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Journal Articles

Impact of annealing on the current conduction and trap properties of CeO2/La2O3 metal-insulator-metal capacitors

Isabella Rossetto, Rossella Piagge, Fabrizio Toia, Sabina Spiga, Alessio Lamperti, Silvia Vangelista, Riina Ritasalo, Päivi Järvinen, Gabriella Ghidini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021205 (2019)
https://doi.org/10.1116/1.5060712
Published: February 2019
View article titled, Impact of annealing on the current conduction and trap properties of CeO<sub>2</sub>/La<sub>2</sub>O<sub>3</sub> metal-insulator-metal capacitors
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Journal Articles

Drude and Kukharskii mobility of doped semiconductors extracted from Fourier-transform infrared ellipsometry spectra

Stefan Zollner, Pablo P. Paradis, Farzin Abadizaman, Nuwanjula S. Samarasingha
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 012904 (2019)
https://doi.org/10.1116/1.5081055
Published: January 2019
View article titled, Drude and Kukharskii mobility of doped semiconductors extracted from Fourier-transform infrared ellipsometry spectra
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Includes: Supplementary data
Journal Articles

Synchrotron radiation study of metallic titanium deposited on dielectric substrates

Justin Bogan, Venkateswaran Selvaraju, Anita Brady-Boyd, Greg Hughes, Robert O'Connor
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 040602 (2018)
https://doi.org/10.1116/1.5036943
Published: June 2018
View article titled, Synchrotron radiation study of metallic titanium deposited on dielectric substrates
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Journal Articles

Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors

Tobias Erlbacher, Holger Schwarzmann, Anton J. Bauer, Gottfried H. Döhler, Martin Schreivogel, Theresa Lutz, Francesco H. Guillén, Jürgen Graf, Richard Fix, Lothar Frey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 01A103 (2015)
https://doi.org/10.1116/1.4903054
Published: December 2014
View article titled, Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
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Journal Articles

Nickel nanoparticle size and density effects on non-volatile memory performance

Emanuele Verrelli, Giorgos Galanopoulos, Ilias Zouboulis, Dimitris Tsoukalas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 032204 (2013)
https://doi.org/10.1116/1.4804407
Published: May 2013
View article titled, Nickel nanoparticle size and density effects on non-volatile memory performance
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Journal Articles

Bound states within the notch of the HfO2/GeO2/Ge stack

Zhong Wang, Jason Ralph, Naser Sedghi, Ivona Z. Mitrovic, Steve Hall
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021209 (2013)
https://doi.org/10.1116/1.4794378
Published: March 2013
View article titled, Bound states within the notch of the HfO<sub>2</sub>/GeO<sub>2</sub>/Ge stack
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Journal Articles

Toward a streamlined projection of small device bias temperature instability lifetime distributions

María Toledano-Luque, Ben Kaczer, Tibor Grasser, Philippe J. Roussel, Jacopo Franco, Guido Groeseneken
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 01A114 (2013)
https://doi.org/10.1116/1.4772587
Published: December 2012
View article titled, Toward a streamlined projection of small device bias temperature instability lifetime distributions
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Journal Articles

Ultranarrow bandpass filter with wide nontransmission region composed of randomly distributed layer thicknesses

Guibin Chen, Haichun Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 031212 (2011)
https://doi.org/10.1116/1.3592989
Published: May 2011
View article titled, Ultranarrow bandpass filter with wide nontransmission region composed of randomly distributed layer thicknesses
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Journal Articles

Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

J. L. Everaert, E. Rosseel, A. Pap, A. Meszaros, J. Dekoster, T. Pavelka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 01AB05 (2011)
https://doi.org/10.1116/1.3521384
Published: January 2011
View article titled, Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
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Journal Articles

Fabrication and characterization of coupled metal-dielectric-metal nanoantennas

Bhuwan Joshi, Xuejin Wen, Kai Sun, Wu Lu, Qi-Huo Wei
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6O21–C6O25 (2010)
https://doi.org/10.1116/1.3501349
Published: November 2010
View article titled, Fabrication and characterization of coupled metal-dielectric-metal nanoantennas
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Journal Articles

Ex situ tunnel junction process technique characterized by Coulomb blockade thermometry

