Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. B 40, 052803 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. B 36, 03F131 (2018)
Published: April 2018
Journal Articles
Francesco Ripamonti, Valentina Furlan, Ali G. Demir, Barbara Previtali, Michele Derai, Federico Cheli, Paolo M. Ossi
J. Vac. Sci. Technol. B 36, 01A108 (2018)
Published: January 2018
Journal Articles
Espedito Vassallo, Matteo Pedroni, Valentina Spampinato, Silvia Maria Deambrosis, Enrico Miorin, Enrica Ricci, Valentina Zin
J. Vac. Sci. Technol. B 36, 01A105 (2018)
Published: December 2017
Journal Articles
J. Vac. Sci. Technol. B 33, 031213 (2015)
Published: May 2015
Journal Articles
Zhu Diao, Joseph E. Losby, Jacob A. J. Burgess, Vincent T. K. Sauer, Wayne K. Hiebert, Mark R. Freeman
J. Vac. Sci. Technol. B 31, 051805 (2013)
Published: September 2013
Journal Articles
J. Vac. Sci. Technol. B 31, 041601 (2013)
Published: June 2013
Journal Articles
J. Vac. Sci. Technol. B 31, 042001 (2013)
Published: May 2013
Journal Articles
J. Vac. Sci. Technol. B 31, 011209 (2013)
Published: December 2012
Journal Articles
J. Vac. Sci. Technol. B 29, 06FE02 (2011)
Published: November 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 060602 (2011)
Published: November 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 06FC09 (2011)
Published: November 2011
Journal Articles
Makoto Okada, Yuichi Haruyama, Shinji Matsui, Hiroto Miyake, Shuso Iyoshi, Takao Yukawa, Hidekazu Takeuchi
J. Vac. Sci. Technol. B 29, 06FC04 (2011)
Published: October 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 011014 (2011)
Published: January 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 011020 (2011)
Published: January 2011
Journal Articles
J. Vac. Sci. Technol. B 28, 869–877 (2010)
Published: July 2010
Journal Articles
J. Vac. Sci. Technol. B 27, 1989–1992 (2009)
Published: July 2009
Journal Articles
J. Vac. Sci. Technol. B 27, 1473–1477 (2009)
Published: May 2009
Journal Articles
J. Vac. Sci. Technol. B 27, 1370–1373 (2009)
Published: May 2009
Journal Articles
J. Vac. Sci. Technol. B 27, 1351–1354 (2009)
Published: May 2009
1