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Journal Articles

Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO₂ substrate

Housei Akazawa

J. Vac. Sci. Technol. B 40, 062204 (2022)

https://doi.org/10.1116/6.0002067

Published: October 2022

View article titled, Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO2 substrate

Journal Articles

Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling

Rajiv Sejpal, Bruce Smith

J. Vac. Sci. Technol. B 39, 062604 (2021)

https://doi.org/10.1116/6.0001298

Published: November 2021

View article titled, Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling

Journal Articles

Gaussian effective medium theory of dielectric properties of inhomogeneous systems

Agnieszka Chrzanowska, Sebastian Babiarz

J. Vac. Sci. Technol. B 38, 022201 (2020)

https://doi.org/10.1116/1.5130010

Published: January 2020

View article titled, Gaussian effective medium theory of dielectric properties of inhomogeneous systems

Journal Articles

Synthesis and study of γ-Fe₂O₃ and CoFe₂O₄ based ferrofluids by means of spectroscopic Mueller matrix ellipsometry

Yann Battie, Michel Stchakovsky, Sophie Neveu, Damien Jamon, Enric Garcia-Caurel

J. Vac. Sci. Technol. B 37, 062929 (2019)

https://doi.org/10.1116/1.5121286

Published: December 2019

View article titled, Synthesis and study of γ-Fe2O3 and CoFe2O4 based ferrofluids by means of spectroscopic Mueller matrix ellipsometry

Journal Articles

Roadmap of ellipsometric characterization of plasmonic nanoparticles

Yann Battie, Aotmane En Naciri

J. Vac. Sci. Technol. B 37, 062912 (2019)

https://doi.org/10.1116/1.5121343

Published: October 2019

View article titled, Roadmap of ellipsometric characterization of plasmonic nanoparticles

Journal Articles

Interplay between electronic and structural transitions in VO₂ revealed by ellipsometry

Ievgen Voloshenko, Bruno Gompf, Audrey Berrier, Gabriel Schnoering, Florian Kuhl, Angelika Polity, Martin Dressel

J. Vac. Sci. Technol. B 37, 061202 (2019)

https://doi.org/10.1116/1.5121903

Published: October 2019

View article titled, Interplay between electronic and structural transitions in VO2 revealed by ellipsometry

Journal Articles

Simple colloidal lithography method to fabricate large-area moth-eye antireflective structures on Si, Ge, and GaAs for IR applications

Federico Lora Gonzalez, Lesley Chan, Alex Berry, Daniel E. Morse, Michael J. Gordon

J. Vac. Sci. Technol. B 32, 051213 (2014)

https://doi.org/10.1116/1.4895966

Published: September 2014

View article titled, Simple colloidal lithography method to fabricate large-area moth-eye antireflective structures on Si, Ge, and GaAs for IR applications

Journal Articles

Optical properties of solution-processed LaAlO_x/Si films using spectroscopic ellipsometry

Tae Jung Kim, Soo Min Hwang, Jae Jin Yoon, Soon Yong Hwang, Han Gyeol Park, Jun Young Kim, Junho Choi, Young Dong Kim, Seung Muk Lee, Jinho Joo

J. Vac. Sci. Technol. B 31, 04D110 (2013)

https://doi.org/10.1116/1.4813435

Published: July 2013

View article titled, Optical properties of solution-processed LaAlOx/Si films using spectroscopic ellipsometry

Journal Articles

Growth and spectroscopic ellipsometry evaluation of composite layers of ErAs and InAs nanoparticles

Kurt G. Eyink, Luke J. Bissell, Jodie Shoaf, David H. Tomich, Daniel Esposito, Madelyn Hill, Larry Grazulis, Andrew Aronow, Krishnamurthy Mahalingam

J. Vac. Sci. Technol. B 31, 03C131 (2013)

https://doi.org/10.1116/1.4802965

Published: May 2013

View article titled, Growth and spectroscopic ellipsometry evaluation of composite layers of ErAs and InAs nanoparticles

Journal Articles

Size-dependent optical properties of Si nanocrystals embedded in amorphous SiO 2 measured by spectroscopic ellipsometry

J. Wei, J. Price, T. Wang, C. Hessel, M. C. Downer

J. Vac. Sci. Technol. B 29, 04D112 (2011)

https://doi.org/10.1116/1.3610967

Published: August 2011

View article titled, Size-dependent optical properties of Si nanocrystals embedded in amorphous SiO 2 measured by spectroscopic ellipsometry

Journal Articles

Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

P. D. Keathley, J. T. Hastings

J. Vac. Sci. Technol. B 26, 2473–2477 (2008)

https://doi.org/10.1116/1.3013368

Published: December 2008

View article titled, Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

Journal Articles

Effects of pore morphology on the diffusive properties of a porous low- κ dielectric

E. A. Joseph, S. P. Sant, M. J. Goeckner, L. J. Overzet, H. G. Peng, D. W. Gidley, B. E. E. Kastenmeier

J. Vac. Sci. Technol. B 25, 1684–1693 (2007)

https://doi.org/10.1116/1.2778694

Published: September 2007

View article titled, Effects of pore morphology on the diffusive properties of a porous low- κ dielectric

