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Journal Articles

Evolution of water layers on wafer surfaces during bond chamber evacuation

Open Access
Max Huber, Andreas Zienert, Jörg Schuster
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 043001 (2025)
https://doi.org/10.1116/6.0004331
Published: June 2025
View article titled, Evolution of water layers on wafer surfaces during bond chamber evacuation
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Journal Articles

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

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Catherine Joy Enrile Antipuesto, Catherine Joy M. Dela Cruz, Christian Lorenz S. Mahinay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022802 (2025)
https://doi.org/10.1116/6.0004081
Published: January 2025
View article titled, Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet
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Journal Articles

Cost-effective fabrication of RF AlGaN/GaN HEMTs on surface activated bonding-bonded SiC-SiC substrate

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Guanjun Jing, Xiangjie Xing, Dongguo Zhang, Fengwen Mu, Sen Huang, Ke Wei, Qimeng Jiang, Xinhua Wang, Xinyu Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012205 (2025)
https://doi.org/10.1116/6.0004066
Published: January 2025
View article titled, Cost-effective fabrication of RF AlGaN/GaN HEMTs on surface activated bonding-bonded SiC-SiC substrate
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Journal Articles

AlGe wafer bonding in ultra-high vacuum environment

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Thomas Stöttinger, Bernhard Rebhan, Kurt Hingerl
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042802 (2023)
https://doi.org/10.1116/6.0002539
Published: June 2023
View article titled, AlGe wafer bonding in ultra-high vacuum environment
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Journal Articles

Stress reduction and wafer bow accommodation for the fabrication of thin film lithium niobate on oxidized silicon

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Karan Prabhakar, Ryan J. Patton, Ronald M. Reano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062208 (2021)
https://doi.org/10.1116/6.0001283
Published: November 2021
View article titled, Stress reduction and wafer bow accommodation for the fabrication of thin film lithium niobate on oxidized silicon
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Journal Articles

Study of pit formation in MBE grown GaP on misoriented Si

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Srinath Murali, Chaomin Zhang, Michael Goryll, Richard R. King, Christiana B. Honsberg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032201 (2020)
https://doi.org/10.1116/6.0000064
Published: March 2020
View article titled, Study of pit formation in MBE grown GaP on misoriented Si
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Journal Articles

Fabrication of grating coupled GaAs/AlGaAs quantum well infrared photodetector on an Si substrate

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HoSung Kim, Seung-Yeop Ahn, Zbigniew Wasilewski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031209 (2019)
https://doi.org/10.1116/1.5088967
Published: April 2019
View article titled, Fabrication of grating coupled GaAs/AlGaAs quantum well infrared photodetector on an Si substrate
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Journal Articles

Enhanced cracking in Si/B-doped Si0.70Ge0.30/Si heterostructures via hydrogen trapping effect

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Xing Wei, Zhongying Xue, Yongwei Chang, Jiurong Li, Gang Wang, Da Chen, Qinglei Guo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 061202 (2018)
https://doi.org/10.1116/1.5044215
Published: October 2018
View article titled, Enhanced cracking in Si/B-doped Si0.70Ge0.30/Si heterostructures via hydrogen trapping effect
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Journal Articles

Low temperature bonding of heterogeneous materials using Al2O3 as an intermediate layer

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Hitesh Kumar Sahoo, Luisa Ottaviano, Yi Zheng, Ole Hansen, Kresten Yvind
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 011202 (2018)
https://doi.org/10.1116/1.5005591
Published: December 2017
View article titled, Low temperature bonding of heterogeneous materials using Al2O3 as an intermediate layer
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Journal Articles

Initiation strategies for simultaneous control of antiphase domains and stacking faults in GaAs solar cells on Ge

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Joseph Faucher, Taizo Masuda, Minjoo Larry Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041203 (2016)
https://doi.org/10.1116/1.4945659
Published: April 2016
View article titled, Initiation strategies for simultaneous control of antiphase domains and stacking faults in GaAs solar cells on Ge
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Journal Articles

Enhanced wall-plug efficiency in monolithically integrated vertical light-emitting-diode cells based on III-nitride heterostructures

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Hyung Jo Park, Hyo Jung Bae, Jun Beom Park, Jun Seok Ha, Tak Jeong, Jong Hyeob Baek, Seung Hwan Kim, Jae-Hyun Ryou
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 021206 (2016)
https://doi.org/10.1116/1.4943941
Published: March 2016
View article titled, Enhanced wall-plug efficiency in monolithically integrated vertical light-emitting-diode cells based on III-nitride heterostructures
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Journal Articles

