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Journal Articles

Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation

Zhihua Shen, Qing Cai, Qiaoning Li, Bin Ge, Xiao Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022805 (2025)
https://doi.org/10.1116/6.0004317
Published: February 2025
View article titled, Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation
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Journal Articles

Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

Delong Chen, Qingmao Zhang, Zhuming Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024004 (2025)
https://doi.org/10.1116/6.0004025
Published: February 2025
View article titled, Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect
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Journal Articles

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Hiroshi Kou, Takahiro Arai, Hideaki Fukuda, Yoann Tomczak, Yiting Sun, Daniele Piumi, David De Roest
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012203 (2025)
https://doi.org/10.1116/6.0004116
Published: January 2025
View article titled, Line wiggling due to plasma-induced film stress and prevention by surface roughness modification
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Journal Articles

Simulation investigation on the pulse/analog dual-mode electron multiplier with discrete arc-shaped dynodes

Li Liu, Jie Li, Biye Liu, Teng Wang, Hulin Liu, Xintuan Yun, Shengli Wu, Wenbo Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012201 (2025)
https://doi.org/10.1116/6.0004105
Published: January 2025
View article titled, Simulation investigation on the pulse/analog dual-mode electron multiplier with discrete arc-shaped dynodes
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Journal Articles

Control mechanism of the back insulated-gate in vacuum nano-electronics

Qingyu Bian, Ping Chen, Feng Liang, Rui Zhang, Degang Zhao, Chunlai Xue
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063211 (2024)
https://doi.org/10.1116/6.0004160
Published: December 2024
View article titled, Control mechanism of the back insulated-gate in vacuum nano-electronics
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Journal Articles

Overcoming challenges in single electron charge detection of nanoscale dipoles

Mohammad Istiaque Rahaman, R. A. McManus, D. J. Noronha, G. P. Szakmany, A. O. Orlov, G. L. Snider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063208 (2024)
https://doi.org/10.1116/6.0004052
Published: December 2024
View article titled, Overcoming challenges in single electron charge detection of nanoscale dipoles
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Journal Articles

Effects of lithographic and pattern parameters on stability of feature-edge location in electron beam lithography

Soo-Young Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062604 (2024)
https://doi.org/10.1116/6.0004017
Published: November 2024
View article titled, Effects of lithographic and pattern parameters on stability of feature-edge location in electron beam lithography
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Journal Articles

Design, modeling, and fabrication of high frequency Oersted lines for electron spin manipulation in silicon based quantum devices

Editor’s Pick
Mark-Yves Gaunin, Pradeep Namboodiri, Alessandro Restelli, Ranjit Kashid, Xiqiao Wang, Fan Fei, Brian Courts, Utsav, Vijith Kamalon Pulikodan, Jonathan Wyrick, Richard Silver
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062802 (2024)
https://doi.org/10.1116/6.0004051
Published: October 2024
View article titled, Design, modeling, and fabrication of high frequency Oersted lines for electron spin manipulation in silicon based quantum devices
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Journal Articles

Rubbing-induced site-selective deposition of 2D material patterns on nanomembranes

Mingze Chen, Xiaoqiu An, Seungjun Ki, Xiaogan Liang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062801 (2024)
https://doi.org/10.1116/6.0003961
Published: October 2024
View article titled, Rubbing-induced site-selective deposition of 2D material patterns on nanomembranes
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Journal Articles

Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response

Kyeong Joon Jo, Soon-Won Jung, Ji Eun Jung, Ga-Eun Lee, Seong-Cheol Kim, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 055001 (2024)
https://doi.org/10.1116/6.0003829
Published: August 2024
View article titled, Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response
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Journal Articles

Infrared radiation absorption in a wide wavelength range of 3–14 μm mainly based on spatial magnetic plasmon excitation and accumulation in an arrayed nanocavity-shaped metasurface

