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Journal Articles

Electron emission from HfC(100) single-crystal tip

Toshiaki Kusunoki, Noriaki Arai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043204 (2024)
https://doi.org/10.1116/6.0003632
Published: July 2024
View article titled, Electron emission from HfC(100) single-crystal tip
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Journal Articles

Low power silicon evaporation source—Construction, performances, and applications

S. Kovalchuk, M. Nowicki, I. Morawski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024003 (2024)
https://doi.org/10.1116/6.0003284
Published: March 2024
View article titled, Low power silicon evaporation source—Construction, performances, and applications
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Journal Articles

Evaluating LaB6 (310) nanotip as an ultrafast electron emitter

Onkar Bhorade, Bernard Deconihout, Ivan Blum, Jonathan Houard, Angela Vella
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062809 (2023)
https://doi.org/10.1116/6.0003089
Published: November 2023
View article titled, Evaluating LaB<sub>6</sub> (310) nanotip as an ultrafast electron emitter
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Includes: Supplementary data
Journal Articles

A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution

Kazuhiro Honda, Hiroyuki Ito, Souichi Katagiri, Takashi Doi, Masahiro Sasaki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044006 (2023)
https://doi.org/10.1116/6.0002597
Published: June 2023
View article titled, A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution
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Includes: Supplementary data
Journal Articles

Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°

Hai-Dang Nguyen, Jan-Philipp Wulfkühler, Martin Tajmar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034203 (2023)
https://doi.org/10.1116/6.0002281
Published: May 2023
View article titled, Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°
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Journal Articles

Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests

Editor’s Pick
J. van Veldhoven, C.-C. Wu, A. J. Storm, M. van Putten, J. R. Meijlink, A. G. Ushakov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012603 (2023)
https://doi.org/10.1116/6.0002132
Published: January 2023
View article titled, Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests
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Journal Articles

Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator wafer

Reza Gholamzadeh, Milad Gharooni, Hassan Salarieh, Javad Akbari
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 043001 (2022)
https://doi.org/10.1116/6.0001779
Published: May 2022
View article titled, Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator wafer
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Journal Articles

Multiplexing implementation of rubbing-induced site-selective growth of MoS2 feature arrays

Mingze Chen, Seung Ki, Xiaogan Liang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062203 (2021)
https://doi.org/10.1116/6.0001268
Published: October 2021
View article titled, Multiplexing implementation of rubbing-induced site-selective growth of MoS<sub>2</sub> feature arrays
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Journal Articles

Correlation between electromigration-related void volumes and time-to-failure, the high-resolution x-ray tomography’s vital support

Stéphane Moreau, Alexandra Fraczkiewicz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044004 (2020)
https://doi.org/10.1116/6.0000252
Published: June 2020
View article titled, Correlation between electromigration-related void volumes and time-to-failure, the high-resolution x-ray tomography’s vital support
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Journal Articles

Absolute pressure and gas species identification with an optically levitated rotor

Scilight
Charles P. Blakemore, Denzal Martin, Alexander Fieguth, Akio Kawasaki, Nadav Priel, Alexander D. Rider, Giorgio Gratta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024201 (2020)
https://doi.org/10.1116/1.5139638
Published: January 2020
View article titled, Absolute pressure and gas species identification with an optically levitated rotor
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Journal Articles

Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces

Chia-Wei Chen, Matthias Hartrumpf, Thomas Längle, Jürgen Beyerer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014005 (2020)
https://doi.org/10.1116/1.5121854
Published: December 2019
View article titled, Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces
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Journal Articles

Evaluation of electron optics with an offset cylindrical lens: Application to a monochromator or energy analyzer

Takashi Ogawa, Yoshizo Takai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 032902 (2018)
https://doi.org/10.1116/1.5025775
Published: May 2018
View article titled, Evaluation of electron optics with an offset cylindrical lens: Application to a monochromator or energy analyzer
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Includes: Supplementary data
Journal Articles

Preliminary study of a fast massive gas injection system for plasma disruption mitigation

Gerardo D'Elia, Antonio Frattolillo, Massimiliano Bucci, Filippo Gravanti
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 01A103 (2018)
https://doi.org/10.1116/1.4996069
Published: October 2017
View article titled, Preliminary study of a fast massive gas injection system for plasma disruption mitigation
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Journal Articles

CSAR 62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4 K and room temperature

Arsenty Kaganskiy, Tobias Heuser, Ronny Schmidt, Sven Rodt, Stephan Reitzenstein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 061603 (2016)
https://doi.org/10.1116/1.4965883
Published: October 2016
View article titled, CSAR 62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4 K and room temperature
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Journal Articles

Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication

Hangyu Liu, Johannes Herrnsdorf, Erdan Gu, Martin D. Dawson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 021602 (2016)
https://doi.org/10.1116/1.4943558
Published: March 2016
View article titled, Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication
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Journal Articles

Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses

Takashi Ogawa, Boklae Cho, Sang Jung Ahn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FJ01 (2015)
https://doi.org/10.1116/1.4931933
Published: October 2015
View article titled, Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses
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Journal Articles

Deep level transient spectroscopy in III-Nitrides: Decreasing the effects of series resistance

Alexander Y. Polyakov, Nikolai B. Smirnov, In-Hwan Lee, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 061203 (2015)
https://doi.org/10.1116/1.4932013
Published: September 2015
View article titled, Deep level transient spectroscopy in III-Nitrides: Decreasing the effects of series resistance
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Journal Articles

Comment on “Mechanical properties of suspended graphene sheets” [J. Vac. Sci. Technol., B 25 , 2558 (2007)]

Lawrence N. Virgin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 023001 (2015)
https://doi.org/10.1116/1.4914967
Published: March 2015
View article titled, Comment on “Mechanical properties of suspended graphene sheets” [J. Vac. Sci. Technol., B 25 , 2558 (2007)]
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Journal Articles

Channel-hot-carrier degradation of strained MOSFETs: A device level and nanoscale combined approach

Qian Wu, Marc Porti, Albin Bayerl, Javier Martin-Martínez, Rosana Rodriguez, Montserrat Nafria, Xavier Aymerich, Eddy Simoen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 022202 (2015)
https://doi.org/10.1116/1.4913950
Published: March 2015
View article titled, Channel-hot-carrier degradation of strained MOSFETs: A device level and nanoscale combined approach
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Journal Articles

Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer

Mandek Richardson, Surya Cheemalapati, Richard Everly, Subramanian K. R. S. Sankaranarayanan, Anna Pyayt, Venkat R. Bhethanabotla
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 022001 (2015)
https://doi.org/10.1116/1.4906515
Published: January 2015
View article titled, Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer
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