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Journal Articles
J. Vac. Sci. Technol. A 34, 041509 (2016)
Published: June 2016
Journal Articles
J. Vac. Sci. Technol. A 8, 2468–2473 (1990)
Published: May 1990
Journal Articles
J. Vac. Sci. Technol. A 5, 3079–3084 (1987)
Published: September 1987
Journal Articles
J. Vac. Sci. Technol. A 4, 3085–3090 (1986)
Published: November 1986
Journal Articles
J. Vac. Sci. Technol. A 4, 1510–1513 (1986)
Published: May 1986