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Journal Articles

Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas

Yasunori Ohtsu, Tatsuo Tabaru, Julian Schulze
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044204 (2024)
https://doi.org/10.1116/5.0213602
Published: July 2024
View article titled, Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas
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Journal Articles

Improved impedance matching speed with gradient descent for advanced RF plasma system

Dongwon Shin, Sang Jeen Hong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064002 (2023)
https://doi.org/10.1116/6.0003034
Published: October 2023
View article titled, Improved impedance matching speed with gradient descent for advanced RF plasma system
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Journal Articles

Silicon etching by chlorine plasma: Validation of surface reactions mechanism

Dmitry Levko, Laxminarayan L. Raja
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042205 (2023)
https://doi.org/10.1116/6.0002608
Published: June 2023
View article titled, Silicon etching by chlorine plasma: Validation of surface reactions mechanism
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Journal Articles

Sputtering produced by vacuum electrospray droplet ions with different sizes and charges

Satoshi Ninomiya, Lee Chuin Chen, Kenzo Hiraoka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032807 (2023)
https://doi.org/10.1116/6.0002529
Published: April 2023
View article titled, Sputtering produced by vacuum electrospray droplet ions with different sizes and charges
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Includes: Supplementary data
Journal Articles

Observation of ground loop signals in GaN monolithically integrated devices

Xiao Ma, Hoi Wai Choi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012207 (2023)
https://doi.org/10.1116/6.0002245
Published: January 2023
View article titled, Observation of ground loop signals in GaN monolithically integrated devices
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Journal Articles

Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

Dmitry Levko, Rochan R. Upadhyay, Kenta Suzuki, Laxminarayan L. Raja
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012205 (2023)
https://doi.org/10.1116/6.0002236
Published: December 2022
View article titled, Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas
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Journal Articles

ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts

Editor’s Pick
Yanghui Jiang, Jingyu Li, Guangming Jiao, Wensheng Li, Yan Liu, Chuan Wang, Binhong Xia, Binhua Wan, Jun Zhang, Vasiliy Pelenovich, Sheng Liu, Bing Yang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 043002 (2022)
https://doi.org/10.1116/6.0001845
Published: June 2022
View article titled, ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts
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Journal Articles

On the brightness, transverse emittance, and transverse coherence of field emission beam

Featured
Soichiro Tsujino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 030801 (2022)
https://doi.org/10.1116/6.0001776
Published: April 2022
View article titled, On the brightness, transverse emittance, and transverse coherence of field emission beam
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Journal Articles

Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser

Editor’s Pick
Vineeth Sasidharan, Alexander Neumann, S. R. J. Brueck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062603 (2021)
https://doi.org/10.1116/6.0001377
Published: November 2021
View article titled, Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
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Journal Articles

Anomalous enhancement of focused ion beam etching by single raster propagating toward ion beam at glancing incidence

Joseph Favata, Valery Ray, Sina Shahbazmohamadi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062807 (2020)
https://doi.org/10.1116/6.0000555
Published: December 2020
View article titled, Anomalous enhancement of focused ion beam etching by single raster propagating toward ion beam at glancing incidence
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Journal Articles

Resonant sputtered neutral mass spectrometry using multiple reflections of laser to counterbalance Doppler broadening

Yue Zhao, Yuzuka Ohmori, Yuta Miyashita, Masato Morita, Tetsuo Sakamoto, Kotaro Kato, Volker Sonnenschein, Hideki Tomita, Toshihide Kawai, Takeo Okumura, Yukihiko Satou, Masabumi Miyabe, Ikuo Wakaida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 034001 (2020)
https://doi.org/10.1116/6.0000012
Published: March 2020
View article titled, Resonant sputtered neutral mass spectrometry using multiple reflections of laser to counterbalance Doppler broadening
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Journal Articles

Effective structural chirality of beetle cuticle determined from transmission Mueller matrices using the Tellegen constitutive relations

Hans Arwin, Roger Magnusson, Kenneth Järrendahl, Stefan Schoeche
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014004 (2020)
https://doi.org/10.1116/1.5131634
Published: December 2019
View article titled, Effective structural chirality of beetle cuticle determined from transmission Mueller matrices using the Tellegen constitutive relations
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Journal Articles

Ellipsometric studies for thin polymer layers of organic photovoltaic cells

Natalia Nosidlak, Janusz Jaglarz, Andrzej Danel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062402 (2019)
https://doi.org/10.1116/1.5122728
Published: November 2019
View article titled, Ellipsometric studies for thin polymer layers of organic photovoltaic cells
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Journal Articles

Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam

Sergey Gorelick, Alex de Marco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051601 (2019)
https://doi.org/10.1116/1.5114953
Published: August 2019
View article titled, Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam
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Journal Articles

Secondary ion formation on indium under nuclear and electronic sputtering conditions

Matthias Herder, Philipp Ernst, Lars Breuer, Markus Bender, Daniel Severin, Andreas Wucher
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F110 (2018)
https://doi.org/10.1116/1.5018721
Published: February 2018
View article titled, Secondary ion formation on indium under nuclear and electronic sputtering conditions
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Journal Articles

Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process

Sun-Woo Kim, Hwan-Jun Zang, June Park, Gwang-Sik Kim, Hyun-Yong Yu, Minwoo Ha, Kyungbo Ko, Sang Soo Park, Choon Hwan Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 011802 (2018)
https://doi.org/10.1116/1.4996641
Published: December 2017
View article titled, Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process
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Journal Articles

Experimental demonstration of evanescent-coupled antireflection coatings

Editor’s Pick
Levi Bourke, Richard J. Blaikie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 011601 (2018)
https://doi.org/10.1116/1.5001097
Published: December 2017
View article titled, Experimental demonstration of evanescent-coupled antireflection coatings
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Journal Articles

Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis

Yulu Chen, Lei Sun, Zhengqing John Qi, Shuo Zhao, Francis Goodwin, Itty Matthew, Vince Plachecki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G601 (2017)
https://doi.org/10.1116/1.4994908
Published: November 2017
View article titled, Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis
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Journal Articles

Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists

Hannah Narcross, Brandon L. Sharp, Laren M. Tolbert, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GE02 (2017)
https://doi.org/10.1116/1.4991894
Published: November 2017
View article titled, Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists
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Journal Articles

Facile synthesis of gold nanostars over a wide size range and their excellent surface enhanced Raman scattering and fluorescence quenching properties

Hafsa Ikhtiar Khan, Muhammad Umer Khalid, Ameer Abdullah, Awais Ali, Arshad Saleem Bhatti, Sajid Ullah Khan, Waqqar Ahmed
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03E101 (2018)
https://doi.org/10.1116/1.4996541
Published: September 2017
View article titled, Facile synthesis of gold nanostars over a wide size range and their excellent surface enhanced Raman scattering and fluorescence quenching properties
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