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Journal Articles

Evolution of water layers on wafer surfaces during bond chamber evacuation

Open Access
Max Huber, Andreas Zienert, Jörg Schuster
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 043001 (2025)
https://doi.org/10.1116/6.0004331
Published: June 2025
View articletitled, Evolution of water layers on wafer surfaces during bond chamber evacuation
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Journal Articles

Effect of Ag layer thickness and annealing treatment on the transmittance and conductivity of transparent antennas fabricated using ITO/Ag/ITO structures

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Yoji Yasuda, Yuka Saitou, Fukuro Koshiji, Takayuki Uchida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 042204 (2025)
https://doi.org/10.1116/6.0004573
Published: June 2025
View articletitled, Effect of Ag layer thickness and annealing treatment on the transmittance and conductivity of transparent antennas fabricated using ITO/Ag/ITO structures
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Journal Articles

Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy

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Jitae Park, Sejin Oh, Sung-Ho Jang, Dougyong Sung, Jin-Young Bang, Sung-Il Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 044202 (2025)
https://doi.org/10.1116/6.0004477
Published: June 2025
View articletitled, Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy
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Journal Articles

Multiplicity features of carbon nanotube emitters

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Rizos N. Krikkis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032802 (2025)
https://doi.org/10.1116/6.0004545
Published: May 2025
View articletitled, Multiplicity features of carbon nanotube emitters
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Journal Articles

Heating of C s 2 Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown

FeaturedOpen Access
Ryo Shinohara, Soumendu Bagchi, Evgenya Simakov, Danny Perez, Sergey V. Baryshev
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034003 (2025)
https://doi.org/10.1116/5.0263776
Published: May 2025
View articletitled, Heating of C s 2 Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown
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Journal Articles

Effect of space charge on photon-enhanced thermionic emission in the presence of the bidirectional discharge

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Xinqiao Lin, Ousi Pan, Zhimin Yang, Yanchao Zhang, Jincan Chen, Shanhe Su
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032401 (2025)
https://doi.org/10.1116/6.0004451
Published: May 2025
View articletitled, Effect of space charge on photon-enhanced thermionic emission in the presence of the bidirectional discharge
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Journal Articles

Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

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Aiman H. Al-Allaq, Md Abdullah Mamun, Matt Poelker, Abdelmageed Elmustafa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034203 (2025)
https://doi.org/10.1116/6.0004446
Published: April 2025
View articletitled, Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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Journal Articles

Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study

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Zhihong Gao, Leyi Zhang, Yongzhi Fang, Dongyu Cen, Maoxiang Liu, Wenli Wu, Yan Ding
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032801 (2025)
https://doi.org/10.1116/6.0004412
Published: April 2025
View articletitled, Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study
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Journal Articles

Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system

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Jaewon Hwang, Chihoon Lee, Kyu Lee, Younghun Kwon, Wonjo Woo, Seho Kim, Keunhyuk Yang, Youngwoon Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034001 (2025)
https://doi.org/10.1116/6.0004425
Published: April 2025
View articletitled, Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system
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Journal Articles

Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system

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Shunming Liu, Yigang Wang, Pengcheng Wang, Hong Song, Yuhui Guan, Jiaming Liu, Biao Tan, Xiaoyang Sun, Bangle Zhu, Ahong Li, Weidong Chen, Huafu Ouyang, Bo Li, Xiaolei Wu, Yongjia Lv
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034201 (2025)
https://doi.org/10.1116/6.0004393
Published: March 2025
View articletitled, Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system
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Journal Articles

Experimental current-voltage-temperature and thermal sensitivity behaviors of an ideal Schottky barrier diode over a wide temperature range

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Hasan Efeoǧlu, Abdulmecit Turut
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022212 (2025)
https://doi.org/10.1116/6.0004273
Published: March 2025
View articletitled, Experimental current-voltage-temperature and thermal sensitivity behaviors of an ideal Schottky barrier diode over a wide temperature range
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Journal Articles

Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique

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Iksu Kim, Umesh Balaso Apugade, So Min Oh, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022211 (2025)
https://doi.org/10.1116/6.0004301
Published: March 2025
View articletitled, Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique
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Journal Articles

Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation

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Zhihua Shen, Qing Cai, Qiaoning Li, Bin Ge, Xiao Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022805 (2025)
https://doi.org/10.1116/6.0004317
Published: February 2025
View articletitled, Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation
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Journal Articles

In situ field emission study of TiN-coated ZnO nanowires

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Xinran Li, Guichen Song, Guofu Zhang, Zhuoran Ou, Zhipeng Zhang, Shaozhi Deng, Ningsheng Xu, Jun Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023204 (2025)
https://doi.org/10.1116/6.0004234
Published: February 2025
View articletitled, In situ field emission study of TiN-coated ZnO nanowires
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Journal Articles

High-precision thermal characterization technique with dual-laser Raman thermometry

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Yingtao Wang, Xian Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024005 (2025)
https://doi.org/10.1116/6.0004303
Published: February 2025
View articletitled, High-precision thermal characterization technique with dual-laser Raman thermometry
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Journal Articles

Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

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Delong Chen, Qingmao Zhang, Zhuming Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024004 (2025)
https://doi.org/10.1116/6.0004025
Published: February 2025
View articletitled, Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect
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Journal Articles

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

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Akihiro Shimizu, Kazuhiro Fukada, Shinichi Endo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023203 (2025)
https://doi.org/10.1116/6.0004239
Published: February 2025
View articletitled, Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
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Journal Articles

Auto-ponderomotive beam guiding up to 9.5 keV

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F. D. F. Schmidt-Kaler, J. Walther, M. Seidling, R. Zimmermann, P. Hommelhoff
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023202 (2025)
https://doi.org/10.1116/6.0004293
Published: February 2025
View articletitled, Auto-ponderomotive beam guiding up to 9.5 keV
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Journal Articles

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

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J. Trey Diulus, Carles Corbella, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William A. Osborn, James E. Maslar, Andrei Kolmakov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 020601 (2025)
https://doi.org/10.1116/6.0004294
Published: February 2025
View articletitled, Nanocalorimetry for plasma metrology relevant to semiconductor fabrication
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Journal Articles

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

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Catherine Joy Enrile Antipuesto, Catherine Joy M. Dela Cruz, Christian Lorenz S. Mahinay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022802 (2025)
https://doi.org/10.1116/6.0004081
Published: January 2025
View articletitled, Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet
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