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Journal Articles

Optical modeling of plasma-deposited ZnO films: Electron scattering at different length scales

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Harm C. M. Knoops, Bas W. H. van de Loo, Sjoerd Smit, Mikhail V. Ponomarev, Jan-Willem Weber, Kashish Sharma, Wilhelmus M. M. Kessels, Mariadriana Creatore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021509 (2015)
https://doi.org/10.1116/1.4905086
Published: December 2014
View articletitled, Optical modeling of plasma-deposited ZnO films: Electron scattering at different length scales
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Includes: Supplementary data
Journal Articles

Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering

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Xue-Ran Deng (邓雪然), Hong Deng (邓宏), Min Wei (韦敏), Jin-Ju Chen (陈金菊), Han Chen (陈翰)
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 051506 (2011)
https://doi.org/10.1116/1.3610175
Published: July 2011
View articletitled, Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering
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Journal Articles

Effect of annealing on the electrical properties of ZnO crystals grown by chemical vapor transport

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Koji Abe, Masaaki Miura, Masanori Oiwa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 03A112 (2011)
https://doi.org/10.1116/1.3565026
Published: March 2011
View articletitled, Effect of annealing on the electrical properties of ZnO crystals grown by chemical vapor transport
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Journal Articles

Ga-doped ZnO grown by pulsed laser deposition in H 2 : The roles of Ga and H

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David C. Look, Timothy C. Droubay, John S. McCloy, Zihua Zhu, Scott A. Chambers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 03A102 (2011)
https://doi.org/10.1116/1.3523296
Published: January 2011
View articletitled, Ga-doped ZnO grown by pulsed laser deposition in H 2 : The roles of Ga and H
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Journal Articles

Resistivity characteristics of transparent conducting impurity-doped ZnO films for use in oxidizing environments at high temperatures

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Jun-ichi Nomoto, Manabu Konagai, Toshihiro Miyata, Tadatsugu Minami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 861–866 (2010)
https://doi.org/10.1116/1.3455814
Published: June 2010
View articletitled, Resistivity characteristics of transparent conducting impurity-doped ZnO films for use in oxidizing environments at high temperatures
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Journal Articles

Combinatorial characterization of transparent conductive properties of Ga-doped ZnO films cosputtered from electron cyclotron resonance and rf magnetron plasma sources

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Housei Akazawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 314–321 (2010)
https://doi.org/10.1116/1.3328053
Published: February 2010
View articletitled, Combinatorial characterization of transparent conductive properties of Ga-doped ZnO films cosputtered from electron cyclotron resonance and rf magnetron plasma sources
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Journal Articles

Effects of hydrogen ambient and film thickness on ZnO:Al properties

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Joel N. Duenow, Timothy A. Gessert, David M. Wood, Anne C. Dillon, Timothy J. Coutts
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 692–696 (2008)
https://doi.org/10.1116/1.2891261
Published: June 2008
View articletitled, Effects of hydrogen ambient and film thickness on ZnO:Al properties
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Journal Articles

Optical properties and electrical properties of heavily Al-doped ZnSe layers

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D. C. Oh, T. Takai, I. H. Im, S. H. Park, T. Hanada, T. Yao, J. S. Song, J. H. Chang, H. Makino, C. S. Han, K. H. Koo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 259–264 (2008)
https://doi.org/10.1116/1.2836404
Published: February 2008
View articletitled, Optical properties and electrical properties of heavily Al-doped ZnSe layers
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Journal Articles

Transparent conducting zinc oxide thin films doped with aluminum and molybdenum

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Joel N. Duenow, Timothy A. Gessert, David M. Wood, Teresa M. Barnes, Matthew Young, Bobby To, Timothy J. Coutts
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 955–960 (2007)
https://doi.org/10.1116/1.2735951
Published: July 2007
View articletitled, Transparent conducting zinc oxide thin films doped with aluminum and molybdenum
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Journal Articles

Low resistivity polycrystalline ZnO:Al thin films prepared by pulsed laser deposition

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Hideki Tanaka, Kazuhiko Ihara, Toshihiro Miyata, Hirotoshi Sato, Tadatsugu Minami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 1757–1762 (2004)
https://doi.org/10.1116/1.1763903
Published: July 2004
View articletitled, Low resistivity polycrystalline ZnO:Al thin films prepared by pulsed laser deposition
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Journal Articles

Structural and luminescent properties of ZnTe film grown on silicon by metalorganic chemical vapor deposition

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C. X. Shan, X. W. Fan, J. Y. Zhang, Z. Z. Zhang, X. H. Wang, J. G. Ma, Y. M. Lu,, Y. C. Liu, D. Z. Shen, X. G. Kong, G. Z. Zhong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1886–1890 (2002)
https://doi.org/10.1116/1.1507344
Published: November 2002
View articletitled, Structural and luminescent properties of ZnTe film grown on silicon by metalorganic chemical vapor deposition
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Journal Articles

Direct measurement of density-of-states effective mass and scattering parameter in transparent conducting oxides using second-order transport phenomena

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D. L. Young, T. J. Coutts, V. I. Kaydanov, A. S. Gilmore, W. P. Mulligan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 2978–2985 (2000)
https://doi.org/10.1116/1.1290372
Published: November 2000
View articletitled, Direct measurement of density-of-states effective mass and scattering parameter in transparent conducting oxides using second-order transport phenomena
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Journal Articles

Characterization and analysis of ZnO:Al deposited by reactive magnetron sputtering

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S. Zafar, C. S. Ferekides, D. L. Morel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 2177–2182 (1995)
https://doi.org/10.1116/1.579539
Published: July 1995
View articletitled, Characterization and analysis of ZnO:Al deposited by reactive magnetron sputtering
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Journal Articles

Transport in strain relaxed In0.15Al0.85As/In0.17Ga0.83As heterojunctions

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J. M. Fernández, Jianhui Chen, H. H. Wieder
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 11, 889–892 (1993)
https://doi.org/10.1116/1.578322
Published: July 1993
View articletitled, Transport in strain relaxed In0.15Al0.85As/In0.17Ga0.83As heterojunctions
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Journal Articles

Ion‐beam sputtered indium tin oxide for InP solar cells

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H. Aharoni, T. J. Coutts, T. Gessert, R. Dhere, L. Schilling
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 4, 428–431 (1986)
https://doi.org/10.1116/1.573896
Published: May 1986
View articletitled, Ion‐beam sputtered indium tin oxide for InP solar cells
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