Skip to Main Content
Skip Nav Destination

High aspect ratio features in poly(methylglutarimide) using electron beam lithography and solvent developers

J. Vac. Sci. Technol. B 30, 06FI01 (2012)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • James Carthew
  • Jason B. J. Taylor
  • Maria R. Garcia-Cruz
  • Nasim Kiaie
  • Nicolas H. Voelcker
  • Victor J. Cadarso
  • Jessica E Frith
ACS Applied Materials & Interfaces 14, 23066 (2022)
  • Golnaz Karbasian
  • Michael McConnell
  • Hubert George
  • Louisa Schneider
  • Matthew Filmer
  • Alexei Orlov
  • Alexei Nazarov
  • Gregory Snider
Applied Sciences 7, 246 (2017)
  • Golnaz Karbasian
  • Michael S McConnell
  • Alexei O Orlov
  • Alexei N Nazarov
  • Gregory L Snider
Nanotechnology 28, 215203 (2017)
  • Arsenty Kaganskiy
  • Tobias Heuser
  • Ronny Schmidt
  • Sven Rodt
  • Stephan Reitzenstein
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (2016) 34 (6)
  • Golnaz Karbasian
  • Michael S. McConnell
  • Alexei O. Orlov
  • Sergei Rouvimov
  • Gregory L. Snider
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (2016) 34 (1)
  • Golnaz Karbasian
  • Alexei O. Orlov
  • Gregory L. Snider
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (2015) 33 (6)
  • Mohammad Ali Mohammad
  • Steven K Dew
  • Maria Stepanova
Nanoscale Research Letters (2013) 8 (1)
Close Modal

or Create an Account

Close Modal
Close Modal