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Journal Articles

Scalable fabrication approach and fill factor optimization for single pixel microlens arrays

Featured
Jens Bonitz, Christian Helke, Nils Dittmar, Sebastian Schermer, Micha Haase, Lutz Hofmann, Danny Reuter
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062203 (2024)
https://doi.org/10.1116/6.0004036
Published: October 2024
View article titled, Scalable fabrication approach and fill factor optimization for single pixel microlens arrays
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Journal Articles

Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator wafer

Reza Gholamzadeh, Milad Gharooni, Hassan Salarieh, Javad Akbari
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 043001 (2022)
https://doi.org/10.1116/6.0001779
Published: May 2022
View article titled, Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator wafer
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Journal Articles

Fabrication of high-contrast gratings for a parallel spectrum splitting dispersive element in a concentrated photovoltaic system

Yuhan Yao, He Liu, Wei Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FG04 (2014)
https://doi.org/10.1116/1.4898198
Published: October 2014
View article titled, Fabrication of high-contrast gratings for a parallel spectrum splitting dispersive element in a concentrated photovoltaic system
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Journal Articles

Anisotropic high aspect ratio etch for perfluorcyclobutyl polymers with stress relief technique

Nazli Rahmanian, Seunghyun Kim, Gregory P. Nordin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 2672–2677 (2006)
https://doi.org/10.1116/1.2382945
Published: November 2006
View article titled, Anisotropic high aspect ratio etch for perfluorcyclobutyl polymers with stress relief technique
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Journal Articles

Influence of AlN buffer on electronic properties and dislocation microstructure of AlGaN/GaN grown by molecular beam epitaxy on SiC

B. S. Simpkins, E. T. Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 1818–1821 (2003)
https://doi.org/10.1116/1.1588647
Published: August 2003
View article titled, Influence of AlN buffer on electronic properties and dislocation microstructure of AlGaN/GaN grown by molecular beam epitaxy on SiC
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Journal Articles

High‐performance multilevel blazed x‐ray microscopy Fresnel zone plates: Fabricated using x‐ray lithography

E. Di Fabrizio, M. Gentili, L. Grella, M. Baciocchi, A. Krasnoperova, F. Cerrina, W. Yun, B. Lai, E. Gluskin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 12, 3979–3985 (1994)
https://doi.org/10.1116/1.587414
Published: November 1994
View article titled, High‐performance multilevel blazed x‐ray microscopy Fresnel zone plates: Fabricated using x‐ray lithography
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Journal Articles

Fabricating binary optics: Process variables critical to optical efficiency

M. B. Stern, M. Holz, S. S. Medeiros, R. E. Knowlden
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 9, 3117–3121 (1991)
https://doi.org/10.1116/1.585323
Published: November 1991
View article titled, Fabricating binary optics: Process variables critical to optical efficiency
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