B | AIP Publishing

Skip to Main Content

Skip Nav Destination

1-20 of 955

1

Sort by

Sort Order Select

Journal Articles

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

C. R. Fasano, F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, J. A. B. Termini

J. Vac. Sci. Technol. B 42, 064001 (2024)

https://doi.org/10.1116/6.0003958

Published: October 2024

View article titled, Constant period line gratings as a metric for patterning fidelity in electron beam lithography

Journal Articles

Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration

S. Kizawa, D. Bizen, K. Suzuki, S. Mizutani, R. Watanabe, Y. Kasai, Y. Mizuhara

J. Vac. Sci. Technol. B 42, 054003 (2024)

https://doi.org/10.1116/6.0003891

Published: August 2024

View article titled, Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration

Journal Articles

Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response

Kyeong Joon Jo, Soon-Won Jung, Ji Eun Jung, Ga-Eun Lee, Seong-Cheol Kim, Seung-Yun Lee

J. Vac. Sci. Technol. B 42, 055001 (2024)

https://doi.org/10.1116/6.0003829

Published: August 2024

View article titled, Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response

Journal Articles

Role of the oxidation conditions on the orientation of TiN_xO_y grown by atomic layer deposition: Impact on the optical and electrical properties

Kou Ihara, Julien Cardin, Maxime Leménager,