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Journal Articles

Sputtering produced by vacuum electrospray droplet ions with different sizes and charges

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Satoshi Ninomiya, Lee Chuin Chen, Kenzo Hiraoka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032807 (2023)
https://doi.org/10.1116/6.0002529
Published: April 2023
View articletitled, Sputtering produced by vacuum electrospray droplet ions with different sizes and charges
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Includes: Supplementary data
Journal Articles

Effective structural chirality of beetle cuticle determined from transmission Mueller matrices using the Tellegen constitutive relations

Open Access
Hans Arwin, Roger Magnusson, Kenneth Järrendahl, Stefan Schoeche
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014004 (2020)
https://doi.org/10.1116/1.5131634
Published: December 2019
View articletitled, Effective structural chirality of beetle cuticle determined from transmission Mueller matrices using the Tellegen constitutive relations
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Journal Articles

Characterization of curved surface layer by Mueller matrix ellipsometry

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Weiqi Li, Hao Jiang, Chuanwei Zhang, Xiuguo Chen, Honggang Gu, Shiyuan Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 020602 (2016)
https://doi.org/10.1116/1.4943952
Published: March 2016
View articletitled, Characterization of curved surface layer by Mueller matrix ellipsometry
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Journal Articles

Nanopore formation in TiN membranes by the focused electron beam of a transmission electron microscope

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Hyun-Mi Kim, Seong-Yong Cho, Ki-Bum Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06F502 (2015)
https://doi.org/10.1116/1.4935504
Published: November 2015
View articletitled, Nanopore formation in TiN membranes by the focused electron beam of a transmission electron microscope
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Journal Articles

Temperature dependent spin precession measurements in trilayer graphene utilizing co/graphene contacts

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Joseph Abel, Akitomo Matsubayashi, John J. Garramone, Vincent P. LaBella
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 03D115 (2012)
https://doi.org/10.1116/1.4709768
Published: May 2012
View articletitled, Temperature dependent spin precession measurements in trilayer graphene utilizing co/graphene contacts
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Journal Articles

Temperature mapping using single wavelength pyrometry during epitaxial growth

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Bernard Paquette, Badii Gsib, Richard Arès
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 060604 (2011)
https://doi.org/10.1116/1.3660395
Published: November 2011
View articletitled, Temperature mapping using single wavelength pyrometry during epitaxial growth
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Journal Articles

Fabricating millimeter to nanometer sized cavities concurrently for nanofluidic devices

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Nicole R. Devlin, Devin K. Brown
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6I7–C6I10 (2010)
https://doi.org/10.1116/1.3517701
Published: November 2010
View articletitled, Fabricating millimeter to nanometer sized cavities concurrently for nanofluidic devices
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Journal Articles

Ti/Au Ohmic contacts to indium zinc oxide thin films on paper substrates

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R. Khanna, E. A. Douglas, D. P. Norton, S. J. Pearton, F. Ren
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, L43–L46 (2010)
https://doi.org/10.1116/1.3467507
Published: August 2010
View articletitled, Ti/Au Ohmic contacts to indium zinc oxide thin films on paper substrates
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Journal Articles

Modification of a polystyrene brush layer by insertion of poly(methyl methacrylate) molecules

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Guoliang Liu, Shengxiang Ji, Karl O. Stuen, Gordon S. W. Craig, Paul F. Nealey, F. J. Himpsel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 3038–3042 (2009)
https://doi.org/10.1116/1.3253607
Published: December 2009
View articletitled, Modification of a polystyrene brush layer by insertion of poly(methyl methacrylate) molecules
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Journal Articles

Optimization of focused ion beam performance

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C. W. Hagen, P. Kruit
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2654–2659 (2009)
https://doi.org/10.1116/1.3237132
Published: December 2009
View articletitled, Optimization of focused ion beam performance
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Journal Articles

The effects of molecular weight on the exposure characteristics of poly(methylmethacrylate) developed at low temperatures

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M. Yan, S. Choi, K. R. V. Subramanian, I. Adesida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 2306–2310 (2008)
https://doi.org/10.1116/1.3002562
Published: December 2008
View articletitled, The effects of molecular weight on the exposure characteristics of poly(methylmethacrylate) developed at low temperatures
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Journal Articles

Analysis of temperature-dependent barrier heights in erbium-silicided Schottky diodes

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Myungsim Jun, Moongyu Jang, Yarkeon Kim, Cheljong Choi, Taeyoub Kim, Soonyoung Oh, Seongjae Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 137–140 (2008)
https://doi.org/10.1116/1.2825172
Published: January 2008
View articletitled, Analysis of temperature-dependent barrier heights in erbium-silicided Schottky diodes
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Journal Articles

Recent advance in protection technology for extreme ultraviolet lithography masks under low-pressure condition

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Jung Hyeun Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, L1–L6 (2008)
https://doi.org/10.1116/1.2821735
Published: January 2008
View articletitled, Recent advance in protection technology for extreme ultraviolet lithography masks under low-pressure condition
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Journal Articles

Economic approximate models for backscattered electrons

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Leili Baghaei Rad, Ian Downes, Jun Ye, David Adler, R. Fabian W. Pease
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2425–2429 (2007)
https://doi.org/10.1116/1.2794068
Published: December 2007
View articletitled, Economic approximate models for backscattered electrons
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Journal Articles

In situ monitoring and control of material growth for high resolution electron beam induced deposition

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W. F. van Dorp, C. W. Hagen, P. A. Crozier, P. Kruit
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2210–2214 (2007)
https://doi.org/10.1116/1.2804603
Published: December 2007
View articletitled, In situ monitoring and control of material growth for high resolution electron beam induced deposition
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Journal Articles

Accurate control of remaining resist depth for nanoscale three-dimensional structures in electron-beam grayscale lithography

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S.-Y. Lee, K. Anbumony
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2008–2012 (2007)
https://doi.org/10.1116/1.2781521
Published: December 2007
View articletitled, Accurate control of remaining resist depth for nanoscale three-dimensional structures in electron-beam grayscale lithography
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Journal Articles

Critical parameter determination of sonic flow controller diamond microtubes and micronozzles

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S. S. Mammana, F. T. Degasperi, M. C. Salvadori, D. C. Sparapani, M. F. Laino, R. C. Rangel, F. S. Teixeira, M. Cattani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 1804–1807 (2007)
https://doi.org/10.1116/1.2790924
Published: October 2007
View articletitled, Critical parameter determination of sonic flow controller diamond microtubes and micronozzles
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Journal Articles

Work function of low index crystal facet of tungsten evaluated by the Seppen-Katamuki analysis

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Y. Gotoh, K. Mukai, Y. Kawamura, H. Tsuji, J. Ishikawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 508–512 (2007)
https://doi.org/10.1116/1.2433950
Published: March 2007
View articletitled, Work function of low index crystal facet of tungsten evaluated by the Seppen-Katamuki analysis
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Journal Articles

Statistical variation analysis of sub- 5 - nm -sized electron-beam-induced deposits

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W. F. van Dorp, B. van Someren, C. W. Hagen, P. Kruit, P. A. Crozier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 618–622 (2006)
https://doi.org/10.1116/1.2170099
Published: February 2006
View articletitled, Statistical variation analysis of sub- 5 - nm -sized electron-beam-induced deposits
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Journal Articles

Resist reflow process simulation study for contact hole pattern

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Sang-Kon Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 200–204 (2006)
https://doi.org/10.1116/1.2155530
Published: January 2006
View articletitled, Resist reflow process simulation study for contact hole pattern
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