Page 1 | Search Results | Journal of Vacuum Science & Technology B

1-20 of 27

Sort by

Sort Order Select

Journal Articles

Heating of C s 2 Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown

Ryo Shinohara, Soumendu Bagchi, Evgenya Simakov, Danny Perez, Sergey V. Baryshev

J. Vac. Sci. Technol. B 43, 034003 (2025)

https://doi.org/10.1116/5.0263776

Published: May 2025

View articletitled, Heating of C s 2 Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown

Journal Articles

Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

Dmitry Levko, Rochan R. Upadhyay, Kenta Suzuki, Laxminarayan L. Raja

J. Vac. Sci. Technol. B 41, 012205 (2023)

https://doi.org/10.1116/6.0002236

Published: December 2022

View articletitled, Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

Journal Articles

Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas

Keith Hernandez, Alex Press, Matthew J. Goeckner, Lawrence J. Overzet

J. Vac. Sci. Technol. B 39, 024003 (2021)

https://doi.org/10.1116/6.0000679

Published: March 2021

View articletitled, Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas

Journal Articles

Low-energy bismuth primary ion beams for molecular ion detection in TOF-SIMS

Takuya Miyayama, Shin-ichi Iida

J. Vac. Sci. Technol. B 36, 03F126 (2018)

https://doi.org/10.1116/1.5019198

Published: March 2018

View articletitled, Low-energy bismuth primary ion beams for molecular ion detection in TOF-SIMS

Journal Articles

Flexible InP based quantum dot light-emitting diodes using Ag nanowire-colorless polyimide composite electrode

Jong-Woong Kim, Jiwan Kim

J. Vac. Sci. Technol. B 35, 04E101 (2017)

https://doi.org/10.1116/1.4984804

Published: June 2017

View articletitled, Flexible InP based quantum dot light-emitting diodes using Ag nanowire-colorless polyimide composite electrode

Journal Articles

Mid-IR resonant cavity detectors

Trevor A. O'Loughlin, Gregory R. Savich, Daniel E. Sidor, Brendan T. Marozas, Terry D. Golding, Keith D. Jamison, Leif Fredin, Burt Fowler, Weerasinghe Priyantha, Gary W. Wicks

J. Vac. Sci. Technol. B 35, 02B111 (2017)

https://doi.org/10.1116/1.4977780

Published: March 2017

View articletitled, Mid-IR resonant cavity detectors

Journal Articles

Electron emission properties of Cs₃Sb photocathode emitters in a panel device

Hyo-Soo Jeong, Kris Keller, Brad Culkin

J. Vac. Sci. Technol. B 33, 031214 (2015)

https://doi.org/10.1116/1.4921183

Published: May 2015

View articletitled, Electron emission properties of Cs3Sb photocathode emitters in a panel device

Journal Articles

Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction

Mathias Rommel, Joachim D. Jambreck, Martin Lemberger, Anton J. Bauer, Lothar Frey, Katsuhisa Murakami, Christoph Richter, Philipp Weinzierl

J. Vac. Sci. Technol. B 31, 01A108 (2013)

https://doi.org/10.1116/1.4768679

Published: November 2012

View articletitled, Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction

Journal Articles

Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

Yuji Kang, Yasuki Nakai, Yuichi Haruyama, Shinji Matsui

J. Vac. Sci. Technol. B 30, 06FB06 (2012)

https://doi.org/10.1116/1.4758776

Published: October 2012

View articletitled, Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

Journal Articles

ac heating–dc detecting method for Seebeck coefficient measurement of the thermoelectric micro/nano devices

Tingting Miao, Weigang Ma, Xing Zhang

J. Vac. Sci. Technol. B 30, 051804 (2012)

https://doi.org/10.1116/1.4750497

Published: September 2012

View articletitled, ac heating–dc detecting method for Seebeck coefficient measurement of the thermoelectric micro/nano devices

Journal Articles

Noncontact lateral-force gradient measurement on Si ( 111 ) - 7 × 7 surface with small-amplitude off-resonance atomic force microscopy

Mehrdad Atabak, Özhan Ünverdi, H. Özgür Özer, Ahmet Oral

J. Vac. Sci. Technol. B 27, 1001–1005 (2009)

https://doi.org/10.1116/1.3097857

Published: April 2009

View articletitled, Noncontact lateral-force gradient measurement on Si ( 111 ) - 7 × 7 surface with small-amplitude off-resonance atomic force microscopy

Journal Articles

Optimization of the AlON buffer layer for Pr X O Y / Si stacks

K. Henkel, Y. Burkov, K. Karavaev, M. Torche, C. Schwiertz, D. Schmeißer

J. Vac. Sci. Technol. B 27, 253–257 (2009)

https://doi.org/10.1116/1.3025905

Published: February 2009

View articletitled, Optimization of the AlON buffer layer for Pr X O Y / Si stacks

Journal Articles

Novel nanoscale thermal property imaging technique: The 2 ω method. I. Principle and the 2 ω signal measurement

Hee Hwan Roh, Joon Sik Lee, Dong Lib Kim, Jisang Park, Kyeongtae Kim, Ohmyoung Kwon, Seung Ho Park, Young Ki Choi, Arun Majumdar

