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Journal Articles
Jeong Won Kim, Ansoon Kim, Hui Ung Hwang, Jun Hyung Kim, Seungwook Choi, Norbert Koch, Dongguen Shin, Zhijuan Zhao, Fen Liu, Minki Choi, Kyu Myung Lee, Yongsup Park
J. Vac. Sci. Technol. A 41, 053211 (2023)
Published: August 2023
Journal Articles
George H. Major, B. Maxwell Clark, Kevin Cayabyab, Nathan Engel, Christopher D. Easton, Jan Čechal, Donald R. Baer, Jeff Terry, Matthew R. Linford
J. Vac. Sci. Technol. A 41, 043201 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033204 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063201 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 063202 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 013002 (2021)
Published: December 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 063204 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 041201 (2020)
Published: July 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 041001 (2020)
Published: June 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 033206 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 023209 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. A 36, 031601 (2018)
Published: March 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 35, 061406 (2017)
Published: October 2017
Journal Articles
Francisco Gontad, Antonella Lorusso, Massimo Di Giulio, Fredrik Eriksson, Esteban Broitman, Alessio Perrone
J. Vac. Sci. Technol. A 35, 031502 (2017)
Published: March 2017
Journal Articles
Akito Takashima, Eiji Ikenaga, Takayuki Muro, Akio Kawabata, Tomo Murakami, Mizuhisa Nihei, Naoki Yokoyama
J. Vac. Sci. Technol. A 35, 021507 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 01B142 (2017)
Published: December 2016
Journal Articles
Richard M. Osgood, III, Stephen Giardini, Joel Carlson, Prakash Periasamy, Harvey Guthrey, Ryan O'Hayre, Matthew Chin, Barbara Nichols, Madan Dubey, Gustavo Fernandes, Jin Ho Kim, Jimmy Xu, Philip Parilla, Joseph Berry, David Ginley
J. Vac. Sci. Technol. A 34, 051514 (2016)
Published: August 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 030801 (2016)
Published: May 2016
Journal Articles
Native oxide transport and removal during the atomic layer deposition of Ta2O5 on InAs(100) surfaces
J. Vac. Sci. Technol. A 34, 031101 (2016)
Published: March 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 021506 (2016)
Published: December 2015
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