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Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2020

This collection includes papers that were planned to be presented at EIPBN 2020. The international EIPBN conference is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. The Conference Chair was James Spallas (KLA), and the Program Chair was B. Robert Ilic (National Institute of Standards and Technology).

Conference Chair: James Spallas, Program Chair: B. Robert Ilic

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Mandy Grube; Benjamin Schille; Matthias Schirmer; Maik Gerngroß; Uwe Hübner; Paul Voigt; Sascha Brose
Ao Guo; Y. Carol Shieh; Ralu Divan; Rong R. Wang
Yanxue Hong; A. N. Ramanayaka; Ryan Stein; M. D. Stewart; J. M. Pomeroy
Luke Haponow; Jeff Kettle; John Allsop
Miriam Schröer; Hella-Christin Scheer
Joseph Favata; Valery Ray; Sina Shahbazmohamadi
Md Nabid Hasan; Soo-Young Lee; Byung-Sup Ahn; Jin Choi; Joon-Soo Park
Molly Brockway; Jack L. Skinner
Katsumi Nagaoka; Shun-ichiro Ohmi
Xiaocheng Liu; Peter Fecko; Zdenka Fohlerová; Tomáš Karásek; Jan Pekárek; Pavel Neužil
Yagmur Demircan Yalcin; Regina Luttge
Md Nabid Hasan; Soo-Young Lee; Byung-Sup Ahn; Jin Choi; Joon-Soo Park
Jamie R. Gardner; William R. McGehee; Mark D. Stiles; Jabez J. McClelland
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