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Journal Articles

Demonstration of a silicon gated field emitter array based low frequency Colpitts oscillator at 400 °C

Ranajoy Bhattacharya, Robert Hay, Mason Cannon, Nedeljko Karaulac, Girish Rughoobur, Akintunde Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023201 (2023)
https://doi.org/10.1116/6.0002272
Published: January 2023
View article titled, Demonstration of a silicon gated field emitter array based low frequency Colpitts oscillator at 400 °C
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Includes: Supplementary data
Journal Articles

Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison

Brian D. Rummel, Leonid Miroshnik, Andrew B. Li, Grant D. Heilman, Ganesh Balakrishnan, Talid Sinno, Sang M. Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 013203 (2023)
https://doi.org/10.1116/6.0002169
Published: December 2022
View article titled, Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison
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Includes: Supplementary data
Journal Articles

Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light

Varun P. Sharma, Tapas Ganguli, Rahul Shukla
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063001 (2022)
https://doi.org/10.1116/6.0002190
Published: November 2022
View article titled, Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light
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Journal Articles

Concurrent events of memory and threshold switching in Ag/SiNx/Si devices

Sungjun Kim, Min-Hwi Kim, Tae-Hyeon Kim, Ying-Chen Chen, Yao-Feng Chang, Muhammad Ismail, Yoon Kim, Kyung-Chang Ryoo, Byung-Gook Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 051203 (2018)
https://doi.org/10.1116/1.5034058
Published: August 2018
View article titled, Concurrent events of memory and threshold switching in Ag/SiN<em><sub>x</sub></em>/Si devices
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Journal Articles

Frequency dispersion and dielectric relaxation in postdeposition annealed high-κ erbium oxide metal–oxide–semiconductor capacitors

Robin Khosla, Satinder K. Sharma
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 012201 (2018)
https://doi.org/10.1116/1.4995809
Published: December 2017
View article titled, Frequency dispersion and dielectric relaxation in postdeposition annealed high-κ erbium oxide metal–oxide–semiconductor capacitors
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Journal Articles

Effect of excess Bi2O3 on structure and performance of ZnO-based thin film transistors

Wei Ye, Wei Ren, Zhao Wang, Peng Shi, Shuming Yang, Weixuan Jing, Zhuangde Jiang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 061206 (2015)
https://doi.org/10.1116/1.4935105
Published: October 2015
View article titled, Effect of excess Bi<sub>2</sub>O<sub>3</sub> on structure and performance of ZnO-based thin film transistors
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Journal Articles

Simulation technique for pattern inspection using a projection electron microscope

Susumu Iida, Ryoichi Hirano, Tsuyoshi Amano, Hidehiro Watanabe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FN02 (2015)
https://doi.org/10.1116/1.4931932
Published: September 2015
View article titled, Simulation technique for pattern inspection using a projection electron microscope
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Journal Articles

Effects of 340 keV proton irradiation on InGaN/GaN blue light-emitting diodes

Byung-Jae Kim, Ya-Hsi Hwang, Shihyun Ahn, Fan Ren, Stephen J. Pearton, Jihyun Kim, Tae Sung Jang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051215 (2015)
https://doi.org/10.1116/1.4930297
Published: September 2015
View article titled, Effects of 340 keV proton irradiation on InGaN/GaN blue light-emitting diodes
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Journal Articles

Emission mechanism of high current density scandia-doped dispenser cathodes

Yiman Wang, Jinshu Wang, Wei Liu, Xizhu Zhang, Lili Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 04E106 (2011)
https://doi.org/10.1116/1.3609251
Published: August 2011
View article titled, Emission mechanism of high current density scandia-doped dispenser cathodes
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Journal Articles

E-beam invasiveness on 65 nm complementary metal-oxide semiconductor circuitry

Yuval Greenzweig, Yariv Drezner, Amir Raveh, Oleg Sidorov, Richard H. Livengood
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 021202 (2011)
https://doi.org/10.1116/1.3554904
Published: February 2011
View article titled, E-beam invasiveness on 65 nm complementary metal-oxide semiconductor circuitry
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Journal Articles