High quality extremely thin SOI fabricated by facilitated ion-cut with H-trapping effect

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Yongwei Chang, Zhongying Xue, Da Chen, Shi Cheng, Miao Zhang, Zengfeng Di, Xing Wei, Xi Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 020601 (2016)
https://doi.org/10.1116/1.4943562
Published: March 2016
View article titled, High quality extremely thin SOI fabricated by facilitated ion-cut with H-trapping effect
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Journal Articles

Influence of the hydrogen implantation power density on ion cutting of Ge

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Yujiao Ruan, Wang Lin, Songyan Chen, Cheng Li, Hongkai Lai, Wei Huang, Jun Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 051202 (2013)
https://doi.org/10.1116/1.4817756
Published: August 2013
View article titled, Influence of the hydrogen implantation power density on ion cutting of Ge
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Journal Articles

Low-temperature Al–Ge bonding for 3D integration

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Filip Crnogorac, Fabian R. W. Pease, Ryan P. Birringer, Reinhold H. Dauskardt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FK01 (2012)
https://doi.org/10.1116/1.4762844
Published: October 2012
View article titled, Low-temperature Al–Ge bonding for 3D integration
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Journal Articles

Inductively coupled plasma deep etching of InP/InGaAsP in Cl2/CH4/H2 based chemistries with the electrode at 20 °C

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Andreas Wieczorek, Vladimir Djara, Frank H. Peters, James O’Callaghan, Kevin Thomas, Brian Corbett
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 051208 (2012)
https://doi.org/10.1116/1.4748807
Published: August 2012
View article titled, Inductively coupled plasma deep etching of InP/InGaAsP in Cl2/CH4/H2 based chemistries with the electrode at 20 °C
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Journal Articles

Smart-cut layer transfer of single-crystal SiC using spin-on-glass

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Jae-Hyung Lee, Igor Bargatin, Joonsuk Park, Kaveh M. Milaninia, Luke S. Theogarajan, Robert Sinclair, Roger T. Howe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 042001 (2012)
https://doi.org/10.1116/1.4734006
Published: July 2012
View article titled, Smart-cut layer transfer of single-crystal SiC using spin-on-glass
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Journal Articles

Monolithic integration of silicon CMOS and GaN transistors in a current mirror circuit

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W. E. Hoke, R. V. Chelakara, J. P. Bettencourt, T. E. Kazior, J. R. LaRoche, T. D. Kennedy, J. J. Mosca, A. Torabi, A. J. Kerr, H.-S. Lee, T. Palacios
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 02B101 (2012)
https://doi.org/10.1116/1.3665220
Published: December 2011
View article titled, Monolithic integration of silicon CMOS and GaN transistors in a current mirror circuit
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Journal Articles

Surface plasmon waveguide devices with Tg-bonded Cytop claddings

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Charles Chiu, Ewa Lisicka-Skrzek, R. Niall Tait, Pierre Berini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 062601 (2011)
https://doi.org/10.1116/1.3660801
Published: November 2011
View article titled, Surface plasmon waveguide devices with Tg-bonded Cytop claddings
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Journal Articles

Growth and thermal conductivity analysis of polycrystalline GaAs on chemical vapor deposition diamond for use in thermal management of high-power semiconductor lasers

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S. P. R. Clark, P. Ahirwar, F. T. Jaeckel, C. P. Hains, A. R. Albrecht, T. J. Rotter, L. R. Dawson, G. Balakrishnan, P. E. Hopkins, L. M. Phinney, J. Hader, J. V. Moloney
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 03C130 (2011)
https://doi.org/10.1116/1.3565054
Published: April 2011
View article titled, Growth and thermal conductivity analysis of polycrystalline GaAs on chemical vapor deposition diamond for use in thermal management of high-power semiconductor lasers
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Journal Articles

Controlled sacrificial sidewall surface micromachining for the release of high length-to-thickness aspect ratio bridges

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Christopher R. Raum, R. Niall Tait, Robert Gauthier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 1195–1201 (2010)
https://doi.org/10.1116/1.3503612
Published: October 2010
View article titled, Controlled sacrificial sidewall surface micromachining for the release of high length-to-thickness aspect ratio bridges
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