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Journal Articles

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Nguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062205 (2024)
https://doi.org/10.1116/6.0003939
Published: November 2024
View articletitled, Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films
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Journal Articles

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

Editor’s Pick
B. Claflin, G. J. Grzybowski, S. Zollner, B. R. Rogers, T. A. Cooper, D. C. Look
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052204 (2024)
https://doi.org/10.1116/6.0003689
Published: August 2024
View articletitled, Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates
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Journal Articles

Temperature dependent correlation of Hall effect and optical measurements of electron concentration in degenerate InN thin film

Fernando M. de Oliveira, Chen Li, Pijush K. Ghosh, Andrian V. Kuchuk, Morgan E. Ware, Yuriy I. Mazur, Gregory J. Salamo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052805 (2023)
https://doi.org/10.1116/6.0002866
Published: August 2023
View articletitled, Temperature dependent correlation of Hall effect and optical measurements of electron concentration in degenerate InN thin film
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Includes: Supplementary data
Journal Articles

Influence of processing conditions on the titanium–aluminum contact metallization on a silicon wafer for thermal management

Manish Singh, Lakshmi Narayanan Ramasubramanian, Raj N. Singh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042208 (2023)
https://doi.org/10.1116/6.0002749
Published: June 2023
View articletitled, Influence of processing conditions on the titanium–aluminum contact metallization on a silicon wafer for thermal management
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Journal Articles

Comment on “ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer” [J. Vac. Sci. Technol. B 39, 052208 (2021)]

B. L. Zhu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 056001 (2022)
https://doi.org/10.1116/6.0001934
Published: July 2022
View articletitled, Comment on “ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer” [J. Vac. Sci. Technol. B 39, 052208 (2021)]
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Journal Articles

Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)

Narin Sunthornpan, Kenjiro Kimura, Kentaro Kyuno
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 030601 (2022)
https://doi.org/10.1116/6.0001774
Published: April 2022
View articletitled, Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)
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Journal Articles

Tailoring of structual, optical, and electrical properties of Cu films by sputtering power and deposition atmosphere

Bailin Zhu, Jinhua Yin, Junmin Ma, Jun Wu, Xinwei Shi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022211 (2022)
https://doi.org/10.1116/6.0001673
Published: March 2022
View articletitled, Tailoring of structual, optical, and electrical properties of Cu films by sputtering power and deposition atmosphere
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Includes: Supplementary data
Journal Articles

Fabrication of Cd-free ZnCuInS/ZnS based inverted quantum dot light-emitting diode: Considering substrate temperature effect on sputtered ZnO layer

Mohammad Mostafizur Rahman Biswas, Md. Faruk Hossain, Masahiro Morimoto, Shigeki Naka, Hiroyuki Okada
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 063401 (2021)
https://doi.org/10.1116/6.0001365
Published: November 2021
View articletitled, Fabrication of Cd-free ZnCuInS/ZnS based inverted quantum dot light-emitting diode: Considering substrate temperature effect on sputtered ZnO layer
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Includes: Supplementary data
Journal Articles

Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles

Jiaxi Xiang, Anuj Singhal, Ralu Divan, Liliana Stan, Yuzi Liu, Igor Paprotny
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 042803 (2021)
https://doi.org/10.1116/6.0000992
Published: July 2021
View articletitled, Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles
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Includes: Supplementary data
Journal Articles

Engineering anisotropic magnetoresistance of Hall bars with interfacial organic layers

Jun Hong Park, Mario Ribeiro, Thi Kim Hang Pham, Nyun Jong Lee, Tai-woon Eom, Junhyeon Jo, Seung-Young Park, Sonny H. Rhim, Kohji Nakamura, Jung-Woo Yoo, Tae Hee Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 040602 (2020)
https://doi.org/10.1116/6.0000222
Published: June 2020
View articletitled, Engineering anisotropic magnetoresistance of Hall bars with interfacial organic layers
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Journal Articles

Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN

Luisa Krückeberg, Steffen Wirth, Victor V. Solovyev, Andreas Großer, Igor V. Kukushkin, Thomas Mikolajick, Stefan Schmult
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042203 (2020)
https://doi.org/10.1116/1.5145198
Published: June 2020
View articletitled, Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN
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Journal Articles

Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering

Anmar H. Shukor, Haider A. Alhattab, Ichiro Takano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012803 (2020)
https://doi.org/10.1116/1.5131518
Published: December 2019
View articletitled, Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering
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Journal Articles

Electrical and material characterization of sulfur-implanted GaSb

Daniel J. Herrera, Luke F. Lester
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031214 (2019)
https://doi.org/10.1116/1.5093329
Published: May 2019
View articletitled, Electrical and material characterization of sulfur-implanted GaSb
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Journal Articles

Influence of mask material on the electrical properties of selective area epitaxy GaN microstructures

Isra Mahaboob, Kasey Hogan, Steven W. Novak, Fatemeh Shahedipour-Sandvik, Randy P. Tompkins, Nathan Lazarus
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 031203 (2018)
https://doi.org/10.1116/1.5026804
Published: April 2018
View articletitled, Influence of mask material on the electrical properties of selective area epitaxy GaN microstructures
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Journal Articles

Effect of various Fe-doped AlGaN buffer layer of AlGaN/GaN HEMTs on Si substrate

Hsien-Chin Chiu, Shang-Cyun Chen, Jiun-Wei Chiu, Bo-Hong Li, Rong Xuan, Chih-Wei Hu, Kuang-Po Hsueh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 041205 (2017)
https://doi.org/10.1116/1.4991535
Published: July 2017
View articletitled, Effect of various Fe-doped AlGaN buffer layer of AlGaN/GaN HEMTs on Si substrate
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Journal Articles

Investigation of thin InN/GaN heterostructures with in situ SiNx dielectric grown by plasma-assisted molecular beam epitaxy

Christos Zervos, Adam Adikimenakis, Petros Beleniotis, Athanasios Kostopoulos, Maria Androulidaki, Katerina Tsagaraki, Maria Kayambaki, George Konstantinidis, Alexandros Georgakilas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 021210 (2017)
https://doi.org/10.1116/1.4977606
Published: February 2017
View articletitled, Investigation of thin InN/GaN heterostructures with in situ SiNx dielectric grown by plasma-assisted molecular beam epitaxy
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Journal Articles

Transport properties of Bi2(Se1−xTex)3 thin films grown by molecular beam epitaxy

Yong Wang, Theresa P. Ginley, Chiyu Zhang, Stephanie Law
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 02B106 (2017)
https://doi.org/10.1116/1.4976622
Published: February 2017
View articletitled, Transport properties of Bi2(Se1−xTex)3 thin films grown by molecular beam epitaxy
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Journal Articles

Study of phosphorus doped Si:C films formed by in situ doped Si epitaxy and implantation process for n-type metal-oxide-semiconductor devices

Shogo Mochizuki, Rainer Loesing, Yun-Yu Wang, Hemanth Jagannathan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 021208 (2017)
https://doi.org/10.1116/1.4975923
Published: February 2017
View articletitled, Study of phosphorus doped Si:C films formed by in situ doped Si epitaxy and implantation process for n-type metal-oxide-semiconductor devices
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Journal Articles

Control of unintentional oxygen incorporation in GaN

Editor’s Pick
Stefan Schmult, Felix Schubert, Steffen Wirth, Andreas Großer, Terence Mittmann, Thomas Mikolajick
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 02B104 (2017)
https://doi.org/10.1116/1.4975925
Published: February 2017
View articletitled, Control of unintentional oxygen incorporation in GaN
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Journal Articles

Economical rotatable holder for magnetotransport measurements

Avyaya J. Narasimham, Daniel Pennock, Graham J. Potter, Brian Taylor, Vincent P. LaBella
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 023201 (2017)
https://doi.org/10.1116/1.4974488
Published: January 2017
View articletitled, Economical rotatable holder for magnetotransport measurements
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