M. Prunnila, M. Meschke, D. Gunnarsson, S. Enouz-Vedrenne, J. M. Kivioja, J. P. Pekola
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 1026–1029 (2010)
https://doi.org/10.1116/1.3490406
Published: September 2010
View article titled, <em>Ex situ</em> tunnel junction process technique characterized by Coulomb blockade thermometry
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Journal Articles

Plasmonic behavior of Ag/dielectric nanowires and the effect of geometry

S. M. Prokes, D. Alexson, O. J. Glembocki, H. D. Park, R. W. Rendell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2055–2061 (2009)
https://doi.org/10.1116/1.3130150
Published: July 2009
View article titled, Plasmonic behavior of Ag/dielectric nanowires and the effect of geometry
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Journal Articles

Optimization of electrical characteristics of gadolinium ( Gd 2 O 3 ) incorporated Hf O 2 GaAs n -type metal-oxide semiconductor capacitors with silicon-interface-passivation layer

Sung Il Park, Injo Ok, Hyoung-Sub Kim, Feng Zhu, Manhong Zhang, Jung Hwan Yum, Zhao Han, Jack C. Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 624–626 (2008)
https://doi.org/10.1116/1.2890708
Published: March 2008
View article titled, Optimization of electrical characteristics of gadolinium ( Gd 2 O 3 ) incorporated Hf O 2 GaAs n -type metal-oxide semiconductor capacitors with silicon-interface-passivation layer
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Journal Articles

Double oxidation scheme for tunnel junction fabrication

T. Holmqvist, M. Meschke, J. P. Pekola
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 28–31 (2008)
https://doi.org/10.1116/1.2817629
Published: January 2008
View article titled, Double oxidation scheme for tunnel junction fabrication
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Journal Articles

45 nm node back end of the line yield evaluation on ultrahigh density interconnect structures using electron beam direct write lithography

Beatrice Icard, Laurent Pain, V. Arnal, Serdar Manakli, Jean-Christophe Le-Denmat, P. Brun, Maxime Vincent, Christophe Soonkindt, Blandine Minghetti, Tasuku Matsumiya
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 124–129 (2007)
https://doi.org/10.1116/1.2429668
Published: January 2007
View article titled, 45 nm node back end of the line yield evaluation on ultrahigh density interconnect structures using electron beam direct write lithography
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Journal Articles

Analysis of the energy distribution of field electrons from metals and semiconductors

M. S. Chung, T. S. Choi, H. K. Bae, J. K. Kim, B.-G. Yoon, S. C. Hong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 913–917 (2006)
https://doi.org/10.1116/1.2183778
Published: March 2006
View article titled, Analysis of the energy distribution of field electrons from metals and semiconductors
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Journal Articles

Generation mechanism of residual clamping force in a bipolar electrostatic chuck

S. Kanno, T. Usui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 2371–2377 (2003)
https://doi.org/10.1116/1.1620517
Published: November 2003
View article titled, Generation mechanism of residual clamping force in a bipolar electrostatic chuck
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Journal Articles

Applications of micropinch x-ray source

O. G. Semyonov, A. E. Gurey, A. P. Kanavin, A. A. Tikhomirov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 19, 1235–1240 (2001)
https://doi.org/10.1116/1.1378012
Published: July 2001
View article titled, Applications of micropinch x-ray source
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Journal Articles

Comparison of three different methods for coupling of microwave and terahertz signals generated by resonant laser-assisted field emission

Kevin Alonso, Mark J. Hagmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 19, 68–71 (2001)
https://doi.org/10.1116/1.1340016
Published: January 2001
View article titled, Comparison of three different methods for coupling of microwave and terahertz signals generated by resonant laser-assisted field emission
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Journal Articles

Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies

D. Vincenzi, M. A. Butturi, V. Guidi, M. C. Carotta, G. Martinelli, V. Guarnieri, S. Brida, B. Margesin, F. Giacomozzi, M. Zen, D. Giusti, G. Soncini, A. A. Vasiliev, A. V. Pisliakov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 18, 2441–2445 (2000)
https://doi.org/10.1116/1.1289546
Published: September 2000
View article titled, Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies
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