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Journal Articles

Study of Cl2/Ar transient plasmas using a dynamic global model

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T. Rasoanarivo, C. Mannequin, F. Roqueta, M. Boufnichel, A. Rhallabi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033008 (2025)
https://doi.org/10.1116/6.0004464
Published: May 2025
View articletitled, Study of Cl2/Ar transient plasmas using a dynamic global model
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Journal Articles

Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies

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Seung-Ho Seo, Donggeon Shin, Cha-Hee Kim, Keun-Tae Jeong, Yeongjong Lee, Daehyun Kim, Hyun Koock Shin, Won-Jun Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012403 (2025)
https://doi.org/10.1116/6.0004013
Published: December 2024
View articletitled, Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies
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Journal Articles

Quantitative analysis of plasma-enhanced chemical vapor deposition mechanisms: Quantum chemical and plasma-fluid dynamics investigation on tetraethoxysilane/O2 plasma

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Hu Li, Kazuki Denpoh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043002 (2024)
https://doi.org/10.1116/6.0003523
Published: May 2024
View articletitled, Quantitative analysis of plasma-enhanced chemical vapor deposition mechanisms: Quantum chemical and plasma-fluid dynamics investigation on tetraethoxysilane/O2 plasma
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Journal Articles

Computational modeling of a surfatron mode microwave plasma in NH3/N2 for remote radical generation in a silicon native oxide cleaning process

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Juan P. Barberena-Valencia, Laxminarayan L. Raja
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033005 (2024)
https://doi.org/10.1116/6.0003415
Published: April 2024
View articletitled, Computational modeling of a surfatron mode microwave plasma in NH3/N2 for remote radical generation in a silicon native oxide cleaning process
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Journal Articles

Surface wettability of silicon nanopillar array structures fabricated by biotemplate ultimate top-down processes

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Sou Takeuchi, Daisuke Ohori, Masahiro Sota, Teruhisa Ishida, Yiming Li, Jenn-Hwan Tarng, Kazuhiko Endo, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023202 (2021)
https://doi.org/10.1116/6.0000770
Published: February 2021
View articletitled, Surface wettability of silicon nanopillar array structures fabricated by biotemplate ultimate top-down processes
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Journal Articles

Characterization of vapor draw vessel performance for low-volatility solid precursor delivery

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James E. Maslar, William A. Kimes, Brent A. Sperling, Ravindra K. Kanjolia
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 012403 (2021)
https://doi.org/10.1116/6.0000676
Published: December 2020
View articletitled, Characterization of vapor draw vessel performance for low-volatility solid precursor delivery
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Journal Articles

O·, H·, and ·OH radical etching probability of polystyrene obtained for a radio frequency driven atmospheric pressure plasma jet

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V. S. Santosh K. Kondeti, Yashuang Zheng, Pingshan Luan, Gottlieb S. Oehrlein, Peter J. Bruggeman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033012 (2020)
https://doi.org/10.1116/6.0000123
Published: May 2020
View articletitled, O·, H·, and ·OH radical etching probability of polystyrene obtained for a radio frequency driven atmospheric pressure plasma jet
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Journal Articles

Polyatomic thermal creep flows through long microchannels at large temperature ratios

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Christos Tantos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051602 (2019)
https://doi.org/10.1116/1.5111528
Published: August 2019
View articletitled, Polyatomic thermal creep flows through long microchannels at large temperature ratios
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Includes: Supplementary data
Journal Articles

Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges

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Emi Kawamura, De-Qi Wen, Michael A. Lieberman, Allan J. Lichtenberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 05C311 (2017)
https://doi.org/10.1116/1.4993595
Published: July 2017
View articletitled, Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges
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Journal Articles

Melt ejection from copper target in air in the presence of magnetic field using nanosecond pulsed laser ablation

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Khwairakpam Shantakumar Singh, Ashwini Kumar Sharma
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 031305 (2017)
https://doi.org/10.1116/1.4979663
Published: April 2017
View articletitled, Melt ejection from copper target in air in the presence of magnetic field using nanosecond pulsed laser ablation
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Journal Articles

Stable yttrium oxyfluoride used in plasma process chamber

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Yoshinobu Shiba, Akinobu Teramoto, Tetsuya Goto, Yukio Kishi, Yasuyuki Shirai, Shigetoshi Sugawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021405 (2017)
https://doi.org/10.1116/1.4975143
Published: January 2017
View articletitled, Stable yttrium oxyfluoride used in plasma process chamber
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Journal Articles

Rarefied gas flow into vacuum through short tubes at variable wall temperatures

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Mingxing Zhang, Christian Day, Stylianos Varoutis, Guobiao Cai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021604 (2017)
https://doi.org/10.1116/1.4974751
Published: January 2017
View articletitled, Rarefied gas flow into vacuum through short tubes at variable wall temperatures
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Journal Articles

One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas

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George M. Petrov, David R. Boris, Tzvetelina B. Petrova, Scott G. Walton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021302 (2016)
https://doi.org/10.1116/1.4940885
Published: February 2016
View articletitled, One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas
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Journal Articles

Vapor deposition on doublet airfoil substrates: Control of coating thickness and microstructure

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Theron M. Rodgers, Hengbei Zhao, Haydn N. G. Wadley
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061518 (2015)
https://doi.org/10.1116/1.4934258
Published: October 2015
View articletitled, Vapor deposition on doublet airfoil substrates: Control of coating thickness and microstructure
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Journal Articles

Vapor deposition on doublet airfoil substrates: Coating thickness control

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Theron M. Rodgers, Hengbei Zhao, Haydn N. G. Wadley
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061509 (2015)
https://doi.org/10.1116/1.4929664
Published: August 2015
View articletitled, Vapor deposition on doublet airfoil substrates: Coating thickness control
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Journal Articles

Modeling of photocurrent and lag signals in amorphous selenium x-ray detectors

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Sinchita Siddiquee, M. Z. Kabir
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 041514 (2015)
https://doi.org/10.1116/1.4923037
Published: June 2015
View articletitled, Modeling of photocurrent and lag signals in amorphous selenium x-ray detectors
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Journal Articles

Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source

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Jun Yoshikawa, Yoshio Susa, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031303 (2015)
https://doi.org/10.1116/1.4916018
Published: March 2015
View articletitled, Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source
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Journal Articles

Superconformal chemical vapor deposition of thin films in deep features

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Wenjiao B. Wang, Noel N. Chang, Tracey A. Codding, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 051512 (2014)
https://doi.org/10.1116/1.4893930
Published: August 2014
View articletitled, Superconformal chemical vapor deposition of thin films in deep features
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Includes: Supplementary data
Journal Articles

Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2

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Sang-Heon Song, Mark J. Kushner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 021306 (2014)
https://doi.org/10.1116/1.4863948
Published: February 2014
View articletitled, Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2
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Journal Articles

Ion optical effects in a low pressure rf plasma

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Hans Oechsner, Hubert Paulus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061309 (2013)
https://doi.org/10.1116/1.4823104
Published: September 2013
View articletitled, Ion optical effects in a low pressure rf plasma
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