Antimonide-based pN terahertz mixer diodes

R. Magno, J. G. Champlain, H. S. Newman, D. Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 03C109 (2011)
https://doi.org/10.1116/1.3549885
Published: February 2011
View article titled, Antimonide-based pN terahertz mixer diodes
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Journal Articles

Stochastic model of the resistive switching mechanism in bipolar resistive random access memory: Monte Carlo simulations

A. Makarov, V. Sverdlov, S. Selberherr
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 01AD03 (2011)
https://doi.org/10.1116/1.3521503
Published: January 2011
View article titled, Stochastic model of the resistive switching mechanism in bipolar resistive random access memory: Monte Carlo simulations
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Journal Articles

Piezoelectrically driven silicon carbide resonators

Enrico Mastropaolo, Isaac Gual, Graham Wood, Andrew Bunting, Rebecca Cheung
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6N18–C6N23 (2010)
https://doi.org/10.1116/1.3498760
Published: November 2010
View article titled, Piezoelectrically driven silicon carbide resonators
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Journal Articles

Development of high spatial resolution x-ray radiography system equipped with multiwalled carbon nanotube field emission cathode

Ryosuke Yabushita, Koichi Hata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 702–705 (2008)
https://doi.org/10.1116/1.2894879
Published: April 2008
View article titled, Development of high spatial resolution x-ray radiography system equipped with multiwalled carbon nanotube field emission cathode
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Journal Articles

Hybrid carbon nanotube-silicon complementary metal oxide semiconductor circuits

I. Meric, V. Caruso, R. Caldwell, J. Hone, K. L. Shepard, S. J. Wind
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2577–2580 (2007)
https://doi.org/10.1116/1.2800322
Published: December 2007
View article titled, Hybrid carbon nanotube-silicon complementary metal oxide semiconductor circuits
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Journal Articles

Micromechanical resonators and filters for microelectromechanical system applications

Mehrnaz Motiee, Raafat R. Mansour, Amir Khajepour
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 2499–2508 (2006)
https://doi.org/10.1116/1.2356865
Published: October 2006
View article titled, Micromechanical resonators and filters for microelectromechanical system applications
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Journal Articles

Long-wavelength semiconductor saturable absorber mirrors using metamorphic InP grown on GaAs by molecular beam epitaxy

S. Suomalainen, A. Vainionpää, O. Tengvall, T. Hakulinen, R. Herda, S. Karirinne, M. Guina, O. G. Okhotnikov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 24, 1496–1499 (2006)
https://doi.org/10.1116/1.2197514
Published: May 2006
View article titled, Long-wavelength semiconductor saturable absorber mirrors using metamorphic InP grown on GaAs by molecular beam epitaxy
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Journal Articles

Arrays of high- Q high stability ultrahigh-frequency resonators for chemical/biological sensors

R. L. Kubena, D. T. Chang, F. P. Stratton, Richard J. Joyce, T. Y. Hsu, M. K. Lim, R. T. M’Closkey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 2979–2983 (2005)
https://doi.org/10.1116/1.2121731
Published: December 2005
View article titled, Arrays of high- Q high stability ultrahigh-frequency resonators for chemical/biological sensors
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Journal Articles

Nanometer-level repeatable metrology using the Nanoruler

Paul T. Konkola, Carl G. Chen, Ralf K. Heilmann, Chulmin Joo, Juan C. Montoya, Chih-Hao Chang, Mark L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 3097–3101 (2003)
https://doi.org/10.1116/1.1610003
Published: December 2003
View article titled, Nanometer-level repeatable metrology using the Nanoruler
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Journal Articles

20 nm polysilicon gate patterning and application in 36 nm complementary metal–oxide–semiconductor devices

Qiuxia Xu, Qian He, Ming Liu, Yuying Zhao, Baoqing Chen, Zhengsheng Han, Tianchun Ye, Dexin Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 2352–2359 (2003)
https://doi.org/10.1116/1.1620514
Published: November 2003
View article titled, 20 nm polysilicon gate patterning and application in 36 nm complementary metal–oxide–semiconductor devices
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