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Journal Articles
J. Vac. Sci. Technol. A 43, 023204 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 062201 (2024)
Published: September 2024
Journal Articles
Rahel Heesemann, Isa Bettermann, Roshan Paul, Milena Rey, Thomas Gries, Lilin Feng, Ulrich Schwaneberg, Claus Hummelsheim
J. Vac. Sci. Technol. A 41, 053110 (2023)
Published: August 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 050401 (2023)
Published: July 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 050804 (2020)
Published: August 2020
Journal Articles
Joshua M. Blatz, Daniel Benjamin, Faraz A. Choudhury, Benjamin B. Minkoff, Michael R. Sussman, J. Leon Shohet
J. Vac. Sci. Technol. A 38, 043001 (2020)
Published: May 2020
Journal Articles
Kennedy P. S. Boyd, Jesse A. Phillips, Maria A. Paszkowiak, Kassidy K. Everett, Emily A. Cook, Erin V. Iski
J. Vac. Sci. Technol. A 38, 023205 (2020)
Published: February 2020
Journal Articles
Marek Godlewski, Sylwia Gierałtowska, Łukasz Wachnicki, Rafał Pietuszka, Bartłomiej S. Witkowski, Anna Słońska, Zdzisław Gajewski, Michał M. Godlewski
J. Vac. Sci. Technol. A 35, 021508 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 01B134 (2017)
Published: December 2016
Journal Articles
Frank-Christian Kühl, Matthias Müller, Meike Schellhorn, Klaus Mann, Stefan Wieneke, Karin Eusterhues
J. Vac. Sci. Technol. A 34, 041302 (2016)
Published: May 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 04C102 (2016)
Published: April 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 021407 (2015)
Published: February 2015
Includes: Supplementary data
Journal Articles
Amit Vaish, Susan Krueger, Michael Dimitriou, Charles Majkrzak, David J. Vanderah, Lei Chen, Klaus Gawrisch
J. Vac. Sci. Technol. A 33, 01A148 (2015)
Published: December 2014
Journal Articles
J. Vac. Sci. Technol. A 31, 06F103 (2013)
Published: September 2013
Journal Articles
J. Vac. Sci. Technol. A 30, 050607 (2012)
Published: August 2012
Journal Articles
J. Vac. Sci. Technol. A 28, 1018–1028 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 963–968 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 28, 658–661 (2010)
Published: June 2010
Journal Articles
Wei Zhang, Seok-min Kim, Nikhil Ganesh, Ian D. Block, Patrick C. Mathias, Hsin-Yu Wu, Brian T. Cunningham
J. Vac. Sci. Technol. A 28, 996–1001 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 27, 748–753 (2009)
Published: June 2009
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