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Journal Articles

TiN and TaN cointegration for 300 mm superconducting back end of line

T. Chêne, R. Segaud, F. Nemouchi, P. Gergaud, S. Minoret, F. Gustavo, J. Garrione, T. Chevolleau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022216 (2025)
https://doi.org/10.1116/6.0004316
Published: March 2025
View articletitled, TiN and TaN cointegration for 300 mm superconducting back end of line
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Journal Articles

Tracing degradation mechanisms of epitaxially grown GaAsSb on InP by InSb formation at elevated temperatures

Editor’s Pick
Leonid Miroshnik, Brian D. Rummel, Darryl M. Shima, Andrew Li, Ganesh Balakrishnan, Talid Sinno, Sang M. Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022215 (2025)
https://doi.org/10.1116/6.0004324
Published: March 2025
View articletitled, Tracing degradation mechanisms of epitaxially grown GaAsSb on InP by InSb formation at elevated temperatures
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Journal Articles

Effect of low-pressure postannealing on the electrical properties of VO2 thin films

Editor’s Pick
Xin Lin, Wanyu Jiang, Detao Mu, Yongfeng Jia, Shuoshuo Wang, Linhong Cao, Yajun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022807 (2025)
https://doi.org/10.1116/6.0004435
Published: March 2025
View articletitled, Effect of low-pressure postannealing on the electrical properties of VO2 thin films
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Journal Articles

Transition from the regime of thermionic emission to the space-charge limited current regime under strong Shottky effects

D. Karaoulanis, J. P. Xanthakis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042212 (2024)
https://doi.org/10.1116/6.0003700
Published: July 2024
View articletitled, Transition from the regime of thermionic emission to the space-charge limited current regime under strong Shottky effects
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Journal Articles

Effects of ion implantation with arsenic and boron in germanium-tin layers

Editor’s Pick
Sylvester Amoah, Hryhorii Stanchu, Grey Abernathy, Serhii Kryvyi, Fernando M. De Oliveira, Yuriy I. Mazur, Shangda Li, Shang Liu, Jifeng Liu, Wei Du, Baohua Li, Gregory Salamo, Shui-Qing Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034002 (2024)
https://doi.org/10.1116/6.0003565
Published: April 2024
View articletitled, Effects of ion implantation with arsenic and boron in germanium-tin layers
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Includes: Supplementary data
Journal Articles

Grain growth of Cu wires during Joule heat welding

Hironori Tohmyoh, Taiga Sakatoku
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012206 (2023)
https://doi.org/10.1116/6.0002337
Published: January 2023
View articletitled, Grain growth of Cu wires during Joule heat welding
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Journal Articles

Threshold switching stabilization of NbO2 films via nanoscale devices

Editor’s Pick
M. C. Sullivan, Zachary R. Robinson, Karsten Beckmann, Alex Powell, Ted Mburu, Katherine Pittman, Nathaniel Cady
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063202 (2022)
https://doi.org/10.1116/6.0002129
Published: November 2022
View articletitled, Threshold switching stabilization of NbO2 films via nanoscale devices
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Journal Articles

Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer

Yuki Yamada, Masataka Yahagi, Junichi Koike
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 013204 (2022)
https://doi.org/10.1116/6.0001536
Published: January 2022
View articletitled, Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer
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Journal Articles

Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase

Jimin Lee, Jaeyeon Kim, Juyoung Jeong, Hyunchul Sohn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 053206 (2021)
https://doi.org/10.1116/6.0001215
Published: September 2021
View articletitled, Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase
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Journal Articles

Effects of thickness on the wettability and electrical properties of Sn thin films

Jatinder Kaur, Ravish K. Jain, Atul Khanna, Amit K. Chawla
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032205 (2021)
https://doi.org/10.1116/6.0001026
Published: May 2021
View articletitled, Effects of thickness on the wettability and electrical properties of Sn thin films
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Journal Articles

Postdeposition annealing effect on the reliability of atomic-layer-deposited Al2O3 films on GaN

