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AVS: Science & Technology of Materials Interfaces and Processing
Journal of Vacuum Science & Technology B
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Special Collections
Papers from the AVS 70th International Symposium
Papers from the 67th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2024)
Papers from the International Symposium on Sputtering and Plasma Processes 2024.
Celebrating the Achievements and Life of Paul H. Holloway
Vacuum Nanoelectronics
Papers from the 2024 International Symposium of the Vacuum Society of the Philippines (ISVSP 2024)
Physics and Chemistry of Surfaces and Interfaces
Developing SiGeSn Technology: Materials and Devices
CHIPS: Future of Semiconductor Processing and Devices
Papers from the 66th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2023)
Papers from the 14th International Symposium on Atomic Level Characterizations for New Materials and Devices (ALC '22)
Papers from the 12th Vacuum Technique Conference 2023
Vacuum Nanoelectronics
Vacuum Nanoelectronics
Physics and Chemistry of Surfaces and Interfaces
55 Years of Metalorganic Chemical Vapor Deposition (MOCVD)
Mid-Infrared Optoelectronic Materials and Devices
Papers from AIV XXIII 2017 Conference of Italian Association of Science and Technology
Conference Collection: PACSURF 2018
Celebrating the Early Career Professionals Contributing to the Advancement of Microelectronics and Nanotechnology
Papers from the 2022 International Symposium of the Vacuum Society of the Philippines (ISVSP 2022)
Secondary Ion Mass Spectrometry (SIMS)
XXV AIV Conference - Materials, Interfaces, and Processes in Industrial and Basic Research Applications (2022)
Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades
Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)
Neuromorphic Materials, Devices, and Processing
Plasma Processing for Advanced Microelectronics
Strain Engineering of Nanophotonic Devices
64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021
Physics and Chemistry of Surfaces and Interfaces
Vacuum Nanoelectronics
Papers from the 33rd International Vacuum Nanoelectronics Conference (33rd IVNC 2020)
Papers from the 3rd International Symposium of the Vacuum Society of the Philippines (ISVSP 2020)
Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2020
Reliability and Stress-related Phenomena in Nano and Microelectronics
Papers from the 47th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-47) 2020
Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)
Conference Collection: 35th North American Molecular Beam Epitaxy Conference 2019
Papers from the 10th International Symposium on Clusters and Nanomaterials (ISCAN - 2019)
Conference Collection: XXIV AIV 2019 Conference of the Association of Science and Technology
Conference Collection: 32nd IVNC and 12th IVESC (2019 Joint Meeting)
Conference Collection: 15th International Symposium on Sputtering and Plasma Processes (ISSP2019)
Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)
Conference Collection: 46th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-46) 2019
Conference Collection: 34th North American Molecular Beam Epitaxy Conference 2018
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
Special Topic Collection: Papers from the 31st International Vacuum Nanoelectronics Conference 2018
Special Topic Collection Honoring Paul Holloway for Contributions in Luminescent Materials Growth, Synthesis and Characterization
Special Topic Collection: Advanced Nano, and Metamaterials in Space Propulsion
Conference Collection: 20th Workshop on Dielectrics in Microelectronics
Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Papers from the International Conference on Thin Films 2017
Papers from the 45th Conference on the Physics and Chemistry of Surfaces and Interfaces
Papers from the 33rd North American Conference on Molecular Beam Epitaxy
Papers from the 30th International Vacuum Nanoelectronics Conference
Special Issue on Secondary Ion Mass Spectrometry (SIMS)
Special Issue: AVS 64
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