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Journal Articles
J. Vac. Sci. Technol. A 40, 033411 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 060404 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
Juliana de Novais Schianti, Fellype do Nascimento, Jhonattan Cordoba Ramirez, Munemasa Machida, Lucas Heitzmann Gabrielli, Hugo Enrique Hernandez-Figueroa, Stanislav Moshkalev
J. Vac. Sci. Technol. A 36, 021403 (2018)
Published: February 2018
Includes: Supplementary data
Journal Articles
José Herrera-Celis, Claudia Reyes-Betanzo, Adrián Itzmoyotl-Toxqui, Abdu Orduña-Díaz, Ana Pérez-Coyotl
J. Vac. Sci. Technol. A 33, 05E108 (2015)
Published: June 2015
Journal Articles
J. Vac. Sci. Technol. A 30, 050607 (2012)
Published: August 2012
Journal Articles
Wei Zhang, Seok-min Kim, Nikhil Ganesh, Ian D. Block, Patrick C. Mathias, Hsin-Yu Wu, Brian T. Cunningham
J. Vac. Sci. Technol. A 28, 996–1001 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 27, 614–619 (2009)
Published: May 2009
Journal Articles
J. Vac. Sci. Technol. A 26, 1383–1391 (2008)
Published: October 2008
Journal Articles
J. Vac. Sci. Technol. A 26, 819–823 (2008)
Published: July 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 587–591 (2007)
Published: April 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 747–751 (2006)
Published: May 2006
Journal Articles
J. Vac. Sci. Technol. A 23, 841–845 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 23, 811–819 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 21, S216–S221 (2003)
Published: September 2003
Journal Articles
J. Vac. Sci. Technol. A 18, 1125–1129 (2000)
Published: July 2000
Journal Articles
J. Vac. Sci. Technol. A 17, 2623–2628 (1999)
Published: September 1999
Journal Articles
D. R. Jung, D. S. Cuttino, J. J. Pancrazio, P. Manos, T. Cluster, R. S. Sathanoori, L. E. Aloi, M. G. Coulombe, M. A. Czarnaski, D. A. Borkholder, G. T. A. Kovacs, P. Bey, D. A. Stenger, J. J. Hickman
J. Vac. Sci. Technol. A 16, 1183–1188 (1998)
Published: May 1998