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Journal Articles

Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy

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Jitae Park, Sejin Oh, Sung-Ho Jang, Dougyong Sung, Jin-Young Bang, Sung-Il Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 044202 (2025)
https://doi.org/10.1116/6.0004477
Published: June 2025
View articletitled, Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy
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Journal Articles

Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation

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Clément Sart, Jérôme Dubois, Emilie Prevost, Philippe Garnier, Benjamin Vianne, Frédéric Giovannoni, Caroline Bringolf-Penner, Sébastien Gallois-Garreignot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033203 (2025)
https://doi.org/10.1116/6.0004309
Published: April 2025
View articletitled, Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation
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Journal Articles

Measurement of field emission array current distributions by metal-coated CMOS image sensors

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Mattias Hausladen, Andreas Schels, Philipp Buchner, Mathias Bartl, Ali Asgharzade, Simon Edler, Dominik Wohlfartsstätter, Michael Bachmann, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062209 (2024)
https://doi.org/10.1116/6.0004074
Published: November 2024
View articletitled, Measurement of field emission array current distributions by metal-coated CMOS image sensors
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Journal Articles

Correlation between electromigration-related void volumes and time-to-failure, the high-resolution x-ray tomography’s vital support

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Stéphane Moreau, Alexandra Fraczkiewicz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044004 (2020)
https://doi.org/10.1116/6.0000252
Published: June 2020
View articletitled, Correlation between electromigration-related void volumes and time-to-failure, the high-resolution x-ray tomography’s vital support
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Journal Articles

Fabrication and optical behavior of graded-index, moth-eye antireflective structures in CdTe

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Lesley Chan, Amitabh Ghoshal, Eric A. DeCuir, Jr., Yuan Ping Chen, Daniel E. Morse, Michael J. Gordon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 011201 (2017)
https://doi.org/10.1116/1.4971770
Published: December 2016
View articletitled, Fabrication and optical behavior of graded-index, moth-eye antireflective structures in CdTe
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Journal Articles

Electrostatic-focusing image sensor with volcano-structured Spindt-type field emitter array

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Yuki Honda, Masakazu Nanba, Kazunori Miyakawa, Misao Kubota, Masayoshi Nagao, Yoichiro Neo, Hidenori Mimura, Norifumi Egami
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 052201 (2016)
https://doi.org/10.1116/1.4959787
Published: July 2016
View articletitled, Electrostatic-focusing image sensor with volcano-structured Spindt-type field emitter array
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Journal Articles

Integration and fabrication of high-performance Sb-based heterostructure backward diodes with submicron-scale airbridges for terahertz detection

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Syed M. Rahman, Zhenguo Jiang, Patrick Fay, Lei Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041220 (2016)
https://doi.org/10.1116/1.4953551
Published: June 2016
View articletitled, Integration and fabrication of high-performance Sb-based heterostructure backward diodes with submicron-scale airbridges for terahertz detection
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Journal Articles

Beam profile measurement of volcano-structured double-gate Spindt-type field emitter arrays

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Masayoshi Nagao, Yasuhito Gotoh, Yoichiro Neo, Hidenori Mimura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 02G108 (2016)
https://doi.org/10.1116/1.4944453
Published: March 2016
View articletitled, Beam profile measurement of volcano-structured double-gate Spindt-type field emitter arrays
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Journal Articles

Electron beam collimation from an all-metal double-gate 40 000 nanotip array: Improved emission current and beam uniformity upon neon gas conditioning

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Pratyush Das Kanungo, Patrick Helfenstein, Vitaliy Guzenko, Chiwon Lee, Martin Paraliev, Soichiro Tsujino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 03C113 (2015)
https://doi.org/10.1116/1.4916091
Published: April 2015
View articletitled, Electron beam collimation from an all-metal double-gate 40 000 nanotip array: Improved emission current and beam uniformity upon neon gas conditioning
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Journal Articles

Active-matrix Spindt-type field emitter array with faster response time for image sensor with high-gain avalanche rushing amorphous photoconductor target

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Yuki Honda, Masakazu Nanba, Kazunori Miyakawa, Misao Kubota, Norifumi Egami
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 012205 (2015)
https://doi.org/10.1116/1.4906103
Published: January 2015
View articletitled, Active-matrix Spindt-type field emitter array with faster response time for image sensor with high-gain avalanche rushing amorphous photoconductor target
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Journal Articles

