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Journal Articles

Evolution of water layers on wafer surfaces during bond chamber evacuation

Open Access
Max Huber, Andreas Zienert, Jörg Schuster
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 043001 (2025)
https://doi.org/10.1116/6.0004331
Published: June 2025
View articletitled, Evolution of water layers on wafer surfaces during bond chamber evacuation
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Journal Articles

Effect of Ag layer thickness and annealing treatment on the transmittance and conductivity of transparent antennas fabricated using ITO/Ag/ITO structures

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Yoji Yasuda, Yuka Saitou, Fukuro Koshiji, Takayuki Uchida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 042204 (2025)
https://doi.org/10.1116/6.0004573
Published: June 2025
View articletitled, Effect of Ag layer thickness and annealing treatment on the transmittance and conductivity of transparent antennas fabricated using ITO/Ag/ITO structures
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Journal Articles

Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy

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Jitae Park, Sejin Oh, Sung-Ho Jang, Dougyong Sung, Jin-Young Bang, Sung-Il Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 044202 (2025)
https://doi.org/10.1116/6.0004477
Published: June 2025
View articletitled, Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy
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Journal Articles

Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system

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Jaewon Hwang, Chihoon Lee, Kyu Lee, Younghun Kwon, Wonjo Woo, Seho Kim, Keunhyuk Yang, Youngwoon Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034001 (2025)
https://doi.org/10.1116/6.0004425
Published: April 2025
View articletitled, Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system
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Journal Articles

Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system

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Shunming Liu, Yigang Wang, Pengcheng Wang, Hong Song, Yuhui Guan, Jiaming Liu, Biao Tan, Xiaoyang Sun, Bangle Zhu, Ahong Li, Weidong Chen, Huafu Ouyang, Bo Li, Xiaolei Wu, Yongjia Lv
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034201 (2025)
https://doi.org/10.1116/6.0004393
Published: March 2025
View articletitled, Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system
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Journal Articles

Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation

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Zhihua Shen, Qing Cai, Qiaoning Li, Bin Ge, Xiao Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022805 (2025)
https://doi.org/10.1116/6.0004317
Published: February 2025
View articletitled, Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation
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Journal Articles

High-precision thermal characterization technique with dual-laser Raman thermometry

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Yingtao Wang, Xian Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024005 (2025)
https://doi.org/10.1116/6.0004303
Published: February 2025
View articletitled, High-precision thermal characterization technique with dual-laser Raman thermometry
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Journal Articles

Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

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Delong Chen, Qingmao Zhang, Zhuming Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024004 (2025)
https://doi.org/10.1116/6.0004025
Published: February 2025
View articletitled, Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect
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Journal Articles

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

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J. Trey Diulus, Carles Corbella, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William A. Osborn, James E. Maslar, Andrei Kolmakov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 020601 (2025)
https://doi.org/10.1116/6.0004294
Published: February 2025
View articletitled, Nanocalorimetry for plasma metrology relevant to semiconductor fabrication
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Journal Articles

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

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Catherine Joy Enrile Antipuesto, Catherine Joy M. Dela Cruz, Christian Lorenz S. Mahinay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022802 (2025)
https://doi.org/10.1116/6.0004081
Published: January 2025
View articletitled, Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet
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Journal Articles

Selective metal-carbides hardmask strip with chlorine and oxygen plasma

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Wan Soo Song, Paul Yang, Karam Ahn, Chiyoung Lee, Yun Young Lee, Jin Cheol Son, Sang Jeen Hong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022201 (2025)
https://doi.org/10.1116/6.0003984
Published: January 2025
View articletitled, Selective metal-carbides hardmask strip with chlorine and oxygen plasma
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Journal Articles

Cost-effective fabrication of RF AlGaN/GaN HEMTs on surface activated bonding-bonded SiC-SiC substrate

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Guanjun Jing, Xiangjie Xing, Dongguo Zhang, Fengwen Mu, Sen Huang, Ke Wei, Qimeng Jiang, Xinhua Wang, Xinyu Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012205 (2025)
https://doi.org/10.1116/6.0004066
Published: January 2025
View articletitled, Cost-effective fabrication of RF AlGaN/GaN HEMTs on surface activated bonding-bonded SiC-SiC substrate
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Journal Articles

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

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Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Hiroshi Kou, Takahiro Arai, Hideaki Fukuda, Yoann Tomczak, Yiting Sun, Daniele Piumi, David De Roest
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012203 (2025)
https://doi.org/10.1116/6.0004116
Published: January 2025
View articletitled, Line wiggling due to plasma-induced film stress and prevention by surface roughness modification
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Journal Articles

Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

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Jibesh K. Saha, Saif A. A. Taqy, Pallab K. Sarkar, Imteaz Rahaman, Augustus W. Arbogast, Tuhin Dey, Andrei Dolocan, Md. Reaz Rahman Munna, Khorshed Alam, Daniel Wasserman, Seth R. Bank, Mark A. Wistey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062211 (2024)
https://doi.org/10.1116/6.0003739
Published: December 2024
View articletitled, Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys
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Journal Articles

Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH4 detection

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Xueting Du, Kai Niu, Wei Mi, Di Wang, Yan Zhu, Lin’an He, Liwei Zhou, Juan Wang, Xingcheng Zhang, Jinshi Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062207 (2024)
https://doi.org/10.1116/6.0004069
Published: November 2024
View articletitled, Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH4 detection
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Journal Articles

Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon

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Taeseung Jung, Seungyeob Kim, Sangho Lee, Jinho Ahn, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063202 (2024)
https://doi.org/10.1116/6.0003901
Published: October 2024
View articletitled, Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon
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Journal Articles

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

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C. R. Fasano, F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, J. A. B. Termini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064001 (2024)
https://doi.org/10.1116/6.0003958
Published: October 2024
View articletitled, Constant period line gratings as a metric for patterning fidelity in electron beam lithography
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Journal Articles

Numerical analysis of Gaussian potential patches model depending on the substrate doping in inhomogeneous Schottky barrier diodes over a wide temperature range

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Abdulmecit Turut
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062201 (2024)
https://doi.org/10.1116/6.0003898
Published: October 2024
View articletitled, Numerical analysis of Gaussian potential patches model depending on the substrate doping in inhomogeneous Schottky barrier diodes over a wide temperature range
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Journal Articles

Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration

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S. Kizawa, D. Bizen, K. Suzuki, S. Mizutani, R. Watanabe, Y. Kasai, Y. Mizuhara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054003 (2024)
https://doi.org/10.1116/6.0003891
Published: August 2024
View articletitled, Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration
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Journal Articles

Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response

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Kyeong Joon Jo, Soon-Won Jung, Ji Eun Jung, Ga-Eun Lee, Seong-Cheol Kim, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 055001 (2024)
https://doi.org/10.1116/6.0003829
Published: August 2024
View articletitled, Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response
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