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Journal Articles

Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60

Sviatoslav Hrabar, Michał Kański, Soukaina Louerdi, Zbigniew Postawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032803 (2023)
https://doi.org/10.1116/6.0002575
Published: April 2023
View article titled, Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C<sub>60</sub>
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Includes: Supplementary data
Journal Articles

Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions

Joseph R. Vella, David Humbird, David B. Graves
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 023205 (2022)
https://doi.org/10.1116/6.0001681
Published: February 2022
View article titled, Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions
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Includes: Supplementary data
Journal Articles

Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks

Tobias Gergs, Borislav Borislavov, Jan Trieschmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012802 (2022)
https://doi.org/10.1116/6.0001485
Published: December 2021
View article titled, Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks
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Journal Articles

Molecular dynamics simulation for reactive ion etching of Si and SiO2 by SF 5 + ions

Erin Joy Capdos Tinacba, Tomoko Ito, Kazuhiro Karahashi, Michiro Isobe, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 043203 (2021)
https://doi.org/10.1116/6.0001230
Published: July 2021
View article titled, Molecular dynamics simulation for reactive ion etching of Si and SiO<sub>2</sub> by SF 5 + ions
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Journal Articles

Mechanically reliable hybrid organosilicate glasses for advanced interconnects

Karsu Ipek Kilic, Reinhold H. Dauskardt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 060601 (2020)
https://doi.org/10.1116/6.0000517
Published: October 2020
View article titled, Mechanically reliable hybrid organosilicate glasses for advanced interconnects
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Journal Articles

Block copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study

Jakin B. Delony, Peter J. Ludovice, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 032604 (2020)
https://doi.org/10.1116/1.5131639
Published: May 2020
View article titled, Block copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study
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Journal Articles

First-principles study of the electronic properties of graphene nanostructures for high current density cathodes

Nan Zhao, Liangliang Xu, Hua-Yi Hsu, Tsan-Chuen Leung, Ming-Chieh Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022211 (2020)
https://doi.org/10.1116/1.5140741
Published: March 2020
View article titled, First-principles study of the electronic properties of graphene nanostructures for high current density cathodes
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Journal Articles

Optimization of the response time measuring method for liquid crystal variable retarders

Antonio Campos-Jara, Pilar García Parejo, Alberto Álvarez-Herrero
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062930 (2019)
https://doi.org/10.1116/1.5122786
Published: December 2019
View article titled, Optimization of the response time measuring method for liquid crystal variable retarders
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Journal Articles

Predicting stability of nanofin arrays against collapse by phase field modeling

Yanming Wang, Peter Woytowitz, David Mui, Wei Cai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 051602 (2018)
https://doi.org/10.1116/1.5045791
Published: September 2018
View article titled, Predicting stability of nanofin arrays against collapse by phase field modeling
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Includes: Supplementary data
Journal Articles

Polymer-matrix nanocomposites bombarded by large Ar clusters and low energy Cs ions: Sputtering and topography development

Ryan Edwards, Henok Mebratie Mesfin, Eva Pospisilova, Claude Poleunis, Christian Bailly, Arnaud Delcorte
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F118 (2018)
https://doi.org/10.1116/1.5015989
Published: February 2018
View article titled, Polymer-matrix nanocomposites bombarded by large Ar clusters and low energy Cs ions: Sputtering and topography development
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Journal Articles

Relationships between crater and sputtered material characteristics in large gas cluster sputtering of polymers: Results from molecular dynamics simulations

Arnaud Delcorte, Konstantin Moshkunov, Mathieu Debongnie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F109 (2018)
https://doi.org/10.1116/1.5012981
Published: February 2018
View article titled, Relationships between crater and sputtered material characteristics in large gas cluster sputtering of polymers: Results from molecular dynamics simulations
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Journal Articles

Stochastic simulation of the UV curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm lithography

Masanori Koyama, Masamitsu Shirai, Hiroaki Kawata, Yoshihiko Hirai, Masaaki Yasuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G307 (2017)
https://doi.org/10.1116/1.4997295
Published: November 2017
View article titled, Stochastic simulation of the UV curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm lithography
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Journal Articles

Block copolymer directed self-assembly using chemoepitaxial guiding underlayers with topography

Benjamin D. Nation, Peter J. Ludovice, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GI01 (2017)
https://doi.org/10.1116/1.4991895
Published: September 2017
View article titled, Block copolymer directed self-assembly using chemoepitaxial guiding underlayers with topography
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Journal Articles

Interaction study of nitrogen ion beam with silicon

Marek E. Schmidt, Xiaobin Zhang, Yoshifumi Oshima, Le The Anh, Anto Yasaka, Teruhisa Kanzaki, Manoharan Muruganathan, Masashi Akabori, Tatsuya Shimoda, Hiroshi Mizuta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 03D101 (2017)
https://doi.org/10.1116/1.4977566
Published: February 2017
View article titled, Interaction study of nitrogen ion beam with silicon
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Journal Articles

Molecular simulations of C60 self-assembly on metal-adsorbed Si(111) surfaces

Oleg A. Utas, Dmitry A. Olyanich, Vsevolod V. Mararov, Tatiana V. Utas, Andrey V. Zotov, Alexander A. Saranin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 051806 (2016)
https://doi.org/10.1116/1.4961906
Published: August 2016
View article titled, Molecular simulations of C<sub>60</sub> self-assembly on metal-adsorbed Si(111) surfaces
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Includes: Supplementary data
Journal Articles

Surface structure of in situ cleaved single crystal Bi2Se3 measured by low energy ion scattering

Weimin Zhou, Haoshan Zhu, Jory A. Yarmoff
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 04J108 (2016)
https://doi.org/10.1116/1.4955134
Published: July 2016
View article titled, Surface structure of <em>in situ</em> cleaved single crystal Bi<sub>2</sub>Se<sub>3</sub> measured by low energy ion scattering
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Journal Articles

Physical basis of energy per cluster atom in the universal concept of sputtering

Robert J. Paruch, Zbigniew Postawa, Barbara J. Garrison
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 03H105 (2016)
https://doi.org/10.1116/1.4940153
Published: January 2016
View article titled, Physical basis of energy per cluster atom in the universal concept of sputtering
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Journal Articles

Multiscale simulation of resist pattern shrinkage during scanning electron microscope observations

Masaaki Yasuda, Yuki Furukawa, Hiroaki Kawata, Yoshihiko Hirai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FH02 (2015)
https://doi.org/10.1116/1.4935956
Published: November 2015
View article titled, Multiscale simulation of resist pattern shrinkage during scanning electron microscope observations
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Journal Articles

Carbon nanotube field effect transistor aptasensors for estrogen detection in liquids

Han Yue Zheng, Omar A. Alsager, Cameron S. Wood, Justin M. Hodgkiss, Natalie O. V. Plank
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06F904 (2015)
https://doi.org/10.1116/1.4935246
Published: November 2015
View article titled, Carbon nanotube field effect transistor aptasensors for estrogen detection in liquids
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Journal Articles

Three-dimensional modal analysis of carbon nanocones using molecular dynamics simulation

Ali Narjabadifam, Farid Vakili-Tahami, Mohammad Zehsaz, Mir Masoud Seyyed Fakhrabadi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051805 (2015)
https://doi.org/10.1116/1.4929440
Published: August 2015
View article titled, Three-dimensional modal analysis of carbon nanocones using molecular dynamics simulation
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