Zecheng Gao, Wuyang Ji, Taige Liu, Xinyu Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042211 (2024)
https://doi.org/10.1116/6.0003674
Published: July 2024
View article titled, Infrared radiation absorption in a wide wavelength range of 3–14 <em>μ</em>m mainly based on spatial magnetic plasmon excitation and accumulation in an arrayed nanocavity-shaped metasurface
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Journal Articles

Carbonized polyvinylidene difluoride films irradiated by variable-energy Ar+: Tunable morphology and resistive sensing

Islam F. Nuriahmetov, Ilya A. Zavidovskiy, Abdusame A. Khaidarov, Natalya F. Savchenko, Andrey A. Tatarintsev, Viacheslav V. Dremov, Oleg A. Streletskiy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043401 (2024)
https://doi.org/10.1116/6.0003657
Published: June 2024
View article titled, Carbonized polyvinylidene difluoride films irradiated by variable-energy Ar<sup>+</sup>: Tunable morphology and resistive sensing
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Journal Articles

Novel surface wave technique for moderate-pressure plasma measurements

Featured
Shadhin Hussain, Matthew Goeckner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034005 (2024)
https://doi.org/10.1116/6.0003331
Published: April 2024
View article titled, Novel surface wave technique for moderate-pressure plasma measurements
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Journal Articles

Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials

Editor’s Pick
Michael J. Johnson, Gabriel H. Brown, David R. Boris, Tzvetelina B. Petrova, Scott G. Walton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034004 (2024)
https://doi.org/10.1116/6.0003485
Published: April 2024
View article titled, Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials
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Journal Articles

Field emission characterization of field-aligned carbon nanotubes synthesized in an environmental transmission electron microscope

Pascal Vincent, Federico Panciera, Ileana Florea, Anthony Ayari, Sorin Perisanu, Costel Sorin Cojocaru, Haifa Taoum, Chen Wei, Khakimjon Saidov, Utkur Mirsaidov, Ilias Aguili, Nicholas Blanchard, Pierre Legagneux, Stephen Thomas Purcell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022802 (2024)
https://doi.org/10.1116/6.0003413
Published: March 2024
View article titled, Field emission characterization of field-aligned carbon nanotubes synthesized in an environmental transmission electron microscope
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Includes: Supplementary data
Journal Articles

Thermal analysis of implanter source head in radio-frequency inductively coupled plasma

Chang-Won Jeong, Choong-Mo Ryu, Hee-Lak Lee, Jong Jin Hwang, Seung Jae Moon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024001 (2024)
https://doi.org/10.1116/6.0003060
Published: January 2024
View article titled, Thermal analysis of implanter source head in radio-frequency inductively coupled plasma
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Includes: Supplementary data
Journal Articles

Rapid prototyping of etch test structures for hard mask development using electron beam lithography

Barbara A. Kazanowska, Aaron M. Dangerfield, Han Wang, Gene Lee, Luisa D. Bozano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012601 (2024)
https://doi.org/10.1116/6.0003215
Published: January 2024
View article titled, Rapid prototyping of etch test structures for hard mask development using electron beam lithography
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Journal Articles

3D structure of box-and-grid electron multiplier with higher electron collection efficiency

Editor’s Pick
Zhangcong Xia, Yunrong Wang, Youwei Peng, Jie Li, Wenbo Hu, Xin Zhong, Shengli Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064205 (2023)
https://doi.org/10.1116/6.0003162
Published: December 2023
View article titled, 3D structure of box-and-grid electron multiplier with higher electron collection efficiency
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Journal Articles

Modification of discharge sequences to control the random dispersion of flake particles during wafer etching

Ching Ming Ku, Wen Yea Jang, Stone Cheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064203 (2023)
https://doi.org/10.1116/6.0002974
Published: November 2023
View article titled, Modification of discharge sequences to control the random dispersion of flake particles during wafer etching
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Journal Articles

High-efficiency metalenses for zone-plate-array lithography

Henry I. Smith, Mark Mondol, Feng Zhang, Timothy Savas, Michael Walsh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062601 (2023)
https://doi.org/10.1116/6.0003024
Published: September 2023
View article titled, High-efficiency metalenses for zone-plate-array lithography
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