Skip to Main Content
Umbrella Alt Text
Umbrella Alt Text Close
  • Publishers
    • AIP Publishing
    • Physics Today
    • Acoustical Society of America
    • American Association of Physics Teachers
    • American Crystallographic Association, Inc.
    • AVS: Science and Technology of Materials, Interfaces and Processing
    • Chinese Physical Society
    • Hefei General Machinery Research Institute
    • Laser Institute of America
    • The Society of Rheology
    • Tianjin University
  • Publications
    • Journals
    • Physics Today
    • Conference Proceedings
    • Books
  • Special Topics
  • Authors
  • Librarians
  • About
Search Dropdown Menu
header search
    Search
    Advanced Search |Citation Search
    User Tools Dropdown
    Sign In
    AVS: Science and Technology of Materials Interfaces and Processing
    Journal of Vacuum Science & Technology B
    Toggle MenuMenu
    • Home
    • Browse
    • Collections
      • Editor's Picks
      • Featured
      • Perspectives
      • Press Releases
      • Review Articles
      • Scilights
      • Special Topics
      • Upcoming Special Topics
    • Publish With Us
      • Submit Your Manuscript
      • Preparing Your Manuscript
      • Publication Charges
      • LaTex Template
      • Rights and Permissions
      • Author Resources
      • AIP Author Services
    • About
      • Overview
      • Editorial Policies
      • Contact
      • Editors
      • Editorial Board
      • Journal Development Team
      • News
      • Subscriptions
      • Advertising
    Skip Nav Destination
    Update search
    Querybuilder input 1
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 2
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 3
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 4
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 5
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 6
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References

    NARROW

    Format
    Filter by format

    Topics

    AIP thesaurus
    • Acoustics
      •  
        Acousto-optics
    • Electronics
      • Electronic devices
        • Electronic circuits
          •  
            Oscillators
    • General physics
      • General procedures and instrumentation
        • Laboratory procedures
          •  
            Metrology
    • Interdisciplinary physics
      • Engineering science
        • Telecommunications engineering
          •  
            Optical communications
    • Materials science
      • Materials synthesis and processing
        • Microtechnology
          • Microfabrication
            • Lithography
              •  
                Scanning beam interference lithography (2)
    • Optics and optical physics
      • Optical techniques and instrumentation
        • Optical devices
          •  
            Electrooptical devices
          • Optical elements
            •  
              Optical phase shifters (1)
          • Optoelectronics
            • Optoelectronic devices
              • Photodetectors
                •  
                  Photodiodes
      • Physical optics
        •  
          Optical interference (1)
    • Society and organization
      • Industry
        •  
          Semiconductors
    Journal
    Filter by journal
    Article Type
    Filter by article-type
    Issue Section
    Filter by issue-section
    Date
    Filter by date
    Apply
    Availability
    Availability
    1-2 of 2
    Acousto-optics
    Close
    Save search
    Follow your search
    Access your saved searches in your account
    Close Modal
    Sort by
    Journal Articles

    Nanometer-level repeatable metrology using the Nanoruler

    Paul T. Konkola, Carl G. Chen, Ralf K. Heilmann, Chulmin Joo, Juan C. Montoya, Chih-Hao Chang, Mark L. Schattenburg
    Journal: Journal of Vacuum Science & Technology B
    J. Vac. Sci. Technol. B 21, 3097–3101 (2003)
    https://doi.org/10.1116/1.1610003
    Published: December 2003
    Abstract
    View article titled, Nanometer-level repeatable metrology using the Nanoruler
    Open the PDF for Nanometer-level repeatable metrology using the Nanoruler in another window
    Journal Articles

    Digital heterodyne interference fringe control system

    Ralf K. Heilmann, Paul T. Konkola, Carl G. Chen, G. S. Pati, Mark L. Schattenburg
    Journal: Journal of Vacuum Science & Technology B
    J. Vac. Sci. Technol. B 19, 2342–2346 (2001)
    https://doi.org/10.1116/1.1410096
    Published: November 2001
    Abstract
    View article titled, Digital heterodyne interference fringe control system
    Open the PDF for Digital heterodyne interference fringe control system in another window
    • Online ISSN 2166-2754
    • Print ISSN 2166-2746

    Resources

    • For Researchers
    • For Librarians
    • For Advertisers
    • Our Publishing Partners 

    Explore

    • Journals
    • Physics Today
    • Conference Proceedings
    • Books
    • Special Topics
    • Publishers

    pubs.aip.org

    • About
    • User Guide
    • Contact Us
    • Register
    • Help
    • Privacy Policy
    • Terms of Use

    Connect with AIP Publishing

    • Facebook
    • LinkedIn
    • Twitter
    • YouTube
    • © Copyright AIP Publishing LLC
    Close Modal
    Close Modal
    This Feature Is Available To Subscribers Only

    Sign In or Create an Account

    Close Modal
    Close Modal