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Journal Articles

Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response

Kyeong Joon Jo, Soon-Won Jung, Ji Eun Jung, Ga-Eun Lee, Seong-Cheol Kim, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 055001 (2024)
https://doi.org/10.1116/6.0003829
Published: August 2024
View article titled, Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response
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Journal Articles

Role of the oxidation conditions on the orientation of TiNxOy grown by atomic layer deposition: Impact on the optical and electrical properties

Kou Ihara, Julien Cardin, Maxime Leménager, Xavier Portier, Hind Bousbia, Christophe Labbé
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054001 (2024)
https://doi.org/10.1116/6.0003646
Published: August 2024
View article titled, Role of the oxidation conditions on the orientation of TiN<sub>x</sub>O<sub>y</sub> grown by atomic layer deposition: Impact on the optical and electrical properties
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Journal Articles

Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect

Miyako Matsui, Yohei Ishii, Lucas Kovatch, Kathryn Maier, Masaya Imai, Makoto Miura, Kenichi Kuwahara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042208 (2024)
https://doi.org/10.1116/6.0003736
Published: July 2024
View article titled, Roughness-generation mechanism of Ru etching using Cl<sub>2</sub>/O<sub>2</sub>-based plasma for advanced interconnect
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Journal Articles

Planar microcoil arrays for in vitro cellular-level micromagnetic activation of neurons

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Renata Saha, Onri J. Benally, Sadegh Faramarzi, Robert Bloom, Kai Wu, Denis Tonini, Maple Shiao, Susan A. Keirstead, Walter C. Low, Theoden I. Netoff, Jian-Ping Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033001 (2024)
https://doi.org/10.1116/6.0003362
Published: April 2024
View article titled, Planar microcoil arrays for <em>in vitro</em> cellular-level micromagnetic activation of neurons
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Includes: Supplementary data
Journal Articles

Low-temperature electrical properties and barrier inhomogeneities in ITO/β-Ga2O3 Schottky diode

Sanjoy Paul, Roberto Lopez, Adam T. Neal, Shin Mou, Jian V. Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024004 (2024)
https://doi.org/10.1116/6.0003401
Published: March 2024
View article titled, Low-temperature electrical properties and barrier inhomogeneities in ITO/β-Ga<sub>2</sub>O<sub>3</sub> Schottky diode
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Journal Articles

Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition

Atsushi Nitta, Yuuki Uwatoko, Teppei Nagata, Yukio Yoshimura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022205 (2023)
https://doi.org/10.1116/6.0002389
Published: March 2023
View article titled, Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition
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Journal Articles

Role of dose optimization in Ru atomic layer deposition for low resistivity films

Victor Wang, Michael Breeden, Nickolas Ashburn, Matthew Bergschneider, Jacob Spiegelman, Harsono Simka, Kyeongjae Cho, Andrew C. Kummel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012201 (2023)
https://doi.org/10.1116/6.0002153
Published: December 2022
View article titled, Role of dose optimization in Ru atomic layer deposition for low resistivity films
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Includes: Supplementary data
Journal Articles

Comment on “ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer” [J. Vac. Sci. Technol. B 39, 052208 (2021)]

B. L. Zhu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 056001 (2022)
https://doi.org/10.1116/6.0001934
Published: July 2022
View article titled, Comment on “ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer” [J. Vac. Sci. Technol. B 39, 052208 (2021)]
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Journal Articles

Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing

Zemzem Uyanik, Fulya Turkoglu, Hasan Koseoglu, Merve Ekmekcioglu, Bengu Ata, Yasemin Demirhan, Mehtap Ozdemir, Gulnur Aygun, Lutfi Ozyuzer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042204 (2022)
https://doi.org/10.1116/6.0001868
Published: June 2022
View article titled, Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing
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Journal Articles

Technology and measurements of three-layer NiFeCuMo/Ti/NiFeCuMo structures exhibiting the giant magnetoresistance phenomenon

Karolina Czarnacka, Jakub Kisała, Andrzej Kociubiński, Mateusz Gęca
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012806 (2022)
https://doi.org/10.1116/6.0001488
Published: January 2022
View article titled, Technology and measurements of three-layer NiFeCuMo/Ti/NiFeCuMo structures exhibiting the giant magnetoresistance phenomenon
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Journal Articles

