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Journal Articles

Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor

Daniel J. Higgs, Jaime W. DuMont, Kashish Sharma, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01A117 (2018)
https://doi.org/10.1116/1.5004041
Published: December 2017
View article titled, Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor
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Journal Articles

Partial pressure measurement standard for characterizing partial pressure analyzers and measuring outgassing rates

Karl Jousten, Stephan Putzke, Joachim Buthig
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061603 (2015)
https://doi.org/10.1116/1.4935432
Published: November 2015
View article titled, Partial pressure measurement standard for characterizing partial pressure analyzers and measuring outgassing rates
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Journal Articles

Gas flow through microtubes with different internal surface coatings

M. Hadj Nacer, I. Graur, P. Perrier, J. G. Méolans, M. Wuest
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 021601 (2014)
https://doi.org/10.1116/1.4828955
Published: November 2013
View article titled, Gas flow through microtubes with different internal surface coatings
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Journal Articles

Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges

James A. Fedchak, Dana R. Defibaugh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 061601 (2012)
https://doi.org/10.1116/1.4750482
Published: September 2012
View article titled, Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges
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Journal Articles

Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head

P. Ryan Fitzpatrick, Zachary M. Gibbs, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A136 (2012)
https://doi.org/10.1116/1.3664765
Published: December 2011
View article titled, Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head
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Journal Articles

Use of a high-flow diaphragm valve in the exhaust line of atomic layer deposition reactors

Neil P. Dasgupta, Orlando Trejo, Fritz B. Prinz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A110 (2012)
https://doi.org/10.1116/1.3656945
Published: October 2011
View article titled, Use of a high-flow diaphragm valve in the exhaust line of atomic layer deposition reactors
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Journal Articles

Vacuum-calibration apparatus with pressure down to 10 − 10   Pa

Detian Li, Meiru Guo, Yongjun Cheng, Yan Feng, Dixin Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1099–1104 (2010)
https://doi.org/10.1116/1.3457934
Published: September 2010
View article titled, Vacuum-calibration apparatus with pressure down to 10 − 10   Pa
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Journal Articles

Controlled formation of condensed frost layers in cryogenic high vacuum pumps

Sergei E. Syssoev, Michael J. Eacobacci, Jr., Allen J. Bartlett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 925–930 (2010)
https://doi.org/10.1116/1.3275748
Published: June 2010
View article titled, Controlled formation of condensed frost layers in cryogenic high vacuum pumps
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Journal Articles

Apparatus for laminar-turbulent transition in gases

L. D. Hinkle, A. Muriel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 676–680 (2005)
https://doi.org/10.1116/1.1946709
Published: June 2005
View article titled, Apparatus for laminar-turbulent transition in gases
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Journal Articles

Film growth precursors in a remote SiH 4 plasma used for high-rate deposition of hydrogenated amorphous silicon

W. M. M. Kessels, M. C. M. van de Sanden, D. C. Schram
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 2153–2163 (2000)
https://doi.org/10.1116/1.1289541
Published: September 2000
View article titled, Film growth precursors in a remote SiH 4 plasma used for high-rate deposition of hydrogenated amorphous silicon
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Journal Articles

Three-dimensional flow analysis of spiral-grooved turbo booster pump in slip and continuum flow

H.-P. Cheng, R.-Y. Jou, F.-Z. Chen, Y.-W. Chang, Matsumi Iwane, Takashi Hanaoka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 543–551 (2000)
https://doi.org/10.1116/1.582221
Published: March 2000
View article titled, Three-dimensional flow analysis of spiral-grooved turbo booster pump in slip and continuum flow
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Journal Articles

Flow rate rule for high aspect ratio SiO 2 hole etching

Yasuhiko Chinzei, Makoto Ogata, Haruo Shindo, Takanori Ichiki, Yasuhiro Horiike
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 1519–1524 (1998)
https://doi.org/10.1116/1.581180
Published: May 1998
View article titled, Flow rate rule for high aspect ratio SiO 2 hole etching
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Journal Articles

Precision gas flowmeter for vacuum calibration

P. D. Levine, J. R. Sweda
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 747–752 (1997)
https://doi.org/10.1116/1.580814
Published: May 1997
View article titled, Precision gas flowmeter for vacuum calibration
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Journal Articles

A primary standard high vacuum calibration station for industrial applications

P. D. Levine, J. R. Sweda
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 1297–1302 (1996)
https://doi.org/10.1116/1.579945
Published: May 1996
View article titled, A primary standard high vacuum calibration station for industrial applications
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Journal Articles

Design and evaluation of a primary high‐vacuum standard

W. Jitschin, K. Jousten, D. Wandrey
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 3344–3351 (1992)
https://doi.org/10.1116/1.577823
Published: September 1992
View article titled, Design and evaluation of a primary high‐vacuum standard
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Journal Articles

Precise measurement of flow rates of vaporized tetraethylgermanium carried by an inert gas

Maciej Gazicki, Hannes Schalko, Peter Svasek, Fethi Olcaytug, Franz Kohl
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 51–58 (1992)
https://doi.org/10.1116/1.578149
Published: January 1992
View article titled, Precise measurement of flow rates of vaporized tetraethylgermanium carried by an inert gas
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Journal Articles

Gravimetric flowmeter calibration

J. R. Kahn, C. A. Wykoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 362–363 (1991)
https://doi.org/10.1116/1.577564
Published: March 1991
View article titled, Gravimetric flowmeter calibration
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Journal Articles

Design aspects of a differential vacuum pumping system

C. Bridgman, E. A. Meyer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 2427–2429 (1989)
https://doi.org/10.1116/1.575913
Published: May 1989
View article titled, Design aspects of a differential vacuum pumping system
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Journal Articles

The National Bureau of Standards primary high‐vacuum standard

C. R. Tilford, S. Dittmann, K. E. McCulloh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 2853–2859 (1988)
https://doi.org/10.1116/1.575612
Published: September 1988
View article titled, The National Bureau of Standards primary high‐vacuum standard
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Journal Articles

Use of porous plugs in the transition flow range for the calibration of vacuum gauges

J. K. N. Sharma, Pardeep Mohan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 1217–1221 (1988)
https://doi.org/10.1116/1.575681
Published: May 1988
View article titled, Use of porous plugs in the transition flow range for the calibration of vacuum gauges
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