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Journal Articles

Study on the third harmonic diagnosis and etching distribution analysis according to the phase change between the upper and lower RF electrodes in a 60 MHz capacitively coupled plasma triode reactor based high aspect ratio contact dry etching process

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Sejin Oh, Hyunju Lee, Chang-Soon Lim, Jong-Hun Pi, Kyung-Gon You, Sung-Ho Jang, Sang-Hoon Jung, Haewook Park, Jun-Ho Im, Younseon Wang, Dougyong Sung
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 030603 (2025)
https://doi.org/10.1116/6.0004508
Published: May 2025
View articletitled, Study on the third harmonic diagnosis and etching distribution analysis according to the phase change between the upper and lower RF electrodes in a 60 MHz capacitively coupled plasma triode reactor based high aspect ratio contact dry etching process
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Journal Articles

Synergistic regulation of device performance by structural parameters of vertical side-gate type vacuum channel field emission transistor

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Wenhua Tang, Kerun Chen, Jie Li, Zhihua Shen, Xiao Wang, Shengli Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033201 (2025)
https://doi.org/10.1116/6.0004371
Published: March 2025
View articletitled, Synergistic regulation of device performance by structural parameters of vertical side-gate type vacuum channel field emission transistor
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Journal Articles

Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation

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Zhihua Shen, Qing Cai, Qiaoning Li, Bin Ge, Xiao Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022805 (2025)
https://doi.org/10.1116/6.0004317
Published: February 2025
View articletitled, Optimal structural design of nanoscale dual-gate air-channel triode via 3D simulation
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Journal Articles

Radio frequency side-gate nanoscale vacuum channel triode

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Zhihua Shen, Qiaoning Li, Bin Ge, Xiao Wang, Shengli Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052801 (2024)
https://doi.org/10.1116/6.0003823
Published: August 2024
View articletitled, Radio frequency side-gate nanoscale vacuum channel triode
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Journal Articles

Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam

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Jaydip Sawant, Ketan Bhotkar, Yi Yin Yu, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032202 (2024)
https://doi.org/10.1116/6.0003390
Published: April 2024
View articletitled, Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam
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Journal Articles

High current field emission from Si nanowires on pillar structures

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Philipp Buchner, Matthias Hausladen, Mathias Bartl, Michael Bachmann, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022208 (2024)
https://doi.org/10.1116/6.0003384
Published: February 2024
View articletitled, High current field emission from Si nanowires on pillar structures
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Journal Articles

Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam

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Jaydip Sawant, Yi Yin Yu, Ketan Bhotkar, Hyun-Jung Jung, Gi Joon Nam, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033201 (2023)
https://doi.org/10.1116/6.0002286
Published: March 2023
View articletitled, Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam
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Journal Articles

Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters

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Yi Yin Yu, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023203 (2023)
https://doi.org/10.1116/6.0002284
Published: March 2023
View articletitled, Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters
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Journal Articles

Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture

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Ketan Bhotkar, Yi Yin Yu, Jaydip Sawant, Ravindra Patil, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023202 (2023)
https://doi.org/10.1116/6.0002285
Published: March 2023
View articletitled, Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture
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Journal Articles

Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques

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Yi Yin Yu, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022204 (2022)
https://doi.org/10.1116/6.0001588
Published: February 2022
View articletitled, Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques
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Journal Articles

Silicon field emitters fabricated by dicing-saw and wet-chemical-etching

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Simon Edler, Andreas Schels, Josef Biba, Walter Hansch, Michael Bachmann, Felix Düsberg, Marinus Werber, Christoph Langer, Manuel Meyer, David von Bergen, Andreas Pahlke
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 013205 (2021)
https://doi.org/10.1116/6.0000466
Published: January 2021
View articletitled, Silicon field emitters fabricated by dicing-saw and wet-chemical-etching
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Journal Articles

Silicon chip field emission electron source fabricated by laser micromachining

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Christoph Langer, Vitali Bomke, Matthias Hausladen, Robert Ławrowski, Christian Prommesberger, Michael Bachmann, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 013202 (2020)
https://doi.org/10.1116/1.5134872
Published: December 2019
View articletitled, Silicon chip field emission electron source fabricated by laser micromachining
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Journal Articles

Simple planar field-electron emitter using highly crystalline single-walled carbon nanotubes in a triode structure with in-plane under-gate electrode

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Shoichi Kumon, Norihiro Shimoi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021201 (2019)
https://doi.org/10.1116/1.5066256
Published: January 2019
View articletitled, Simple planar field-electron emitter using highly crystalline single-walled carbon nanotubes in a triode structure with in-plane under-gate electrode
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Journal Articles

Fabrication of a compact glass-sealed x-ray tube with carbon nanotube cold cathode for high-resolution imaging

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Ji Hwan Hong, Jung Su Kang, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 02C109 (2018)
https://doi.org/10.1116/1.5007106
Published: January 2018
View articletitled, Fabrication of a compact glass-sealed x-ray tube with carbon nanotube cold cathode for high-resolution imaging
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Journal Articles

Field emission characterization of in situ deposited gold nanocones with variable cone densities

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Johannes Bieker, Farough Roustaie, Helmut F. Schlaak, Christoph Langer, Rupert Schreiner, Marcel Lotz, Stefan Wilfert
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 02C105 (2018)
https://doi.org/10.1116/1.5009504
Published: January 2018
View articletitled, Field emission characterization of in situ deposited gold nanocones with variable cone densities
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Journal Articles

High-performance carbon-nanotube-based cold cathode electron beam with low-thermal-expansion gate electrode

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Jung Su Kang, Ji Hwan Hong, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 02C104 (2018)
https://doi.org/10.1116/1.5005025
Published: January 2018
View articletitled, High-performance carbon-nanotube-based cold cathode electron beam with low-thermal-expansion gate electrode
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Journal Articles

Practical design of the electron gun for a microfocus x-ray source

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W. P. Li, P. F. Wang, J. B. Liu, W. X. Zhao, L. Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 061604 (2017)
https://doi.org/10.1116/1.5010897
Published: November 2017
View articletitled, Practical design of the electron gun for a microfocus x-ray source
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Journal Articles

Nanodiamond vacuum field emission microtriode

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Shao-Hua Hsu, Weng Poo Kang, Supil Raina, Mick Howell, Jin-Hua Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 032201 (2017)
https://doi.org/10.1116/1.4981018
Published: April 2017
View articletitled, Nanodiamond vacuum field emission microtriode
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Journal Articles

Fabrication of Mo microcones for volcano-structured double-gate Spindt-type emitter cathodes using triode high power pulsed magnetron sputtering

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Takeo Nakano, Tomoki Narita, Kei Oya, Masayoshi Nagao, Hisashi Ohsaki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 022204 (2017)
https://doi.org/10.1116/1.4978506
Published: March 2017
View articletitled, Fabrication of Mo microcones for volcano-structured double-gate Spindt-type emitter cathodes using triode high power pulsed magnetron sputtering
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Journal Articles

Electron extraction electrode for a high-performance electron beam from carbon nanotube cold cathodes

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Jung Su Kang, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 02C109 (2017)
https://doi.org/10.1116/1.4978045
Published: March 2017
View articletitled, Electron extraction electrode for a high-performance electron beam from carbon nanotube cold cathodes
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