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Journal Articles
J. Vac. Sci. Technol. A 41, 063103 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 38, 033205 (2020)
Published: March 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 34, 061103 (2016)
Published: October 2016
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 34, 041402 (2016)
Published: June 2016
Journal Articles
J. Vac. Sci. Technol. A 28, 953–957 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 24, 1972 (2006)
Published: September 2006
Journal Articles
K. Kelly-Wintenberg, Amanda Hodge, T. C. Montie, Liliana Deleanu, Daniel Sherman, J. Reece Roth, Peter Tsai, Larry Wadsworth
J. Vac. Sci. Technol. A 17, 1539–1544 (1999)
Published: July 1999
Journal Articles
J. Vac. Sci. Technol. A 15, 1235–1245 (1997)
Published: May 1997
Journal Articles
J. Vac. Sci. Technol. A 13, 2606–2612 (1995)
Published: September 1995
Journal Articles
Sudipta Seal, Susan Krezoski, Steven E. Hardcastle, Tery L. Barr, David H. Petering, Chi‐Feng Cheng, Jacek Klinowski, Peter H. Evans
J. Vac. Sci. Technol. A 13, 1260–1266 (1995)
Published: May 1995
Journal Articles
J. Vac. Sci. Technol. A 11, 773–775 (1993)
Published: July 1993
Journal Articles
J. Vac. Sci. Technol. A 9, 1329–1333 (1991)
Published: May 1991
Journal Articles
H. F. Arlinghaus, N. Thonnard, M. T. Spaar, R. A. Sachleben, G. M. Brown, R. S. Foote, F. V. Sloop, J. R. Peterson, K. B. Jacobson
J. Vac. Sci. Technol. A 9, 1312–1319 (1991)
Published: May 1991
Journal Articles
Stuart Hameroff, Yovana Simic‐Krstic, Lawrence Vernetti, Y. C. Lee, Dror Sarid, Jerome Wiedmann, Virgil Elings, Kevin Kjoller, Robert McCuskey
J. Vac. Sci. Technol. A 8, 687–691 (1990)
Published: January 1990