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Journal Articles

Test results for a sputter‐ion pump with a new cell structure

Available to Purchase
Yusuke Suetsugu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 3224–3227 (1994)
https://doi.org/10.1116/1.579241
Published: November 1994
View articletitled, Test results for a sputter‐ion pump with a new cell structure
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Journal Articles

Proposal of a sputter‐ion pump structure

Available to Purchase
Yusuke Suetsugu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 248–250 (1994)
https://doi.org/10.1116/1.578892
Published: January 1994
View articletitled, Proposal of a sputter‐ion pump structure
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