Journal Articles

Compatibility of high pressure cleaning mixtures with a porous low dielectric constant film: A positronium annihilation lifetime spectroscopic study

Satyanarayana Myneni, Hua-Gen Peng, David W. Gidley, Dennis W. Hess

J. Vac. Sci. Technol. B 23, 1463–1469 (2005)

https://doi.org/10.1116/1.1941227

Published: July 2005

View article titled, Compatibility of high pressure cleaning mixtures with a porous low dielectric constant film: A positronium annihilation lifetime spectroscopic study

Journal Articles

Optimized HT-AttPSM blanks using Al 2 O 3 ∕ TiO 2 multilayer films for the 65 nm technology node

Fu-Der Lai

J. Vac. Sci. Technol. B 22, 3097–3101 (2004)

https://doi.org/10.1116/1.1805541

Published: December 2004

View article titled, Optimized HT-AttPSM blanks using Al 2 O 3 ∕ TiO 2 multilayer films for the 65 nm technology node

Journal Articles

Real time spectroscopic ellipsometry study during the growth of nanocrystalline nitride protective coatings

S. M. Aouadi, M. Debessai, R. Tomek, T. Maeruf

J. Vac. Sci. Technol. B 22, 1822–1829 (2004)

https://doi.org/10.1116/1.1771662

Published: July 2004

View article titled, Real time spectroscopic ellipsometry study during the growth of nanocrystalline nitride protective coatings

Journal Articles

Structure–property relationships in porous GaN generated by Pt-assisted electroless etching studied by Raman spectroscopy

Todd L. Williamson, Diego J. Dı́az, Paul W. Bohn, Richard J. Molnar

J. Vac. Sci. Technol. B 22, 925–931 (2004)

https://doi.org/10.1116/1.1695335

Published: April 2004

View article titled, Structure–property relationships in porous GaN generated by Pt-assisted electroless etching studied by Raman spectroscopy

Journal Articles

Optical-constant tunable ( ZrO 2 ) x /( Cr 2 O 3 ) y /( Al 2 O 3 ) 1−x−y optical superlattices for attenuated phase shift mask in ArF lithography

F. D. Lai, L. A. Wang

J. Vac. Sci. Technol. B 19, 2617–2620 (2001)

https://doi.org/10.1116/1.1408951

Published: November 2001

View article titled, Optical-constant tunable ( ZrO 2 ) x /( Cr 2 O 3 ) y /( Al 2 O 3 ) 1−x−y optical superlattices for attenuated phase shift mask in ArF lithography

Journal Articles

Fabrication of large area 100 nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications

Zhaoning Yu, Wei Wu, Lei Chen, Stephen Y. Chou

J. Vac. Sci. Technol. B 19, 2816–2819 (2001)

https://doi.org/10.1116/1.1409384

Published: November 2001

View article titled, Fabrication of large area 100 nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications

Journal Articles

Investigation of citric acid-hydrogen peroxide etched GaAs and Al 0.3 Ga 0.7 As surfaces by spectroscopic ellipsometry

P. G. Snyder, S.-J. Cho

J. Vac. Sci. Technol. B 16, 2680–2685 (1998)

https://doi.org/10.1116/1.590256

Published: September 1998

View article titled, Investigation of citric acid-hydrogen peroxide etched GaAs and Al 0.3 Ga 0.7 As surfaces by spectroscopic ellipsometry

NARROW

Topics

Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO₂ substrate

Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling

Gaussian effective medium theory of dielectric properties of inhomogeneous systems

Synthesis and study of γ-Fe₂O₃ and CoFe₂O₄ based ferrofluids by means of spectroscopic Mueller matrix ellipsometry

Roadmap of ellipsometric characterization of plasmonic nanoparticles

Interplay between electronic and structural transitions in VO₂ revealed by ellipsometry

Simple colloidal lithography method to fabricate large-area moth-eye antireflective structures on Si, Ge, and GaAs for IR applications

Optical properties of solution-processed LaAlO_x/Si films using spectroscopic ellipsometry

Growth and spectroscopic ellipsometry evaluation of composite layers of ErAs and InAs nanoparticles

Size-dependent optical properties of Si nanocrystals embedded in amorphous SiO 2 measured by spectroscopic ellipsometry

Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

Effects of pore morphology on the diffusive properties of a porous low- κ dielectric

Compatibility of high pressure cleaning mixtures with a porous low dielectric constant film: A positronium annihilation lifetime spectroscopic study

Optimized HT-AttPSM blanks using Al 2 O 3 ∕ TiO 2 multilayer films for the 65 nm technology node

Real time spectroscopic ellipsometry study during the growth of nanocrystalline nitride protective coatings

Structure–property relationships in porous GaN generated by Pt-assisted electroless etching studied by Raman spectroscopy

Optical-constant tunable ( ZrO 2 ) x /( Cr 2 O 3 ) y /( Al 2 O 3 ) 1−x−y optical superlattices for attenuated phase shift mask in ArF lithography

Fabrication of large area 100 nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications

Investigation of citric acid-hydrogen peroxide etched GaAs and Al 0.3 Ga 0.7 As surfaces by spectroscopic ellipsometry

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