64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021
This collection includes papers from the 64th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication held virtually on June 1-4, 2021. The EIPBN Conference is dedicated to lithographic patterning science, nano-manufacturing process technology, and the applications these methods enable. The Conference Chair was Gerald Lopez (University of Pennsylvania, Singh Center for Nanotechnology), and the Program Chair was Martha I. Sanchez (LytEn Inc.).
Guest Editors: Program Chair: Martha I. Sanchez