Minority carrier lifetime of lattice-matched CdZnTe alloy grown on InSb substrates using molecular beam epitaxy

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Shi Liu, Xin-Hao Zhao, Calli Campbell, Michael J. DiNezza, Yuan Zhao, Yong-Hang Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 011207 (2015)
https://doi.org/10.1116/1.4905289
Published: January 2015
View articletitled, Minority carrier lifetime of lattice-matched CdZnTe alloy grown on InSb substrates using molecular beam epitaxy
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Journal Articles

Development of gasbag-assisted ultraviolet-based imprinting process for replication of microstructures onto cylindrical surface

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Cheng-Hui Lin, Rong-Hong Hong, Tsui-Hua Li, Sen-Yeu Yang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 051802 (2014)
https://doi.org/10.1116/1.4891920
Published: August 2014
View articletitled, Development of gasbag-assisted ultraviolet-based imprinting process for replication of microstructures onto cylindrical surface
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Journal Articles

Impact of electron scattering in extreme ultraviolet reflective multilayer on electron image

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Susumu Iida, Tsuyoshi Amano, Ryoichi Hirano, Tsuneo Terasawa, Hidehiro Watanabe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F601 (2013)
https://doi.org/10.1116/1.4819300
Published: August 2013
View articletitled, Impact of electron scattering in extreme ultraviolet reflective multilayer on electron image
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Journal Articles

Evidence of long-wave-infrared excited state transition at high temperature (200 K) in 35-layer In0.50Ga0.50As/GaAs quantum dot infrared photodetector

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Sourav Adhikary, Subhananda Chakrabarti
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 03C128 (2013)
https://doi.org/10.1116/1.4801791
Published: April 2013
View articletitled, Evidence of long-wave-infrared excited state transition at high temperature (200 K) in 35-layer In0.50Ga0.50As/GaAs quantum dot infrared photodetector
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Journal Articles

High performance long-wave type-II superlattice infrared detectors

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Arezou Khoshakhlagh, Linda Höglund, David Z. Ting, Cory J. Hill, Sam A. Keo, Alexander Soibel, Jean Nguyen, Sarath D. Gunapala
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 03C122 (2013)
https://doi.org/10.1116/1.4798485
Published: April 2013
View articletitled, High performance long-wave type-II superlattice infrared detectors
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Journal Articles

MBE growth of GaSb-based photodetectors on 6-inch diameter GaAs substrates via select buffers

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Joel M. Fastenau, Dmitri Lubyshev, Yueming Qiu, Amy W. K. Liu, Edwin J. Koerperick, Jon T. Olesberg, Dennis Norton, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 03C106 (2013)
https://doi.org/10.1116/1.4792516
Published: February 2013
View articletitled, MBE growth of GaSb-based photodetectors on 6-inch diameter GaAs substrates via select buffers
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Journal Articles

Evaluation of lithographic performance of extreme ultra violet mask using coherent scattering microscope

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Jonggul Doh, Jae Uk Lee, Jinho Ahn, Seong-sue Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F504 (2012)
https://doi.org/10.1116/1.4764091
Published: November 2012
View articletitled, Evaluation of lithographic performance of extreme ultra violet mask using coherent scattering microscope
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Journal Articles

High resolution patterning on nonplanar substrates with large height variation using electron beam lithography

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Vishva Ray, Yukinori Aida, Ryo Funakoshi, Hitoshi Kato, Stella W. Pang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F303 (2012)
https://doi.org/10.1116/1.4755819
Published: October 2012
View articletitled, High resolution patterning on nonplanar substrates with large height variation using electron beam lithography
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Journal Articles

Quasistatic and dynamic mechanical properties of Al–Si–Cu structural films in uniaxial tension

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Masayuki Fujii, Takahiro Namazu, Hiroki Fujii, Kei Masunishi, Yasushi Tomizawa, Shozo Inoue
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 031804 (2012)
https://doi.org/10.1116/1.4711040
Published: May 2012
View articletitled, Quasistatic and dynamic mechanical properties of Al–Si–Cu structural films in uniaxial tension
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Journal Articles

Temperature mapping using single wavelength pyrometry during epitaxial growth

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Bernard Paquette, Badii Gsib, Richard Arès
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 060604 (2011)
https://doi.org/10.1116/1.3660395
Published: November 2011
View articletitled, Temperature mapping using single wavelength pyrometry during epitaxial growth
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