Kiyotaka Horikawa (堀川清貴), Satoshi Okubo (大久保智), Hiroshi Kawarada (川原田洋), Atsushi Hiraiwa (平岩篤)
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062207 (2020)
https://doi.org/10.1116/6.0000531
Published: October 2020
View articletitled, Postdeposition annealing effect on the reliability of atomic-layer-deposited Al2O3 films on GaN
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Journal Articles

Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection

Norbert Böwering, Christian Meier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062602 (2020)
https://doi.org/10.1116/6.0000501
Published: October 2020
View articletitled, Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection
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Journal Articles

Exploration of a Ca1−x(NaCe)x/2Bi4Ti3.98(WNb)0.01O15 ceramic intermediate phase by temperature-dependent spectroscopic ellipsometry and Raman scattering

Qiong Ding (丁穷), Liping Xu (徐丽萍), Jinzhong Zhang (张金中), Kai Jiang (姜凯), Zhigao Hu (胡志高), Zhiyong Zhou (周志勇), Xianlin Dong (董显林), Junhao Chu (褚君浩)
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061211 (2019)
https://doi.org/10.1116/1.5118791
Published: November 2019
View articletitled, Exploration of a Ca1−x(NaCe)x/2Bi4Ti3.98(WNb)0.01O15 ceramic intermediate phase by temperature-dependent spectroscopic ellipsometry and Raman scattering
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Journal Articles

Temperature dependence of dielectric function spectra and interband optical transitions in layered TlInS2

Yong-Gu Shim, Ryo Tashiro, Kazuki Wakita, Nazim Mamedov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061212 (2019)
https://doi.org/10.1116/1.5121905
Published: November 2019
View articletitled, Temperature dependence of dielectric function spectra and interband optical transitions in layered TlInS2
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Journal Articles

Optical constants of polycrystalline Ni from 0.06 to 6.0 eV at 300 K

Farzin Abadizaman, Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062920 (2019)
https://doi.org/10.1116/1.5118841
Published: November 2019
View articletitled, Optical constants of polycrystalline Ni from 0.06 to 6.0 eV at 300 K
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Includes: Supplementary data
Journal Articles

Interplay between electronic and structural transitions in VO2 revealed by ellipsometry

Ievgen Voloshenko, Bruno Gompf, Audrey Berrier, Gabriel Schnoering, Florian Kuhl, Angelika Polity, Martin Dressel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061202 (2019)
https://doi.org/10.1116/1.5121903
Published: October 2019
View articletitled, Interplay between electronic and structural transitions in VO2 revealed by ellipsometry
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Journal Articles

Lithium ion beams from liquid metal alloy ion sources

Wolfgang Pilz, Nico Klingner, Lothar Bischoff, Paul Mazarov, Sven Bauerdick
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021802 (2019)
https://doi.org/10.1116/1.5086271
Published: March 2019
View articletitled, Lithium ion beams from liquid metal alloy ion sources
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Journal Articles

Dependence of ferromagnetic properties on phosphorus concentration in Ga1-xMnxAs1-yPy

Xiang Li, Xinyu Liu, Sining Dong, Cameron Gorsak, Jacek K. Furdyna, Margaret Dobrowolska, Seul-Ki Bac, Sanghoon Lee, Sergei Rouvimov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 02D104 (2018)
https://doi.org/10.1116/1.5014055
Published: February 2018
View articletitled, Dependence of ferromagnetic properties on phosphorus concentration in Ga1-xMnxAs1-yPy
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Journal Articles

In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light

Norbert Böwering, Christian Meier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 021602 (2018)
https://doi.org/10.1116/1.5016821
Published: February 2018
View articletitled, In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light
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Journal Articles

Ferromagnetism in Fe2CrAl nanowires

Rajendra P. Dulal, Bishnu R. Dahal, Andrew Forbes, Niraj Bhattarai, Ian L. Pegg, John Philip
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 022902 (2018)
https://doi.org/10.1116/1.5011189
Published: January 2018
View articletitled, Ferromagnetism in Fe2CrAl nanowires
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