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Effectiveness of multipass and multirow writing methods for massively parallel e-beam systems

J. Vac. Sci. Technol. B 38, 062601 (2020)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Soo-Young Lee
  • Md Nabid Hasan
Journal of Vacuum Science & Technology B (2023) 41 (4)
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