J. Vac. Sci. Technol. B 24, 2398–2404 (2006)

https://doi.org/10.1116/1.2353842

Published: September 2006

View articletitled, Novel nanoscale thermal property imaging technique: The 2 ω method. I. Principle and the 2 ω signal measurement

Journal Articles

Improved dc and microwave performance of heterojunction bipolar transistors by full sulfur passivation

Shiou-Ying Cheng, Ssu-I Fu, Kuei-Yi Chu, Po-Hsien Lai, Li-Yang Chen, Wen-Chau Liu, Meng-Hsueh Chiang

J. Vac. Sci. Technol. B 24, 669–674 (2006)

https://doi.org/10.1116/1.2178370

Published: March 2006

View articletitled, Improved dc and microwave performance of heterojunction bipolar transistors by full sulfur passivation

Journal Articles

On-wafer monitoring of plasma-induced electrical current in silicon dioxide to predict plasma radiation damage

Mitsuru Okigawa, Yasushi Ishikawa, Seiji Samukawa

J. Vac. Sci. Technol. B 23, 173–177 (2005)

https://doi.org/10.1116/1.1849215

Published: January 2005

View articletitled, On-wafer monitoring of plasma-induced electrical current in silicon dioxide to predict plasma radiation damage

Journal Articles

Partial blanking of an electron beam using a quadrupole lens

Feng Zhang, Henry I. Smith

J. Vac. Sci. Technol. B 23, 133–137 (2005)

https://doi.org/10.1116/1.1843827

Published: January 2005

View articletitled, Partial blanking of an electron beam using a quadrupole lens

Journal Articles

Thermal analysis of diamondlike carbon membrane masks in projection electron-beam lithography

S. Babin, V. Butomo, I. Yu. Kuzmin, H. Yamashita, M. Yamabe

J. Vac. Sci. Technol. B 22, 3082–3086 (2004)

https://doi.org/10.1116/1.1826059

Published: December 2004

View articletitled, Thermal analysis of diamondlike carbon membrane masks in projection electron-beam lithography

Journal Articles

Ultraviolet-induced damage in fluorocarbon plasma and its reduction by pulse-time-modulated plasma in charge coupled device image sensor wafer processes

Mitsuru Okigawa, Yasushi Ishikawa, Yoshinari Ichihashi, Seiji Samukawa

J. Vac. Sci. Technol. B 22, 2818–2822 (2004)

https://doi.org/10.1116/1.1827219

Published: November 2004

View articletitled, Ultraviolet-induced damage in fluorocarbon plasma and its reduction by pulse-time-modulated plasma in charge coupled device image sensor wafer processes

Journal Articles

Fabrication of nanoelectrodes based on controlled placement of carbon nanotubes using alternating-current electric field

Zhi Chen, Wenchong Hu, Jun Guo, Kozo Saito

J. Vac. Sci. Technol. B 22, 776–780 (2004)

https://doi.org/10.1116/1.1689307

Published: March 2004

View articletitled, Fabrication of nanoelectrodes based on controlled placement of carbon nanotubes using alternating-current electric field

Journal Articles

Passivation of InP surfaces of electronic devices by organothiolated self-assembled monolayers

M. Schvartzman, V. Sidorov, D. Ritter, Y. Paz

J. Vac. Sci. Technol. B 21, 148–155 (2003)

https://doi.org/10.1116/1.1532026

Published: January 2003

View articletitled, Passivation of InP surfaces of electronic devices by organothiolated self-assembled monolayers

Update search

NARROW

Format

Collections

Topics

Subjects

Journal

Article Type

Issue Section

Date

Availability

Heating of C s 2 Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown

Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas

Low-energy bismuth primary ion beams for molecular ion detection in TOF-SIMS

Flexible InP based quantum dot light-emitting diodes using Ag nanowire-colorless polyimide composite electrode

Mid-IR resonant cavity detectors

Electron emission properties of Cs₃Sb photocathode emitters in a panel device

Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction

Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

ac heating–dc detecting method for Seebeck coefficient measurement of the thermoelectric micro/nano devices

Noncontact lateral-force gradient measurement on Si ( 111 ) - 7 × 7 surface with small-amplitude off-resonance atomic force microscopy

Optimization of the AlON buffer layer for Pr X O Y / Si stacks

Novel nanoscale thermal property imaging technique: The 2 ω method. I. Principle and the 2 ω signal measurement

Improved dc and microwave performance of heterojunction bipolar transistors by full sulfur passivation

On-wafer monitoring of plasma-induced electrical current in silicon dioxide to predict plasma radiation damage

Partial blanking of an electron beam using a quadrupole lens

Thermal analysis of diamondlike carbon membrane masks in projection electron-beam lithography

Ultraviolet-induced damage in fluorocarbon plasma and its reduction by pulse-time-modulated plasma in charge coupled device image sensor wafer processes

Fabrication of nanoelectrodes based on controlled placement of carbon nanotubes using alternating-current electric field

Passivation of InP surfaces of electronic devices by organothiolated self-assembled monolayers

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

Update search

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only