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Papers from the 66th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2023)

This collection includes papers from the 66th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication held from May 30 – June 2, 2023 in San Francisco, CA. The EIPBN Conference is dedicated to lithographic patterning science, nano-manufacturing process technology, and the applications these methods enable. The Conference Chair was Qiangfei Xia (University of Massachusetts), and the Program Chair was Chih-Hao Chang (University of Texas at Austin).

Guest Editor: Program Chair: Chih-Hao Chang

Lithography

Rapid prototyping of etch test structures for hard mask development using electron beam lithography

Barbara A. Kazanowska; Aaron M. Dangerfield; Han Wang; Gene Lee; Luisa D. Bozano

https://doi.org/10.1116/6.0003215

Microelectronic and Nanoelectronic Devices

New method of fabrication of suspended metallic single electron transistor (SET)

Mohammad Istiaque Rahaman; G. P. Szakmany; A. O. Orlov; G. L. Snider

https://doi.org/10.1116/6.0003025

Lithography

Analytic study of exposure contrast over feature edge in electron-beam lithography

Soo-Young Lee

https://doi.org/10.1116/6.0003029

Nanoscale Science and Technology

Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices

Yingtao Wang; Mona Savalia; Xian Zhang

https://doi.org/10.1116/6.0003087

Lithography

Direct writing immersion laser lithography on graphene monolayers using two-photon absorption

Jianran Zhang; Carsten Strobel; Kathrin Estel; Thomas Mikolajick; Robert Kirchner

https://doi.org/10.1116/6.0003017

Measurement and Characterization

Modeling and algorithm of three-dimensional metrology with critical dimension scanning electron microscope

Delong Chen; Jielin Zhou; Yanjun Zhang; Erbo Xiao; Jinguo Ge; Quantong Li; Zhuming Liu

https://doi.org/10.1116/6.0003012

Nanoscale Science and Technology

In situ monitoring of sapphire nanostructure etching using optical emission spectroscopy

Kun-Chieh Chien; Noah Graff; Dragan Djurdjanovic; Chih-Hao Chang

https://doi.org/10.1116/6.0003023

MEMS and NEMS

Nanoscale strain gauges on flexible polymer substrates

Devin K. Brown; Isha Lodhi; Biya Haile; David R. Myers; Wilbur A. Lam; Oliver Brand

https://doi.org/10.1116/6.0003030

Nanoscale Science and Technology

Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices

Vijay Anirudh Premnath; Chih-Hao Chang

https://doi.org/10.1116/6.0003036

Nanoscale Science and Technology

Identification of dust particles on a periodic nanostructured substrate using scanning electron microscope imaging

Andrew Tunell; Lauren Micklow; Nichole Scott; Stephen Furst; Chih-Hao Chang

https://doi.org/10.1116/6.0003043

Nanoscale Science and Technology

Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly

Ethan Flores; Saurav Mohanty; Andrew Tunell; Chih-Hao Chang

https://doi.org/10.1116/6.0003027

Lithography

In situ metrology of direct-write laser ablation using optical emission spectroscopy

Briana Cuero; Kun-Chieh Chien; Chih-Hao Chang

https://doi.org/10.1116/6.0003031

Lithography

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

Kanta Yamamoto; Yuichi Utsumi; Ikuya Sakurai; Ikuo Okada; Kenji Hanada; Hidehiro Ishizawa; Masahiro Takeo; Taki Watanabe; Sho Amano; Satoru Suzuki; Koji Sumitomo; Akinobu Yamaguchi

https://doi.org/10.1116/6.0003021

Measurement and Characterization