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Journal Articles
Ken Goto, Taro Nishimura, Masato Ishikawa, Takahito Okuyama, Haruka Tozato, Shogo Sasaki, Kazutada Ikenaga, Yoshihiko Takinami, Hideaki Machida, Yoshinao Kumagai
J. Vac. Sci. Technol. A 41, 042704 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033001 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 013001 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 063002 (2022)
Published: September 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063219 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 052404 (2021)
Published: August 2021
Journal Articles
Valentina Wieser, Pierluigi Bilotto, Ulrich Ramach, Hui Yuan, Kai Schwenzfeier, Hsiu-Wei Cheng, Markus Valtiner
J. Vac. Sci. Technol. A 39, 023201 (2021)
Published: January 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 012403 (2021)
Published: December 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 053001 (2020)
Published: July 2020
Journal Articles
Ankit Kumar Singh, Wen-Fang Chou, Xiaojia Jia, Cheng-Yin Wang, Canek Fuentes-Hernandez, Bernard Kippelen, Samuel Graham
J. Vac. Sci. Technol. A 38, 033203 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 051602 (2019)
Published: August 2019
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 031606 (2018)
Published: May 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031604 (2018)
Published: March 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 04F402 (2018)
Published: March 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 021516 (2018)
Published: February 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 061604 (2017)
Published: November 2017
Journal Articles
John Hennessy, Christopher S. Moore, Kunjithapatham Balasubramanian, April D. Jewell, Kevin France, Shouleh Nikzad
J. Vac. Sci. Technol. A 35, 041512 (2017)
Published: June 2017
Journal Articles
John B. O. Caughman, Richard H. Goulding, Theodore M. Biewer, Timothy S. Bigelow, Ian H. Campbell, Juan Caneses, Stephanie J. Diem, Andy Fadnek, Dan T. Fehling, Ralph C. Isler, Elijah H. Martin, Chad M. Parish, Juergen Rapp, Kun Wang, Clyde J. Beers, David Donovan, Nischal Kafle, Holly B. Ray, Guinevere C. Shaw, Melissa A. Showers
J. Vac. Sci. Technol. A 35, 03E114 (2017)
Published: May 2017
Journal Articles
Matthieu Giraud-Carrier, Trevor Decker, Joshua McClellan, Linsey Bennett, Aaron Hawkins, Jennifer Black, Soren Almquist, Holger Schmidt
J. Vac. Sci. Technol. A 35, 031602 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 021604 (2017)
Published: January 2017
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