Origin of the current saturation level of p-doped silicon field emitters

Simon Edler, Andreas Schels, Florian Herdl, Walter Hansch, Michael Bachmann, Markus Dudeck, Felix Düsberg, Andreas Pahlke, Matthias Hausladen, Philipp Buchner, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 013203 (2022)
https://doi.org/10.1116/6.0001554
Published: December 2021
View article titled, Origin of the current saturation level of p-doped silicon field emitters
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Journal Articles

ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer

Fang Fang, Junsheng Wu, CaiBo Yan, Yanwen Zhou, Zhuo Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052208 (2021)
https://doi.org/10.1116/6.0001226
Published: September 2021
View article titled, ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer
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Journal Articles

Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation

Clément Bessouet, Sylvain Lemettre, Charlotte Kutyla, Alain Bosseboeuf, Philippe Coste, Thierry Sauvage, Hélène Lecoq, Olivier Wendling, Aurélien Bellamy, Piyush Jagtap, Stéphanie Escoubas, Christophe Guichet, Olivier Thomas, Johan Moulin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 054202 (2021)
https://doi.org/10.1116/6.0001084
Published: August 2021
View article titled, Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation
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Journal Articles

Fast SARS-CoV-2 virus detection using disposable cartridge strips and a semiconductor-based biosensor platform

Minghan Xian, Hao Luo, Xinyi Xia, Chaker Fares, Patrick H. Carey, IV, Chan-Wen Chiu, Fan Ren, Siang-Sin Shan, Yu-Te Liao, Shu-Min Hsu, Josephine F. Esquivel-Upshaw, Chin-Wei Chang, Jenshan Lin, Steven C. Ghivizzani, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 033202 (2021)
https://doi.org/10.1116/6.0001060
Published: May 2021
View article titled, Fast SARS-CoV-2 virus detection using disposable cartridge strips and a semiconductor-based biosensor platform
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Journal Articles

Apparent size effects on dopant activation in nanometer-wide Si fins

Steven Folkersma, Janusz Bogdanowicz, Paola Favia, Lennaert Wouters, Dirch Hjorth Petersen, Ole Hansen, Henrik Hartmann Henrichsen, Peter Former Nielsen, Lior Shiv, Wilfried Vandervorst
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 023202 (2021)
https://doi.org/10.1116/6.0000921
Published: March 2021
View article titled, Apparent size effects on dopant activation in nanometer-wide Si fins
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Journal Articles

Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas

Editor’s Pick
Keith Hernandez, Alex Press, Matthew J. Goeckner, Lawrence J. Overzet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 024003 (2021)
https://doi.org/10.1116/6.0000679
Published: March 2021
View article titled, Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas
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Journal Articles

Silicon field emitters fabricated by dicing-saw and wet-chemical-etching

Simon Edler, Andreas Schels, Josef Biba, Walter Hansch, Michael Bachmann, Felix Düsberg, Marinus Werber, Christoph Langer, Manuel Meyer, David von Bergen, Andreas Pahlke
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 013205 (2021)
https://doi.org/10.1116/6.0000466
Published: January 2021
View article titled, Silicon field emitters fabricated by dicing-saw and wet-chemical-etching
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Journal Articles

Investigation of the electrical behavior of AlGaN/GaN high electron mobility transistors grown with underlying GaN:Mg layer

Isra Mahaboob, Steven W. Novak, Emma Rocco, Kasey Hogan, Fatemeh Shahedipour-Sandvik
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062204 (2020)
https://doi.org/10.1116/6.0000255
Published: October 2020
View article titled, Investigation of the electrical behavior of AlGaN/GaN high electron mobility transistors grown with underlying GaN:Mg layer
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Journal Articles

Au-free recessed Ohmic contacts to AlGaN/GaN high electron mobility transistor: Study of etch chemistry and metal scheme

Niranjan S, Ivor Guiney, Colin J. Humphreys, Prosenjit Sen, Rangarajan Muralidharan, Digbijoy N. Nath
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032207 (2020)
https://doi.org/10.1116/1.5144509
Published: April 2020
View article titled, Au-free recessed Ohmic contacts to AlGaN/GaN high electron mobility transistor: Study of etch chemistry and metal scheme
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Journal Articles

Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer

Chiara D. Nascimento, Everton G. Souza, Cesar Aguzzoli, Rafael L. Cruz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052202 (2019)
https://doi.org/10.1116/1.5119099
Published: August 2019
View article titled, Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer
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